高温退火处理下SiNx薄膜组成及键合结构变化

采用等离子增强化学气相沉积法, 以氨气和硅烷为反应气体, p型单晶硅为衬底, 低温下(200 ℃)制备了非化学计量比氮化硅(SiN_x)薄膜. 在N₂氛围中, 于500–1100 ℃范围内对薄膜进行热退火处理. 室温下分别使用Fourier变换红外吸收(FTIR)光谱技术和X射线光电子能谱(XPS)技术测量未退火以及退火处理后SiN_x薄膜的Si–N, Si–H, N–H键键合结构和Si 2p, N 1s电子结合能以及薄膜内N和Si原子含量比值R的变化. 详细讨论了不同温度退火处理下SiN_x薄膜的FTIR和XPS光谱演化同薄膜内Si, N, H原子间键合方式变化之间的关系. 通过分析FTIR和XPS光谱发现退火温度低于800 ℃时, SiN_x薄膜内Si–H和N–H键断裂后主要形成Si–N键; 当退火温度高于800 ℃时薄膜内Si–H和N–H键断裂利于N元素逸出和Si纳米粒子的形成; 当退火温度达到1100 ℃时N₂与SiN_x薄膜产生化学反应导致薄膜内N和Si原子含量比值R增加. 这些结果有助于控制高温下SiN_x薄膜可能产生的化学反应和优化SiN_x薄膜内的Si纳米粒子制备参数. 关键词： x薄膜')" href="#">SiN_x薄膜 Fourier变换红外吸收光谱 X射线光电子能谱 键合结构     

Method to identify time delay of chaotic semiconductor laser with optical feedback

We propose a power spectrum analysis method to directly identify the time delay of a chaotic semiconductorlaser with optical feedback. By measuring the radio frequency (RF) power spectrum of the chaotic laserand performing an inverse Fourier transform, we can easily unveil all the time delay signatures, regardless ofwhether the chaotic output is induced by single or multiple feedback. This method successfully retrieves thetwo time delay signatures from the power spectrum of a semiconductor laser with double-cavity feedback.     

Fourier coefficients of Zygmund functions and analytic functions with quasiconformal deformation extensions

An open problem is to characterize the Fourier coefficients of Zygmund functions.This problem was also explicitly suggested by Nag and later by Teo and Takhtajan-Teo in the course of study of the universal Teichmu¨ller space.By a complex analysis approach,we give a characterization for the Fourier coefficients of a Zygmund function by a quadratic form.Some related topics are also discussed,including those analytic functions with quasiconformal deformation extensions.     

A deterministic method study of the impact of the Pauli principle in double-gate MOSFETs

The Pauli principle is included in a multisubband deterministic solver for two-dimensional devices without approximations.The nonlinear Boltzmann equations are treated properly without compromising on accuracy,convergence,or CPU time.The simulation results indicate the significant impact of the Pauli principle on the transport properties of the quasi-2D electron gas,especially for the on state.     

自由面势流问题边界元法的数值色散误差

以连续及离散Fourier分析研究自由面势流问题边界元法的数值色散误差,并从理论上探讨有关计算中数值色散误差的改善问题.研究表明:对于该问题的数值色散误差而言,重要的在于以问题相应的离散算子考察计及各种数值手段后的总体色散误差,而非仅考虑该数值手段自身的数值色散误差大小.高阶面元、自由面域外奇点或适当的耦合方法是降低有关问题算子总体色散误差的较好选择.     

Two mutually conjugated tripartite entangled states and their fractional Fourier transformation kernel

We newly construct two mutually-conjugate tripartite entangled state representations,based on which we propose the formulation of three-mode entangled fractional Fourier transformation(EFFT) and derive the transformation kernel.The EFFT’s additivity property is proved and the eigenmode of EFFT is derived.As an application,we calculate the EFFT of the three-mode squeezed vacuum state.     

某些Fourier级数值的代数无关性

证明了某些代数系数Fourier级数及其导数在代数点上值的代数无关性.     

小波的传递函数构造法

本从小波与尺度函数的传递函数出发,给出了构造小波母函数及尺度函数的构造方法,根据此方法,首先以小波与其尺度函数的传递函数为起点,构造了一个非正交小波,随后以此小波和一个已有的非正交步波为基准,进一步推广得到了一类非正交小波及尺度函数类,在非正交小波的基础上,利用将尺度函数正交化的方法,构造出了相应正交小波的函数值。     

具有立方对称性及两个弛豫时间的微极热弹性介质中调和时间源引起的变形

研究了具有立方对称性及两个弛豫时间的微极热弹性介质在调和时间源中的响应．采用了Fourier变换以及数值逆变换技术．在物理域中,得到了位移、应力、微转动和温度分布的数值结果．将微极立方晶体法向位移、法向力应力、切向耦合应力和温度分布的计算结果,与微极各向同性固体的结果进行比较．绘制了指定材料的数值结果图形．还推断了某些特殊情况的结果．     

Generation of time-dependent ultra-short optical pulse trains in the presence of self-steepening effect

Starting from the extended nonlinear Schr?dinger equation in which the self-steepening effect is included, the evolution and the splitting processes of continuous optical wave whose amplitude is perturbed into time related ultra-short optical pulse trains in an optical fibre are numerically simulated by adopting the split-step Fourier algorithm. The results show that the self-steepening effect can cause the characteristic of the pulse trains to vary with time, which is different from the self-steepening-free case where the generated pulse trains consist of single pulses which are identical in width, intensity, and interval, namely when pulses move a certain distance, they turn into the pulse trains within a certain time range. Moreover, each single pulse may split into several sub-pulses. And as time goes on, the number of the sub-pulses will decrease gradually and the pulse width and the pulse intensity will change too. With the increase of the self-steepening parameter, the distance needed to generate time-dependent pulse trains will shorten. In addition, for a large self-steepening parameter and at the distance where more sub-pulses appear, the corresponding frequency spectra of pulse trains are also wider.