Calculation of heat transfer and uniformity of chemical amplification during post-exposure bake

Heat transfer in a resist-coated silicon wafer using a bake process is theoretically evaluated by modeling the three-dimensional diffusion process, focusing on the controllability of the lithographic performance of chemically amplified resists. Six models of various ambient conditions are used. The proximity gap between the hotplate and the wafer is found to have a dominant influence on the heat transfer process for the whole system. Because the atmosphere near the wafer acts as a thermal diffusion buffer layer, no temperature gradient occurs in the resist, even when it is subjected to convective heat transfer from the resist surface. Experimental results obtained by X-ray lithography confirm the calculation results.     

Hyperbolic spaces are of strictly negative type

We study finite metric spaces with elements picked from, and distances consistent with, ambient Riemannian manifolds. The concepts of negative type and strictly negative type are reviewed, and the conjecture that hyperbolic spaces are of strictly negative type is settled, in the affirmative. The technique of the proof is subsequently applied to show that every compact manifold of negative type must have trivial fundamental group, and to obtain a necessary criterion for product manifolds to be of negative type.

     

奇异类内离差矩阵条件下的Fisher最优判据

特征提取是模式分类与识别的重要环节，Fisher最优判据是特征提取的基本方法之一．本文提出了一种计算奇异类内离差矩阵条件下Fisher最优判据的新方法，并给出了计算步骤．     

具有位相型修理的离散时间可修排队系统

本文研究了具有一般独立输入，位相型修理的离散时间可修排队系统，假定服务台对顾客的服务时间和服务台寿命服从几何分布，运用矩阵解析方法我们给出系统嵌入在到达时刻的稳态队长分布和等待时间分布，并证明这些分布均为离散位相型分布．我们也得到在广义服务时间内服务台发生故障次数的分布，证明它服从一个修正的几何分布．我们对离散时间可修排队与连续时间可修排队进行了比较，说明这两种排队系统在一些性能指标方面的区别之处．最后我们通过一些数值例子说明在这类系统中顾客的到达过程、服务时间和服务台的故障率之间的关系．     

同输入M/M/∞排队群的联合队长过程

本提出一个偏微分方程方法，用这一方法研究同输入M/M／∞排队群中的联合队长分布。在任意初始条件下，给出了瞬时联合队长分布的多元母函数，也讨论了稳态队长的联合分布及各排队系统之间的相关性。     

Design and fabrication of fluid controlled dynamic optical lens system

A novel small fluid controlled optical lens system that is capable of displaying dynamic variation of its focal length and field-of-view (FOV) is designed and fabricated. In this active lens system, appropriate volume of the optical fluid can be pumped into or out of the lens chamber to provide double-convex (DCX) or double-concave (DCV) lens effect. Simple optical imaging experiments were performed using different sets of glass lenses with fixed focal lengths to determine the optimum lens configuration required for designing a dynamic optical lens system. The experimental results obtained from the glass lenses demonstrate that a combination of a single DCX lens with three DCV lenses provides a wider FOV. The flexible membranes for fluid controlled lenses were fabricated using polydimethylsiloxane polymer material, which has good optical transparency and elasticity. A simple fluid injection system is used to vary the radius of curvature of the lenses, and thereby to change the focal length. A dynamic optical lens system with a combination of one DCX and multiple variable focal length DCV lenses as designed here can image an object with a wide range of focal length and FOV. With this fluid controlled optical system, the FOV and focal length could be continuously varied and a maximum FOV of 118.3° could be achieved. The smallest f-number (f_/#) for this fluid controlled single lens system was found to be 1.3, which corresponds to the numerical aperture value of 0.35.     

A Comparative Study on Dynamic and Static Sparsity Patterns in Parallel Sparse Approximate Inverse Preconditioning

Sparse approximate inverse (SAI) techniques have recently emerged as a new class of parallel preconditioning techniques for solving large sparse linear systems on high performance computers. The choice of the sparsity pattern of the SAI matrix is probably the most important step in constructing an SAI preconditioner. Both dynamic and static sparsity pattern selection approaches have been proposed by researchers. Through a few numerical experiments, we conduct a comparable study on the properties and performance of the SAI preconditioners using the different sparsity patterns for solving some sparse linear systems. This revised version was published online in July 2006 with corrections to the Cover Date.     

振动系统的模态分析实验设计

利用模态分析原理和简单试验仪器，得到了直观的悬臂梁和圆盘前4阶模态振型，使学生熟悉了模态分析原理和测试方法，有利于学生对振动规律的理解．     

Stability of Markovian structure observed in high frequency foreign exchange data

Contrary to the common sense in economics and financial engineering, price fluctuations at very fine level of motion exhibit various evidences against the efficient market hypothesis. We attempt to investigate this issue by studying extensive amount of foreign currency exchange data for over five years at the finest level of resolution. We specifically focus on the proposed stability in binomial conditional probabilities originally found in much smaller examples of financial time series. In order to handle very large data, we have written an efficient program in C that automatically generates those conditional probabilities. It is found that the stability is maintained for extremely large time duration that covers almost the entire period. Based on the length of conditions for which the conditional probabilities are distinguishable each other, we identify the length of memory being less than 3 movements.     

偏振小孔干涉仪

偏振小孔干涉仪是一种可实用的新型干涉仪。它综合小孔衍射技术、偏振技术和共光路设计为一体,具有条纹对比度可调、抗干扰能力强和非接触检验等优点,可广泛用于各种光学元件及其胶合层的检验。目测精度达1/10λ,计算机条纹处理精度可调。