Review on the thickness measurement of ultrathin oxide films by mutual calibration method

Mutual calibration was suggested as a method to determine the absolute thickness of ultrathin oxide films. It was motivated from the large offset values in the reported thicknesses in the Consultative Committee for Amount of Substance (CCQM) pilot study P-38 for the thickness measurement of SiO₂ films on Si(100) and Si(111) substrates in 2004. Large offset values from 0.5 to 1.0 nm were reported in the thicknesses by ellipsometry, X-ray reflectometry (XRR), medium-energy ion scattering spectrometry (MEIS), Rutherford backscattering spectroscopy (RBS), nuclear reaction analysis (NRA), and transmission electron microscopy (TEM). However, the offset value for the thicknesses by X-ray photoelectron spectroscopy (XPS) was close to zero (−0.013 nm). From these results, the mutual calibration method was reported for the thickness measurement of SiO₂ films on Si(100) by combination of TEM and XPS. The mutual calibration method has been applied for the thickness measurements of hetero oxide films such as Al₂O₃ and HfO₂. Recently, the effect of surface contamination was reported to be critical to the thickness measurement of HfO₂ films by XPS. On the other hand, MEIS was proved to be a powerful zero offset method which is not affected by the surface contamination. As a result, the reference thicknesses in the CCQM pilot study P-190 for the thickness measurement of HfO₂ films on Si(100) substrate were determined by mutual calibration method from the average XRR data and MEIS analysis. Conclusively, the thicknesses of ultrathin oxide films can be traceably certified by mutual calibration method and most thickness measurement methods can be calibrated from the certified thicknesses.     

A two-point calibration method for quantifying organic binary mixtures using secondary ion mass spectrometry in the presence of matrix effects

Quantification of the composition of binary mixtures in secondary ion mass spectrometry (SIMS) is required in the analyses of technological materials from organic electronics to drug delivery systems. In some instances, it is found that there is a linear dependence between the composition, expressed as a ratio of component volumes, and the secondary ion intensities, expressed as a ratio of intensities of ions from each component. However, this ideal relationship fails in the presence of matrix effects and linearity is observed only over small compositional ranges, particularly in the dilute limits. In this paper, we assess an empirical method, which introduces a power law dependence between the intensity ratio and the volume fraction ratio. A previously published physical model of the organic matrix effect is employed to test the limits of the method and a mixed system of 3,3′-bis(9-carbazolyl) biphenyl and tris(2-phenylpyridinato)iridium (III) is used to demonstrate the method. This paper introduces a two-point calibration, which determines both the exponent in the power law and the sensitivity factor for the conversion of ion intensity ratio into volume fraction ratio. We demonstrate that this provides significantly improved accuracy, compared with a one-point calibration, over a wide compositional range in SIMS quantification and with a weak dependence on matrix effects. Because the method enables the use of clearly identifiable secondary ions for quantitative purposes and mitigates commonly observed matrix effects in organic materials, the two-point calibration method could be of significant benefit to SIMS analysts.     

DCE-MRI参数联合IFIT1基因对腰椎间盘突出患者椎间盘退变程度的评估价值

探讨DCE-MRI参数及IFIT1基因对腰椎间盘突出症(LDH)患者椎间盘退变(IDD)程度的评估价值。随机选取确诊的66例LDH患者作为研究对象,根据改良Pfirrmann分级法将患者分为2组:轻中度IDD(Ⅰ~Ⅲ级)组(46例)和重度IDD(Ⅳ~Ⅴ级)组20例。通过DCE-MRI检查考察患者的K-trans值,采用日本骨科学会评分(JOA)评估腰椎功能,采用视觉模拟评分法(VAS)评估腰部疼痛,采用RT-PCR检测外周血单个核细胞(PBMC)中IFIT1的mRNA表达。轻中度IDD组的K-trans值显著低于重度IDD组。轻中度IDD组患者PBMC中的IFIT1 mRNA相对表达量显著低于重度IDD组。K-trans值与PBMC中的IFIT1 mRNA水平和VAS评分正相关,与JOA评分负相关(P<0.05)。PBMC中的IFIT1 mRNA水平与VAS评分正相关,与JOA评分负相关(P<0.05)。K-trans值和PBMC中的IFIT1 mRNA水平联合诊断重度IDD的AUC值、敏感性和特异性分别为0.991、91.3%和100.0%,AUC值和特异性均高于单独诊断。DCE-MRI检查中的K-trans值联合PBMC中的IFIT1 mRNA水平可用于LDH患者IDD程度的诊断。     

icMRCI+Q理论研究CF离子12个-S态和23个?态的光谱性质

采用考虑Davidson修正的内收缩多参考组态相互作用(icMRCI+Q)方法结合相关一致基组aug-ccpV5Z和aug-cc-pV6Z计算了CF~+离子第一离解极限C~+(~2p_u)+F(~2P_u)对应的12个∧-S态(X~l∑~+,a~3∏,1~3∑~+,1~3Δ,1~1∑~-,1~1∑~-,1~3∑~-,2~1∑~+,1~1∏,2~3∏,2~1∏和2~3∑~+)所产生的23个Ω态的势能曲线.计算中考虑了旋轨耦合效应、核价相关和标量相对论修正以及将参考能和相关能分别外推至完全基组极限.基于得到的势能曲线,获得了束缚和准束缚的9个∧-S态和16个Ω态的光谱常数,并且X~1∑~+,a~3∏~(势阱一)∧-S态的光谱常数与已有的实验结果非常符合.此外,计算了CF自由基X~2∏态到CF~+离子束缚和准束缚的9个∧-S态的垂直电离势和绝热电离势,并且CF~+(X~1∑~+)←CF(X~2∏)和CF~+(a~3∏(势阱一))←CF(X~2∏)的垂直电离势和绝热电离势与相应的实验结果也非常符合.由a~3∏,1~1∏态和其他激发∧-S态势能曲线的交叉现象,借助于计算的旋轨耦合矩阵元,分析了a~3∏~(势阱一),1~1∏~(势阱一)和2~1∑~+态的预解离机理.计算的23个Ω态离解极限处的相对能量与实验结果十分吻合.最后计算了(2)0+~(势阱一)(v'=0-5),(1)1~(势阱一)(v'=0-5)和(2)1~(势阱一)(v'=0)到X0~+态跃迁的Franck-Condon因子和辐射寿命.     

