Contamination inspection on wafer with oxide or nitride film by using a vibrating contact potential difference probe

Contamination inspection on the oxide and nitride films deposited on silicon wafer surface by using vibrating contact potential difference (CPD) probe is presented in this paper. Contaminants induce the variation of the CPD between a dielectric layer and the probe material. However, the screening effect of the charges on the surface, interface and in the dielectric layer overwhelms the contamination signals when using the vibrating CPD monitor. This obstacle can be overcome using the signal characteristic diagnosis by which most of the charge signals can be filtered out. The validity of this approach was verified by means of the vapor phase decomposition coupling with inductively coupled plasma mass spectrometry (VPD‐ICP‐MS), and we found that the filtrated contamination signals were correlated closely with the metallic concentration. Moreover, the proper annealing process could enhance the response signals of contaminants, especially for Ni and Cu, in the nitride film monitoring. This inspection method was effectively applied in the trace metallic contamination routine monitor and the contamination source tracing of the furnace tools. Copyright © 2010 John Wiley & Sons, Ltd.     

(对数)逻辑斯谛克分布下可靠性抽样检验

对于寿命遵从逻辑斯谛克分布或对数逻辑斯谛克分布的产品,本文在完全样本情形给出了制定可靠性抽样检验方案的统计方法.数值模拟结果表明该方法是可行的.本文还指出,这种方法可用于位置一刻度参数分布族.     

利用贝叶斯网络提高港口国检查效率

提高港口国监控(PSC)的检查效率,本文研究了船舶固有属性(船舶年龄、船旗、船级社、船舶尺度)、港口国检查缺陷项与船舶事故间的影响关系。本文所使用的数据主要来自于英国劳氏船级社(LR)、国际海事组织(IMO)和东京谅解备忘录(Tokyo MOU)三个数据库,共5478条干散货船数据。利用贝叶斯网络(BN)构建模型,并分别采用Bayesian Network (BN)和Greedy thick thinning(GTT)算法构建网络模型。同时利用K-折交叉验证、对数似然函数(LL)、赤池信息量准则(AIC)和贝叶斯信息准则(BIC)对模型进行评估。结果表明船舶的固有属性和关键检查缺陷项对船舶事故均有较高的直接影响,而大多数的港口国监控检查缺陷之间具有相互影响,并且通过关键检查缺陷项对船舶事故产生间接影响。因此可以利用关键检查缺陷项优化港口国检验制度,提高检验效率。     

视觉技术在坦克火炮运动参数测量中的应用

为准确、便捷地测量坦克火炮运动参数,设计了一套基于视觉检测技术的测试系统。首先利用平面标定法对系统成像模型进行标定;然后基于迭代寻优的思路,采用动态阈值对光斑图像进行分割,并利用最小二乘法进行圆周拟合,结合光斑的几何特点进行光斑有效性判定,进而迭代获取最优的定位结果;最后结合光斑在投影靶标上的运行距离和时间,获得坦克火炮运动参数。实验结果表明,测试系统能够适应复杂的光照环境,满足对测量精度、重复性、便捷性的要求。     

基于扩展卡尔曼滤波的吊钩姿态估计技术研究 

针对吊钩运动不定且易受大风、雾气等影响其作业效率问题,提出并实现基于MEMS传感器的吊钩姿态估计系统。建立吊钩三维空间运动模型,消除吊钩扭转影响;通过四元数的扩展卡尔曼滤波算法,对MEMS陀螺仪、加速度计与磁强计进行数据融合,解算得到吊钩三维姿态、摆角与摆向;采用基于视觉检测的吊钩空间姿态为参考基准,对起重机吊钩进行姿态估计验证。实验结果表明：该系统能有效融合MEMS传感器数据,获得高精度的吊钩姿态,实现姿态的实时检测。     

A combined attributes–variables plan

The design of single sampling plans in which the lot acceptance decision is based on both variables and attribute measurement of quality is discussed. A new plan, called the combined attributes–variables plan, is proposed incorporating an acceptance number to the regular variables plan for consumer protection. A design approach for the new plan is also developed for food manufacturing applications in which the sample size cannot be predetermined because of short production lengths and other analytical testing issues. Copyright © 2014 John Wiley & Sons, Ltd.     

A general repeat inspection plan for dependent multicharacteristic critical components

A component is critical if it causes disaster or a very high cost upon failure. Multicharacteristic critical components exist in many systems. Such components could be a part of an aircraft, space shuttle, a special weapon system or a gas ignition system. In many situations, characteristics’ failures of these components are statistically dependent. In this paper, a new inspection plan for such components is proposed. A mathematical model that depicts the plan is developed and an example demonstrating the results of the model is given. The advantage of this model over the other model where independence of the characteristics’ failure is assumed for the case of dependency is illustrated. The model resulted in an average of 32.4% reduction in cost compared to the situation where the dependency case is solved assuming statistical independence.     

带有中止检查规则（n－i）的CSP－1方案

本文引人转移概率母函数及幂级数等方法讨论带有中止规则（ｎ＊－ｉ）的连续抽样方案ＣＳＰ－１的中止概率Ｐ＊得到了Ｐ＊作为ＣＳＰ－１方案的度量的理论特性，证明了Ｄｏｄｇｅ型ＣＳＰ－１方案与带有中止规则（ｎ＊－ｉ）的ＣＳＰ－１方案具有相同的ＡＯＱ，ＡＦＩ，ＯＣ函数．文末还给出了一些数值结果．     

基于疲劳损伤和倒塌事故的导管架平台结构风险分析

基于风险的检验技术已成为海洋工程领域的研究热点,其优势在于优化检验范围,减少检验成本。通过有限元方法对导管架平台结构的疲劳损伤和倒塌失效进行数值计算,并基于可靠性理论对平台结构关键构件的疲劳失效概率以及该构件疲劳破坏后平台结构的整体倒塌失效概率进行确定,形成风险矩阵,以制定相应的检验计划。在此基础上,对南海某导管架平台结构进行了定量风险评估,形成关键节点和构件的风险矩阵,并给出了相应的检验目标以指导制定检验计划。本文工作可为导管架平台结构制定合理高效的检验计划,在保障平台结构安全作业的同时降低运行费用。     

A POSSIBLE EXPERIMENTAL TEST ON THEGRAVITATION THEORY OF COMPLEX FIELD

By appropriately choosing additional dimensions of space-time, the mass spectrum of mesons was obtained, and the calculated results agree with the experimental data.