光刻机硅片表面不平度原位检测技术

随着光刻特征尺寸的不断减小,硅片表面不平度对光刻性能的影响越来越显著.该文提出了一种新的硅片表面不平度的原位检测技术本文在分析特殊测试标记成像规律的基础上,讨论了测试标记的对准位置偏移量与硅片表面起伏高度的变化规律,提出了一种新的硅片表面不平度原位检测技术.实验表明,该技术可实现硅片表面不平度及硅片表面形貌的高准确度原位测量.该技术考虑了光刻机承片台吸附力的非均匀性对硅片表面不平度的影响,更真实反映曝光工作状态下的硅片表面不平度大小.与现有的原位检测方法相比,硅片表面不平度的测量空间分辨率提高了1.67%倍,可实现硅片表面形貌的原位检测.     

轴向流对Z箍缩等离子体稳定性的影响

利用理想磁流体力学(MHD)模型对有轴向流参与的Z箍缩等离子体不稳定性进行了分析.对可压缩平板等离子体模型的色散关系进行了推导,讨论了三种不同等离子体状态下的不稳定性增长率.结果显示,等离子体的可压缩性对磁瑞利-泰勒/开尔文-亥姆霍兹(MRT/KH)杂化不稳定性有抑制作用,改善了轴向剪切流对长波长扰动的影响.分析了不同轴向流速度分布对系统稳定性的影响.结果表明,对于峰值相同的不同轴向流,其对不稳定性的抑制效果只依赖于扰动集中区域内速度剪切的大小,与其他位置的速度剪切无关.     

载流子选择性接触:高效硅太阳电池的选择

太阳电池可看成由光子吸收层和接触层两个基本单元组成,接触层是高复合活性金属界面和光子吸收层之间的区域.为了进一步提高硅太阳电池的转换效率,关键是降低光子吸收层和接触之间的复合损失.近年来,载流子选择性接触引起了光伏界的研究兴趣,其被认为是接近硅太阳电池效率理论极限的最后的障碍之一.本文分析了三种类型的载流子选择性接触:在光子吸收层与金属界面之间引入薄的重掺杂层,即所谓的发射极或背面场;利用两种材料之间的导带或价带对齐;利用高功函数的金属氧化物与晶硅接触从而在晶硅中感应能带弯曲.基于一维太阳电池模拟软件wx AMPS,模拟了扩散同质结硅太阳电池[结构为(p~+)c-Si/(n)c-Si/(n~+)c-Si]、非晶硅薄膜硅异质结太阳电池[结构为(p~+)a-Si/(i)a-Si/(n)c-Si/(i)a-Si/(n~+)a-Si]和氧化物薄膜硅异质结太阳电池[结构为(n)MoO_x/(n)c-Si/(n)TiO_x]暗态下的能带结构和载流子浓度的空间分布,其中c-Si为晶硅;a-Si为非晶硅;(i),(n)和(p)分别表示本征、n型掺杂和p型掺杂.模拟结果表明:载流子选择性接触的核心是在接触处晶硅表面附近形成载流子浓度空间分布的不对称进而使得电导率的不对称,形成了对电子的高阻和空穴的低阻或者对空穴的高阻和电子的低阻,从而让空穴轻松通过同时阻挡电子,或者让电子轻松通过同时阻挡空穴,形成空穴选择性接触或者电子选择性接触.     

超临界压力煤油传热不稳定实验研究

在压力2.5~4 MPa, 质量流量0.7~1.7g/s, 入口温度20~250 ℃的实验条件下, 对煤油在内径1 mm, 长度300 mm竖直上升圆管中的流动及传热不稳定现象进行了实验研究.结果表明, 当热流密度增大到一定程度后, 传热不稳定开始发生.不稳定发生的起始热流密度随压力和流量的增加而增大, 随入口油温的升高而减小, 且当入口油温升高到一定程度后无不稳定现象发生.不稳定发生的初始时刻, 出口油温迅速增加, 管道壁温明显下降, 传热系数增大; 实验段局部流速增大, 进而在管道内部形成压力脉动并产生声音.不稳定结束后, 出口油温几乎保持不变, 壁温会缓慢增加, 直至下一次不稳定发生.      