Improving copper plating adhesion on glass using laser machining techniques and areal surface texture parameters

Glass is a promising substitute substrate material being evaluated for electronic packaging technology. Improving the electroless copper plated layer adhesion of the glass is one of the most important considerations for development of the technology. An excimer laser (248 nm) was used for structured texturing of glass surfaces (to improve adhesion) by changing mask dimensions, laser operating parameters and overlapping pitch spacing, and therefore producing a range of micro-scale features. Electroless plated copper adhesion strength was assessed using quantitative scratch testing, demonstrating that micro-patterned structures can significantly improve copper/glass adhesion. New ISO 25178 Part 2 areal surface texture parameters were used to characterise the surface roughness of ablated glass surfaces, and correlated to the scratch testing results. Highly correlated parameters were identified that could be used as predictive surface design tools, directly linking surface topography to adhesion performance, without the need for destructive adhesion quantification via scratch testing.     

基于非同步替代光谱定标的地表下垫面影响分析

对760nm附近的氧气吸收带,选用植被、枯萎植被、人工地物、沙地和雪地五种典型地表类型,基于模拟数据进行非同步替代光谱定标方法的误差分析,比较不同地表类型得到的光谱定标准确度,为高光谱成像仪的非同步替代光谱定标提供定标图像选择策略.结果表明:运用两种光谱匹配方法——光谱角度匹配和欧氏距离法得到的定标误差基本一致;730~800nm的地表反射率曲线标准差在0.05nm以内时,定标误差集中在±0.5nm范围内;人工地物类型中个别地物如橄榄绿光泽涂料和植被大面积覆盖的图像数据不适合用于非同步替代光谱定标.     

手性负折射率材料的最新进展

阐述了手性负折射率现象的产生机制;总结了近几年国内外手性负折射率材料在仿真模拟和实验制备方面的研究进展;分析了手性负折射率材料的旋光性、手性参数、损耗等;介绍了手性负折射率材料在各个领域的应用。分析认为,探索手性负折射率材料的新机制、新方法和新材料,从而在可见光波段实现负折射率是未来手性负折射率材料的重要发展方向之一。     

光栅投影相位法系统模型及标定方法

本文针对传统投影光栅相位法的光学三角法模型进行了改进,采用直入射光路并配合使用一种简便易行的标定方法,只需使用相移公式求取相位差,而不会引入与系统几何位置关系有关的量,简化了求取高度矩阵的要求。实验结果表明,新系统模型精度良好,测量误差为0.107 mm。采用该模型和标定方法可以克服传统方法系统模型的局限性,最大限度减少误差源并提高抗干扰性。     

天文/卫星组合点校捷联惯性导航系统算法研究

捷联式惯性导航系统通常采用卫星导航系统的位置、速度信息对惯导解算误差进行校正,但对于水下载体惯性导航系统而言,由于只能获得点位置信息,对惯导的校正精度以及校正参量有限。针对上述问题,提出了基于天文/卫星组合校正捷联式惯导技术,通过卫星精确定位信息和天文快速观测信息,全面修正惯导系统误差、提高导航精度。仿真结果表明,基于天文/卫星组合校正算法对惯导进行校正,相对于传统校正算法精度可提高约50%。     

Universal scaling for the dilemma strength in evolutionary games

Why would natural selection favor the prevalence of cooperation within the groups of selfish individuals? A fruitful framework to address this question is evolutionary game theory, the essence of which is captured in the so-called social dilemmas. Such dilemmas have sparked the development of a variety of mathematical approaches to assess the conditions under which cooperation evolves. Furthermore, borrowing from statistical physics and network science, the research of the evolutionary game dynamics has been enriched with phenomena such as pattern formation, equilibrium selection, and self-organization. Numerous advances in understanding the evolution of cooperative behavior over the last few decades have recently been distilled into five reciprocity mechanisms: direct reciprocity, indirect reciprocity, kin selection, group selection, and network reciprocity. However, when social viscosity is introduced into a population via any of the reciprocity mechanisms, the existing scaling parameters for the dilemma strength do not yield a unique answer as to how the evolutionary dynamics should unfold. Motivated by this problem, we review the developments that led to the present state of affairs, highlight the accompanying pitfalls, and propose new universal scaling parameters for the dilemma strength. We prove universality by showing that the conditions for an ESS and the expressions for the internal equilibriums in an infinite, well-mixed population subjected to any of the five reciprocity mechanisms depend only on the new scaling parameters. A similar result is shown to hold for the fixation probability of the different strategies in a finite, well-mixed population. Furthermore, by means of numerical simulations, the same scaling parameters are shown to be effective even if the evolution of cooperation is considered on the spatial networks (with the exception of highly heterogeneous setups). We close the discussion by suggesting promising directions for future research including (i) how to handle the dilemma strength in the context of co-evolution and (ii) where to seek opportunities for applying the game theoretical approach with meaningful impact.