光刻机投影物镜的像差原位检测新技术

提出了一种新的光刻机投影物镜像差原位检测(AMF)技术。详细分析了该技术利用特殊测试标记检测投影物镜球差、像散、彗差的基本原理,论述了该技术利用对准位置坐标计算像差引起的成像位置偏移量的方法。实验结果表明AMF技术可实现球差、彗差、像散等像差参量的精确测量。AMF技术考虑了光刻胶等工艺因素对像差引起的成像位置偏移量的影响,有效避免了目前基于硅片曝光方式的彗差原位检测技术对离焦量、像面倾斜等像质参量限制的依赖。     

一种大视场相位测量轮廓术系统标定方法

在进行大视场相位测量轮廓术系统参量标定时需要大的标定平面和精密移动台,由于携带不方便,不易进行现场标定。提出了一种用于相位测量轮廓术系统参量的高精度、现场标定方法,采用一块较小的平面标定靶在有效测量体积内不同位置多次摆放,以获取密集的数据点。先标定出摄像机的内参量和外参量,再指定一个全局参考平面和若干辅助参考平面,然后在图像平面上分区计算出每个位置标定靶上每点相对辅助参考平面的高度差和相位差,最后应用极大似然估计法估计出相位高度映射参量。实验中平面高度测量的标准偏差达到0.0433 mm。这种方法只需要较小的平面标定靶,标定过程方便、精度高,完全适合大视场三维测量相位测量轮廓术系统现场标定要求。     

使用叠栅层析技术测量超音速风洞中的非对称复杂密度场

使用叠栅层析技术解决超音速风洞中复杂密度场的测量难题。应用高灵敏度叠栅偏折仪和间隔角度旋转模型的方法获取超音速风洞中流场的多方向叠栅条纹图。层析计算中使用一种新的偏折角修正迭代的叠栅层析算法,该方法可以实现对有限角采样和包含遮挡物的非完全数据重建,迭代过程中结合内边界平滑滤波提高重建精度。实验中获取了马赫数为2.52的超音速风洞中9幅不同采样角的条纹图,经过50次迭代计算后重建出膨胀波区非对称密度场的截面分布,并对测量结果和误差进行了分析和讨论。使用计算流体力学技术对该密度场进行建模和计算,验证了叠栅层析重建结果的正确性,证实了该技术在测量复杂流场领域的重要价值。     

Geometry of skew information-based quantum coherence

We study the skew information-based coherence of quantum states and derive explicit formulas for Werner states and isotropic states in a set of autotensors of mutually unbiased bases (MUBs). We also give surfaces of skew information-based coherence for Bell-diagonal states and a special class of X states in both computational basis and in MUBs. Moreover, we depict the surfaces of the skew information-based coherence for Bell-diagonal states under various types of local nondissipative quantum channels. The results show similar as well as different features compared with relative entropy of coherence and l₁ norm of coherence.     

Gaussian states as minimum uncertainty states

In bosonic fields, Gaussian states, which consist of a rather wide family of states including coherent states, squeezed states, thermal states, etc., have many classical-like features, and are usually defined from the mathematical perspective in terms of characteristic functions. It is well known that some special Gaussian states, such as coherent states, are minimum uncertainty states for the conventional Heisenberg uncertainty relation involving canonical pair of position and momentum observables. A natural question arises as whether all Gaussian states can be characterized as minimum uncertainty states. In this work, we show that indeed Gaussian states coincide with minimum uncertainty states for an information-theoretic refinement of the conventional uncertainty relation established in Luo (2005) [40]. This characterization puts Gaussian states on a novel basis of physical significance.     

Strong chaos of fast scrambling yields order: Emergence of decoupled quantum information capsules

The information loss problem in black hole evaporation is one of fundamental issues. Its resolution requires more profound understanding of information storage mechanism in quantum systems. In this Letter, we argue that when multiple unknown parameters are stored in large entangled qudits, strong chaos generated by fast scrambling in high temperature limit yields an ordered information storage structure with decoupled quantum information capsules (QICs). A rotational isometry emerges in the quantum Fisher information metric. The isometry is expected to be observed in future experiments on cold atoms in a pure entangled state. We provide a QIC speculation of black hole evaporation.     

Distinguishability and Disturbance in the Quantum Key Distribution Protocol Using the Mean Multi-Kings’ Problem

We introduce a quantum key distribution protocol using mean multi-kings’ problem. Using this protocol, a sender can share a bit sequence as a secret key with receivers. We consider a relation between information gain by an eavesdropper and disturbance contained in legitimate users’ information. In BB84 protocol, such relation is known as the so-called information disturbance theorem. We focus on a setting that the sender and two receivers try to share bit sequences and the eavesdropper tries to extract information by interacting legitimate users’ systems and an ancilla system. We derive trade-off inequalities between distinguishability of quantum states corresponding to the bit sequence for the eavesdropper and error probability of the bit sequence shared with the legitimate users. Our inequalities show that eavesdropper’s extracting information regarding the secret keys inevitably induces disturbing the states and increasing the error probability.     

On-chip multiphoton Greenberger–Horne–Zeilinger state based on integrated frequency combs

One of the most important multipartite entangled states, Greenberger–Horne–Zeilinger state (GHZ), serves as a fundamental resource for quantum foundation test, quantum communication and quantum computation. To increase the number of entangled particles, significant experimental efforts should been invested due to the complexity of optical setup and the difficulty in maintaining the coherence condition for high-fidelity GHZ state. Here, we propose an ultra-integrated scalable on-chip GHZ state generation scheme based on frequency combs. By designing several microrings pumped by different lasers, multiple partially overlapped quantum frequency combs are generated to supply as the basis for on-chip polarization-encoded GHZ state with each qubit occupying a certain spectral mode. Both even and odd numbers of GHZ states can be engineered with constant small number of integrated components and easily scaled up on the same chip by only adjusting one of the pump wavelengths. In addition, we give the on-chip design of projection measurement for characterizing GHZ states and show the reconfigurability of the state. Our proposal is rather simple and feasible within the existing fabrication technologies and we believe it will boost the development of multiphoton technologies.     

Channel-Supermodular Entropies: Order Theory and an Application to Query Anonymization

This work introduces channel-supermodular entropies, a subset of quasi-concave entropies. Channel-supermodularity is a property shared by some of the most commonly used entropies in the literature, including Arimoto–Rényi conditional entropies (which include Shannon and min-entropy as special cases), k-tries entropies, and guessing entropy. Based on channel-supermodularity, new preorders for channels that strictly include degradedness and inclusion (or Shannon ordering) are defined, and these preorders are shown to provide a sufficient condition for the more-capable and capacity ordering, not only for Shannon entropy but also regarding analogous concepts for other entropy measures. The theory developed is then applied in the context of query anonymization. We introduce a greedy algorithm based on channel-supermodularity for query anonymization and prove its optimality, in terms of information leakage, for all symmetric channel-supermodular entropies.     

实际量子密钥分配扩展BB84协议窃听下的安全性分析

考虑强衰减激光脉冲技术实现的准单光子源和量子信道损耗以及窃听者Eve窃听能力有限等实际情况, 提出了一种窃听装置;同时对扩展BB84协议的各种窃听做了全面分析,计算得出发送者Alice/窃听者Eve所获得的交互信息量和发送者Alice/接收者Bob所能容忍的误码率上限,以此作为检测量子信道安全性的标准,同时得出Breidbart基/分束攻击相结合的方法是比截取/重发更为有效的窃听方案.