测量爆炸火焰真温的多光谱温度计的研制——现场实验与测量精度分析

研制了可用于大型爆炸现场的、 测量爆炸火焰真温的多光谱温度计(量程为800~3 500 ℃,波长范围为0.6~1.1 μm)。测量原理进一步改进,加入亮温逼近法解决了二次测量法初值选取困难的问题,并应用此高温计在空旷场地对3 kg TNT炸药爆炸的全过程进行测量。通过实验结果的分析可知,此高温计可以测量爆炸火焰真温变化全过程,对波阵面瞬时温度与燃烧火球温度的测量均具有很好的效果。同时,分析了影响此高温计测量精度的各个因素,得出目前制约多光谱高温计测量精度提高的主要因素仍然为真温算法及标定方法的误差,这为今后研制高精度高温计明确了方向。     

电感耦合等离子体-原子发射光谱法测定矿石中钨、钼的不确定度评定

对用ICP-AES测定矿石中钨、钼元素的不确定度进行评估,根据结果计算公式绘制不确定度来源因果分析图,分析主要不确定度来源,包括:样品称量、标准溶液的配制,仪器测量过程重复性等引入的不确定度,评估了钨含量和钼含量的标准不确定度和扩展不确定度.     

光学材料光学不均匀性绝对测量误差分析

绝对测量技术去除了干涉仪参考面面形误差,可实现光学材料光学不均匀性的高精度测量。对现有主要光学材料光学不均匀性绝对检测技术进行了总结比较,针对像素错位、干涉图分辨率、干涉仪测量重复性、样品厚度以及折射率测量等因素对光学不均匀性绝对检测的影响进行了实验分析。实验结果表明:干涉仪重复性是光学不均匀性测量的主要误差。样品翻转测量法、样品直接透射测量法、平行平板样品测量法3种测量方法均可实现光学不均匀性（RMS）10-8检测精度。     

Epoxy Resin-Photopolymer Composite with None-Shrinkage for Volume Holography

A novel photopolymer storage medium for holographic storage is presented. In particular, the refractive in-dex of the monomer methyl methacrylate is much lower than that of the binder epoxy resin solidified by m-xylylenediamine, and the material can be developed into samples with dimension stability and high optical quality and thickness of several millimetres or more. Some none-polymeric macromolecule impurity is uniformly mixed into the medium to aid the monomer diffusing and to enhance the diffraction efficiency. A holographic recording medium of 0.8 mm thickness has been fabricated, and relative theoretical analysis and experiments are presented.     

Langevin Simulation of Non-Uniform Granular Gases

We present and study a fractal model of a non-uniform granular system for the first time, based on which wenumerically solve the dynamics actions in the system successfully in one-dimensional case. The multi-mixture is composed of N different particles, whose granularity distribution has the fractal characteristic. The particles are subject to inelastic mutual collisions and obey to Langevin equation between collisions. Far from the equilibrium,i.e. the given typical relaxation time τ of the driving Brownian process is much larger than the mean collision time τc, the results of simulation indicate that the degree of inhomogeneity in the granularity distribution signed by the fractal dimension D of size distribution has great influence on the dynamics actions of the system. The velocity distribution deviates obviously from the Gaussian distribution and the particles cluster more pronouncedly with the larger value of D in the system. The velocity distribution and spatial clnsterization change with D are presented.     

Controllable synthesis,characterization,and growth mechanism of hollow Zn_x Cd_(1-x) S spheres generated by a one-step thermal evaporation method

Novel hollow ZnxCdl xS spheres that are uniform in size are synthesized through the one-step thermal evaporation of a mixture of Zn and CdS powder. From an X-ray diffraction （XRD） study, the hexagonal wurtzite phase of ZnxCdl_xS is verified, and the Zn mole fraction （x） is determined to be 0.09. According to the experimental results, we propose a mechanism for the growth of Zn0.09Cd0.91S hollow spheres. The results of the cathodoluminescence investigation indicate uniform Zn, Cd, and S distribution of alloyed Zn0.09Cd0.91S, instead of separate CdS, ZnS, or nanocrystals of a core- shell structure. To the best of our knowledge, the fabrication of ZnxCd1-xS hollow spheres of this kind by one-step thermal evaporation has never been reported. This work would present a new method of growing and applying hollow spheres on Si substrates, and the discovery of the Zn0.09Cd0.91S hollow spheres would make the investigation of ZnxCd1-xS micro/nanostructures more interesting and intriguing.