大口径平面光学元件超精密加工技术的研究

为了解决激光核聚变装置中大口径平面光学元件的批量制造难题,将先进制造技术和传统抛光技术相结合,提出了一种新的工艺方法,即使用ELID(在线电解)磨削代替传统的铣磨和初抛工序,以提高生产效率。利用数控抛光将工件抛光至最终的面形精度,以提高生产效率和减少边缘效应。将连续抛光作为最终加工工序,使加工工件的表面粗糙度和波纹度达到工程要求。实验证明这一新的工艺方法是可行的。     

Voltammetric Antioxidant Analysis in Mineral Oil Samples Immobilized into Boron‐Doped Diamond Micropore Array Electrodes

Mineral oil microdroplets containing the model antioxidant N,N‐didodecyl‐N′,N′‐diethyl‐phenylene‐diamine (DDPD) are immobilized into a 100×100 pore‐array (ca. 10 μm individual pore diameter, 100 μm pitch) in a boron‐doped diamond electrode surface. The robust diamond surface allows pore filling, cleaning, and reuse without damage to the electrode surface. The electrode is immersed into aqueous electrolyte media, and voltammetric responses for the oxidation of DDPD are obtained. In order to further improve the current responses, 20 wt% of carbon nanofibers are co‐deposited with the oil into the pore array. Voltammetric signals are consistent with the oxidation of DDPD and the associated transfer of perchlorate anions (in aqueous 0.1 M NaClO₄) or the transfer of protons (in aqueous 0.1 M HClO₄). From the magnitude of the current response, the DDPD content in the mineral oil can be determined down to less than 1 wt% levels. Perhaps surprisingly, the reversible (or midpoint) potential for the DDPD oxidation in mineral oil (when immersed in 0.1 NaClO₄) is shown to be concentration‐dependent and to shift to more positive potential values for more dilute DDPD in mineral oil solutions. An extraction mechanism and the formation of a separate organic product phase are proposed to explain this behavior.     

高速切削过程中诱发绝热剪切带形成的热塑性剪切波

提出了高速切削过程中诱发绝热剪切带形成的热塑性剪切波的传播机理,针对锯齿形切屑中热望性区域内的塑性梯度变形特征、动量和能量耗散情况,建立了与切削条件相关的热塑性剪切波的传播模型及剪切带宽度模型.在此基础上,通过淬硬45钢的切削实验并结合改进的Johnson-Cook本构模型分析了热塑性剪切波的传播规律,并将剪切带宽度模型与已提出的DB模型、WR模型和DM模型做了对比,结果表明,由热塑性剪切波传播理论推导的剪切带宽度模型与实验结果较其他模型吻合较好.     

铝合金电解加工中的钝化行为及其对加工过程的影响

本文研究与分析了铝合金电解加工过程的钝化行为,探讨了加工电压、电流密度、加工间隙及电解液成分等因素对电解加工性能的影响. 研究表明,在试验温度（23 ± 1）^oC下,铝合金在NaNO₃和NaF复合电解液体系（钝化电解液）存在钝化现象,钝化降低了电解加工的电流效率,并使电流效率随电流密度发生较大变化. 同时,钝化也使间隙特征曲线负移. 而在相同浓度NaCl和NaF复合电解液体系（活化电解液）电解加工,可在很宽的电位范围内保持活性溶解. 在钝化电解液中,电解加工表面更加平整.     

SiC单晶刻划过程的脆塑性转变特征研究

SiC单晶化学性能稳定、导热系数高、热膨胀系数小、耐磨性能好,广泛用于大功率器件产业.但由于其材料的硬度很大,加工非常困难.脆性材料塑性域加工为提高该类材料的表面质量,降低加工时间和成本提供了有效的途径.本文采用不同刀具角度和刀尖圆弧半径的单点金刚石刀具对4H-SiC单晶进行刻划实验,利用声发射、摩擦力传感器来监测刻划过程中声发射信号强度以及摩擦力的变化,并通过Leica DCM3D以及SEM观察划痕沟槽表面形貌、切屑状态,综合分析以获得4H-SiC单晶在不同角度、刀尖圆弧半径下塑脆转变的临界切削深度.结果表明,增大刀具角度有利于塑性域加工;在相同条件下,刀尖圆弧半径越大,临界切削深度越大.     

