Stripping of photoresist on silicon wafer by CO(2) supercritical fluid

Supercritical CO₂-based fluid is not only being considered as environmentally benign medium for photoresist (PR) removal in electronic device manufacture, but also capable of challenging feature dimensions. Despite many attractive properties, clear supercritical CO₂ has little solvating power for PR. Here, two acetate modifiers were selective to add in the CO₂ and evaluated individual contribution to the overall stripping rate by factorial experiment design, which included four other factors with four level ranges for each one and concluded the best 90% extraction efficiency would be obtained under the optimized parameters: 2.5 min static time, 35 min dynamic time, 1.25 ml ethylacetate spiked, 125 °C oven temperature and 480 atm CO₂ pressure. As analyzing the variances of these contributors to this system, it disclosed that dynamics controlled the stripping mechanism before near 35 min purging but thermodynamics took over after then; and that increasing pressure was more competent for removing PR than increasing temperature. All supercritical extracts were from two commercial PR coated on two substrates and analyzed by UV absorption spectrometry. Removing PR coated on silicon oxide layer was easier than that on Al-Cu alloy one.     

Toward a better description of gallo-phosphate materials in solid-state NMR: 1D and 2D correlation studies

We show that weak 2J(71Ga-O-31P), typically approximately 12 Hz in GaPO4, can be used to efficiently establish heteronuclear 31P-71Ga correlation using a MAS HMQC experiment in gallo-phosphate materials. The experiment demonstrated for cristobalite GaPO4 is then applied to Ga(PO3)3, where it allows the differentiation of the signature of three different Ga sites overlapping in the 1D spectrum.     

柔性曲梁多体系统的研究现状和展望

本文对近几年来柔性多体系统建模理论的研究进展进行了评述, 详细阐述了曲梁结构多体系统动力学研究的理论背景和工程意义. 结合连续介质力学和多体系统动力学理论, 介绍了平面曲梁、空间曲梁应变位移场的描述以及几何非线性问题研究现状. 通过国内外文献及已有的研究, 综述了现有曲梁的离散化方法, 以及这些方法对于定曲率、变曲率曲梁的适用性. 然后, 总结了曲梁刚柔耦合动力学建模和数值计算中的难点问题, 介绍了平面曲梁、空间曲梁实验研究的现状. 最后, 综合全文, 提出了目前研究存在的难点问题, 以及计划解决这些难点问题的方法.      

A fractional order hyperchaotic system derived from Liu system and its circuit realization

In this paper we propose a novel four-dimensional fractional order hyperchaotic system derived from Liu system. Electronics workbench (EWB) and Matlab simulations show the dynamical behavior of the proposed four-dimensional fractional order hyperchaotic system. Finally, after separately using EWB and Matlab, an electronic circuit is designed to realize the novel four-dimensional fractional order hyperchaotic system and the experimental circuit results are obtained which are identical to software simulations.     

基于Maxwell-Rivlin-Ericksen理论的MRM本构关系的算法探究

从Maxwell电磁场理论出发,得到磁流变材料的电磁学本构方程,基于Rivlin-Ericksen理论,结合质量守恒定律及动量守恒定理,提出了普适的磁流变材料Cauchy应力σ的一种本构关系.与牛顿粘性流体及热力学第二定律相结合确定了算法中磁流变材料本构关系的基本参数.以平行板间磁流变材料运动为算例,计算结果验证了本模型切实有效.最后与美国Lord公司配置的典型磁流变材料MRM-132LD结果进行比较,结论吻合良好,希望该工作能有力推动磁流变材料的迅猛发展.     

爆破冲击对早龄期混凝土强度影响的实验研究

以某大型全碎石填方机场工程为背景,针对早龄期混凝土受爆破振动损伤开展了实验研究。通过室内实验模拟场地爆破振动作用于早龄期混凝土试块,测量了不同龄期混凝土受振损伤后的强度。并将实验结果与有限元数值计算和现场爆破场地测试数据相结合,分析了早龄期混凝土损伤后的强度增长规律,建立了场地爆破与混凝土结构浇筑平行施工的安全技术指标。     

混凝土类材料动态拉伸强度的微观力学模型

基于水泥砂浆试样动态劈裂拉伸实验,研究了不同加载速率下水泥砂浆材料动态劈裂时的裂纹发 生和扩展规律,提出一个微观力学模型。结果表明,微裂纹惯性是混凝土类材料动态拉伸实验中测量到的动 态拉伸强度随应变率的增加而提高的一种微观机制。     

钢筋混凝土箱梁非线性及剪滞效应的试验研究

制作了钢筋混凝土简支箱梁模型,试验包括模型梁开裂范围内的加载及开裂后的加载。在开裂范围内,对该试验梁分别进行了顶板满布均布荷载、均布荷载作用于肋板上方、集中力作用于跨中以及对称集中力作用下的加载;对开裂后的试验梁,进行了对称集中力作用下的加载。用应变采集仪与电脑连接,并用半桥测量,温度自补偿方法测取应变值,采用百分表测试梁体挠度,采用读数显微镜观测裂缝。测量得到应力、应变的分布规律,验证了钢筋混凝土箱梁中存在剪滞效应。试验结果与考虑混凝土非线性的有限段法的计算结果吻合较好,验证了有限段法在混凝土箱梁剪滞效应分析中的适用性。     

大学化学实验ATDE创造性思维教学模式探索与实践

在大学化学实验教学中应用ATDE创造性思维教学模式,通过问、想、做、评四步训练,不仅有利于培养学生自主学习能力和创造性思维能力,而且实现了知识与兴趣的结合,可取得理想的教学与育人效果。简要介绍了ATDE教学模式的含义,并与传统实验教学模式进行了比较,具体介绍在大化学实验教学中运用ATDE创新教学模式的实施策略。     

构建现代基础化学实验环保化导向实验课程的探讨

现代基础化学实验不可避免地会带来相应的“三废”排放问题,如何科学、环保地进行化学实验设计,最大限度地减少化学实验的污染物排放,对环境教育工作具有十分重要的意义.对现代基础化学实验设计的诸多方面进行了相应的探讨,提出了基础化学实验设计在环保方面的相关改进措施.