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151.
建立一个描述低能电子在多元多层介质中散射的物理模型,运用MonteCarlo方法模拟低能电子在靶体胶衬底中的复杂散射过程,在此基础上通过大量计算研究入射束能、胶层厚度、衬底材料等不同曝光条件对抗蚀剂沉积能密度分布的影响,获得沉积能分布规律:适量的低束能、薄胶层、低原子序数衬底可以使前散射电子对胶中沉积能密度分布的贡献增大、背散射电子的贡献减小,从而提高曝光分辨率.
关键词:
电子束曝光
MonteCarlo方法
低能电子散射
能量沉积 相似文献
152.
The object of the present investigation is to introduce a new trigonometric method of summation which is both regular and
Fourier effective and determine its status with reference to other methods of summation (see §2-§4) and also give an application
of this method to determine the degree of approximation in a new Banach space of functions conceived as a generalized Holder
metric (see §5). 相似文献
153.
Abdellah Bnouhachem 《Journal of Global Optimization》2006,36(3):351-363
In this paper, we proposed a modified Logarithmic-Quadratic Proximal (LQP) method [Auslender et al.: Comput. Optim. Appl. 12, 31–40 (1999)] for solving variational inequalities problems. We solved the problem approximately, with constructive accuracy criterion. We show that the method is globally convergence under that the operator is pseudomonotone which is weaker than the monotonicity and the solution set is nonempty. Some preliminary computational results are given.The author was supported by the NSFC grants Nos: 70571033 and 10571083. 相似文献
154.
Hua Nie Jian-hua Wu 《应用数学学报(英文版)》2006,22(2):257-264
This paper is concerned with the unstirred chemostat model with two-species and one non-reproducingresource.The global attractivity of the positive steady-state solutions of the original system is established.Moreover,the effects of the growth rate on the unique positive equilibrium of the single population model arestudied. 相似文献
155.
This paper formulates a two-dimensional strip packing problem as a non-linear programming(NLP)problem and establishes the first-order optimality con-ditions for the NLP problem.A numerical algorithm for solving this NLP problemis given to find exact solutions to strip-packing problems involving up to 10 items.Approximate solutions can be found for big-sized problems by decomposing the setof items into small-sized blocks of which each block adopts the proposed numericalalgorithm.Numerical results show that the approximate solutions to big-sized prob-lems obtained by this method are superior to those by NFDH,FFDH and BFDHapproaches. 相似文献
156.
Ling-yan Tang Song-he Song 《应用数学学报(英文版)》2007,23(2):303-310
In this paper,we use Daubechies scaling functions as test functions for the Galerkin method,and discuss Wavelet-Galerkin solutions for the Hamilton-Jacobi equations.It can be proved that the schemesare TVD schemes.Numerical tests indicate that the schemes are suitable for the Hamilton-Jacobi equations.Furthermore,they have high-order accuracy in smooth regions and good resolution of singularities. 相似文献
157.
The phase boundary theory and the contact rule of phase regions are compared, and some weaknesses of the latter are manifested.
The comparison between the Gupta’s method and the boundary theory method for constructing multicomponent isobaric sections
is also presented. 相似文献
158.
M. A. Posypkin I. Kh. Sigal 《Computational Mathematics and Mathematical Physics》2006,46(12):2187-2202
The efficiency of parallel implementations of the branch-and-bound method in discrete optimization problems is considered. A theoretical analysis and comparison of two parallel implementations of this method is performed. A mathematical model of the computation process is constructed and used to obtain estimates of the maximum possible speedup. Examples of problems in which none of these two parallel implementations can speed up the computations are considered. 相似文献
159.
用三个关系式与Mathematica软件求第二类自然数幂和公式 总被引:1,自引:1,他引:0
首先介绍三个第二类自然数幂和关系式并对其中的两式给出证明,接着利用这些关系式与数学软件M athem atica4.0,给出求解第二类自然数幂和公式的若干机械计算方法. 相似文献
160.
Jian‐guo Tang 《Mathematical Methods in the Applied Sciences》2006,29(11):1327-1338
An implicit iterative method is applied to solving linear ill‐posed problems with perturbed operators. It is proved that the optimal convergence rate can be obtained after choosing suitable number of iterations. A generalized Morozov's discrepancy principle is proposed for the problems, and then the optimal convergence rate can also be obtained by an a posteriori strategy. The convergence results show that the algorithm is a robust regularization method. Copyright © 2006 John Wiley & Sons, Ltd. 相似文献