Ultra‐Precision Surface Machining with Reactive Plasma Jets

Atmospheric Plasma Jet Machining (PJM) is a technology for non‐mechanical ultra‐precision surface shape generation, shape error correction and smoothing based on atmospheric plasma jets. PJM is favorably applied to generate optical surfaces like aspheres, acylinders, or free‐forms but also to improve the surface shape accuracy in a very fast and cost‐efficient way. For that purpose a mainly fluorine containing plasma jet is brought into contact with a surface to locally remove material by a chemical reaction forming volatile products. Hence, the technology is limited to materials like silicon, fused silica and similar, or silicon carbide. Furthermore, the etch profile results from a convolution of the radical and the temperature distribution at the surface. Since the temperature distribution is also influenced by the plasma jet this leads to a non‐linear dependence of the removal function of the plasma tool on its velocity. Using the dwell‐time algorithm for deterministic surface machining by superposition of the local removal function of the plasma tool an advanced process simulation is necessary. In a first local approximation the velocity dependence of the removal function, which has to be determined previously, must be incorporated. Second order thermal effects due to inhomogeneous heating caused by the part geometry and the tool path can be managed by a sophisticated calculation of the surface temperature evolution during machining based on the Finite Element Method (FEM). With the help of this procedure the accuracy and convergence of the machining process can be significantly improved. In the article several examples of surface processing using plasma jet machining are presented. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Chiral mirror and optical resonator designs for circularly polarized light: suppression of cross-polarized reflectances and transmittances

A left-handed chiral sculptured thin film (STF) that reflects strongly at the wavelength of the circular Bragg resonance tends to partially convert the handedness of incident LCP (left-circularly-polarized) light to RCP (right-circularly-polarized). We show that the cross-polarized component of the reflected RCP beam can be eliminated by interference with an additional RCP beam that is reflected at the interface of an isotropic cover and an AR (antireflecting) layer. For best results the refractive index and thickness of the AR layer need to accommodate a phase change on reflection that occurs at the chiral film. Effective suppression of the reflectances R_RR, R_RL, R_LR and the transmittances T_RL, T_LR can be achieved by sandwiching the chiral reflector between such amplitude and phase-matched AR coatings. Co-polarized chiral reflectors of this type may form efficient handed optical resonators. For LCP light the optical properties of such a handed resonator are formally the same as the properties of the isotropic passive or active Fabry–Perot resonators, but the handed resonator is transparent to RCP light.     

Two Dimensions Residual Stresses Analysis Through Incremental Groove Machining Combined with Electronic Speckle Pattern Interferometry

In this study a new residual stress determination method in two directions simultaneously is presented. This method is based on stresses relaxation in a groove that is machined incrementally. The residual stresses relaxation occurs simultaneously from both the depth and the length of the groove. Thus, measuring the surface strain field generated by the relaxation enables to determine the stress gradient both along the depth and the length of the groove. To measure the surface strain in a direction perpendicular to the groove, a digital speckle pattern interferometer is used. This method is suitable when the residual stress field in the structure varies in the depth as well as along the surface of the part, like for example in a welded structure. The method is tested here on an aluminium plate in which a central band has been shot peened.     

往复式电镀金刚石线锯切割单晶硅片特性研究

通过往复式电镀金刚石线锯切割单晶硅片实验,分析了切片表面的微观形貌特点,研究了锯丝速度与进给速度对硅片的表面粗糙度、总厚度偏差(TTV)、翘曲度与亚表面损伤层厚度(SSD)的影响规律.结果表明:线锯锯切时材料以脆性模式去除,锯切表面的微观形貌呈现部分沟槽与断续划痕,并存在大量凹坑;锯丝速度增大,进给速度减小,表面粗糙度与SSD减小;锯丝速度增大,进给速度增大,硅片的翘曲度也随之增大;硅片TTV值与锯丝速度和进给速度的匹配关系相关.     

准直磨料射流在准直管内流动机理及切割应用研究

分析了准直磨料射流的工作原理、特点及高速多相流体介质在准直管内有阻运动时的磨粒运动方程式。研究表明,准直管管长在０．４ｍ～３ｍ范围内磨粒速度基本保持不变,准直管长度、直径、供料量和磨粒型号等参数之间存在最佳配合关系。本为使用准直磨料射流进行切割和冲蚀的工程应用提供了初步的理论基础。