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针对基于剪切干涉原理的光刻投影物镜波像差检测设备中相移测量的需求,设计了一种移相装置.该装置采用了桥式放大机构,获得了较大放大比和相对紧凑的结构.从原理上对桥式放大机构进行了分析和讨论,得到了输入位移与其放大比之间的函数关系,并得到了其关系曲线.经过非线性有限元分析,对该装置的变形、受力和模态特性进行了验证.验证结果满足检测平台移相要求. 相似文献
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The present series of papers summarizes the results of a three-year research project on the realistic simulation of car audio sound in car passenger compartments using a combined Finite Element (FE) and Geometrical Acoustics (GA) approach. The simulations are conducted for the whole audible frequency range with the loudspeakers of the car audio system as the sound sources. The challenges faced during the project relate to fundamental questions regarding the realistic sound field simulation in small enclosures with strong modal and diffraction effects.The paper denoted here as Part I focuses on boundary and source representations in the FE and GA domain and suggests guidelines for a best-possible acquisition of the required data. Since a straight-forward determination of the boundary and source characteristics is mostly hampered by the immense complexity and inhomogeneity of the materials and loudspeaker configurations inside a car compartment, different measurement and calculation methods have been applied to determine the required data and quantify the corresponding uncertainty. The paper clearly points out the strength and weaknesses of the applied methods depending on the considered frequency range and material characteristics. In order to keep the complexity of the FE simulations at a manageable level, all passive boundaries were considered as locally reacting with impedance conditions.Part II of the study applies the obtained data in combined FE-GA room acoustic simulations and compares the simulated room impulse responses (RIR) with corresponding measurement results. In a final step the observed differences in the RIRs are related to the uncertainty and inherent errors in the boundary and source representation. 相似文献
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从薄板弹性理论出发,对可实现曲率变化的环形线负载驱动模型进行分析,给出了基于该模型的大镜厚比变曲率反射镜的形变方程.以较小的驱动力实现较大的中心形变为目标,利用MATLAB软件对不同反射镜厚度、驱动环半径下的反射镜形变情况进行模拟计算,结果表明,反射镜厚度范围在2~4 mm之间、驱动环半径数值在反射镜有效半径1/2处最佳.以此为依据,设计并研制了口径为100 mm、厚度为3 mm的铍青铜环形线负载驱动变曲率反射镜结构及原型样片,给出了变曲率反射镜整体结构前10阶的振动模态分析结果.完成装配后,反射镜原型样片的面形精度接近λ/30(λ为波长).对该结构进行极限曲率变化和面形精度保持的验证实验,通过对变曲率反射镜结构进行改进,环形线负载驱动能够实现超过30个波长(632.8 nm)的中心形变,且面形精度的变化与反射镜中心矢高的变化呈弱相关. 相似文献
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Effect of size and indium-composition on linear and nonlinear optical absorption of InGaN/GaN lens-shaped quantum dot 下载免费PDF全文
Based on the Schr ¨odinger equation for envelope function in the effective mass approximation, linear and nonlinear optical absorption coefficients in a multi-subband lens quantum dot are investigated. The effects of quantum dot size on the interband and intraband transitions energy are also analyzed. The finite element method is used to calculate the eigenvalues and eigenfunctions. Strain and In-mole-fraction effects are also studied, and the results reveal that with the decrease of the In-mole fraction, the amplitudes of linear and nonlinear absorption coefficients increase. The present computed results show that the absorption coefficients of transitions between the first excited states are stronger than those of the ground states. In addition, it has been found that the quantum dot size affects the amplitudes and peak positions of linear and nonlinear absorption coefficients while the incident optical intensity strongly affects the nonlinear absorption coefficients. 相似文献
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The finite-thickness model (FTM) is applied to the design of cylindrical microlenses based on the wave-front interference principle, rather than the existing zero-thickness model (ZTM). This design method is very simple in physics and highly efficient in computations. For cylindrical lenses with different f-numbers (from f/1.5 to f/0.6), the detailed designs by using both the FTM and the ZTM are carried out. To show the superiority of the FTM to the ZTM, we investigate the focal performance of all the designed lenses based on rigorous electromagnetic theory and the boundary element method. Numerical results reveal that the constructed cylindrical lenses by the FTM are witnessed to exhibit much better focusing performance than those by the ZTM, especially for the small f-numbers. 相似文献
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利用有效液滴模型计算了偶偶超重核的α衰变半衰期,计算过程中采用了保持碎片体积守恒的不对称形状描述以及有效惯性系数计算Gamow势垒穿透因子.首先在质子数Z为88—98的区域检验了有效液滴模型,发现计算结果与实验符合得比较好.随后将此模型推广到Z≥100的情况,虽然只用了两个模型参数,计算结果与实验数据符合,说明有效液滴模型是计算偶偶超重核素α衰变半衰期的一个成功模型. 相似文献
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