快速边界识别算法用于达曼光栅掩模数据生成的研究

针对达曼光栅的数据写入问题,提出了一种快速边界识别算法（FBIA）用于复杂二元光学图形掩模的CIF格式数据的生成。该算法首先识别出达曼光栅图形的边界点,然后按照左手原则对边界点进行排序并构成闭合曲线。针对闭合曲线中可能出现的“孤岛”,该算法可自动识别并依据其数量对图形重新分割取点。结果表明FBIA算法具有搜索快、效率高等优点,可广泛应用于各种二元位相型元件CIF格式掩模板数据的生成。     

无铬相移掩模光刻技术

本文论述了相移掩模(PSM)提高光刻分辨率的基本原理、主要类型、无铬PSM的制作方法,简述了曝光实验和实验结果.用NA=0.28的g线光刻机得到了0.5μm的实际分辨率.     

一种利用相位掩模版对光栅波长进行微调的光栅刻写方法

提出并实验证实了一种刻写光栅时既能保护相位版又能对光栅的反射波长进行微调的方法.通过调整光纤和相位版之间的距离,利用1 550 nm单模光纤和掺铒分别实现了0.48 nm和2.2 nm的光栅反射波长的调节.在相位版和光纤之间的距离保持在3 mm的条件下,既可以保护相位版又可以获得高质量的光栅.     

用多重菲涅耳衍射变换和相位密码板实现图像加密的技术

基于多重菲涅耳衍射变换和相位密码板,设计了一种新的图像加密计算方法.待加密的明文图像在多重离散菲涅耳衍射变换和相位密码板的共同作用下,变换为一个具有随机码特征的密文矩阵;衍射距离和相位密码板是主要的密钥.只有当所有密钥都正确时,才能成功地解密密文.结果表明,该加密算法能抵抗JPEG有损压缩、图像剪切、重度噪音污染和重采样等攻击,因此该法具有较强的鲁棒性;由于很难破解多重密钥,所以该算法具有极高的安全性.     

液晶空间光调制器在阿达玛变换光谱仪中的应用研究—编码模板缺陷的补偿措施

论述了液晶空间光调制器作为固定不动的编码模板在阿达玛变换光谱仪中的应用,对编码模板的缺陷进行了研究,提出了编码模板缺陷的补偿措施.模拟实验证明了我们给出的补偿措施是正确的.     

超分辨相变光盘的膜层计算与分析

利用多层膜反射率的矩阵法计算了GeSbTe超分辨相变光盘的光学参数与各膜层厚度之间的关系，最后得到了较为理想的膜层厚度匹配。     

A study on the innovative microlens projection lithography applied to the production of microstructures

Microlens projection lithography is a kind of non‐contact projection lithography that uses microlens array components as the projection lenses to produce a large area of microstructural array patterns on photoresisting film. This technology requires partial masking of light on the non‐lens portion of the microlens array, and the conventional approach is through an aligned exposure followed by the plating process that would require accurate positioning equipment, so it is naturally time‐consuming as well as costly in terms of the entire production process. This study applies an innovative technology in the production process that uses a microcircular‐hole array to penetrate a stainless‐steel substrate as the mold, and in collaboration with gas‐assisted thermal pressuring production process that utilizes surface tension of the plastic film to fabricate the hemisphere‐shaped plastic microlens array that is capable of masking light as the projection lens. With such a lens, in collaboration with optic expansion film, Fresnel lens, and millimeter‐grade single‐pattern photomasks, the microlens array projection lithographical optical system is constructed. Using regular millimeter‐grade photomasks, a micrometer‐grade array pattern is successfully fabricated on the photoresist layer through the process of projection exposure and development using such a microlens array projection lithographical optical system. Copyright © 2007 John Wiley & Sons, Ltd.     

A Novel Technique for Measuring Defocus with Phase Shift Gratings on a Photomask

A focus monitor reticle having a novel grating structure is proposed. If a grating pattern has a property of being able to generate asymmetry between positive and negative diffraction orders, a defocus of the grating pattern can be translated to an easily measured pattern shift perpendicular to the optical axis. A possible grating for this purpose is composed of three components: opaque line, naked line and #x03C0;/2-phase-shifted groove. In particular, with their width ratio equivalent to 2/1/1, one of the two first-order beams disappears entirely. Consequently, tilted standing waves are formed by two-beam interference between zeroth-order and the other first-order on the image plane. This paper describes a new technique for measuring a defocus with a phase shift grating object. Good agreement between experimental sensitivities and theoretical expectation verifies that the technique achieves high accuracy of several nanometers or better. Applications of the technique show indicative ability in field curvature and astigmatism of the state-of-the-art scanner.     

灰阶编码掩模制作微光学元件

提出一种基于改变灰阶编码掩模的单元形状和位置的掩模设计新方法,并根据成像过程中的非线性因素,用这种方法对掩模图形进行了预畸变校正,根据部分相干光成像理论和抗蚀剂曝光显影模型,模拟计算了这种灰阶编码掩模产生的空间光强分布和光刻胶上的浮雕结构,采用电子束曝光系统制作了这种掩模,并在光刻胶上获得具有连续面形的微透镜的阵列。     

Infrared super-resolution imaging based on compressed sensing

The theoretical basis of traditional infrared super-resolution imaging method is Nyquist sampling theorem. The reconstruction premise is that the relative positions of the infrared objects in the low-resolution image sequences should keep fixed and the image restoration means is the inverse operation of ill-posed issues without fixed rules. The super-resolution reconstruction ability of the infrared image, algorithm’s application area and stability of reconstruction algorithm are limited. To this end, we proposed super-resolution reconstruction method based on compressed sensing in this paper. In the method, we selected Toeplitz matrix as the measurement matrix and realized it by phase mask method. We researched complementary matching pursuit algorithm and selected it as the recovery algorithm. In order to adapt to the moving target and decrease imaging time, we take use of area infrared focal plane array to acquire multiple measurements at one time. Theoretically, the method breaks though Nyquist sampling theorem and can greatly improve the spatial resolution of the infrared image. The last image contrast and experiment data indicate that our method is effective in improving resolution of infrared images and is superior than some traditional super-resolution imaging method. The compressed sensing super-resolution method is expected to have a wide application prospect.