Synthesis of spherical microcapsules by photopolymerization in aerosols

 The preparation of polymer microcapsules of well defined size in the range of 10–50 μm with different shell thickness to core diameter ratios is described. An aerosol of monodisperse droplets of a homogeneous ternary liquid system which contained a hydrophobic component and a hydrophilic component dissolved in a high-volatile mutual solvent, was produced by dispersing with a vibrating-orifice aerosol generator. After the evaporation of the solvent in a nitrogen atmosphere the particles demix and form a two-phase droplet of core-shell type. These droplets were illuminated with UV light and polymerized to highly monodisperse microcapsules with a solid polymer shell and a liquid core. The properties of the resulting particles (size, size distribution, shell thickness, shape and surface characteristics) were investigated by scanning electron microscopy, Raman spectroscopy on single optically levitated particles, and confocal Raman micro spectroscopy. The microcapsules were highly monodisperse and have spherical shape. Received: 24 July 1996 Accepted: 29 August 1996     

一种新型酞菁类光蚀刻记录材料的光生酸性质研究

通过研究对甲苯磺酸酯空心酞菁的性质,发现该化合物在紫外光照射下可生酸,是一种光生酸剂.由于酞菁类化合物本身具有光催化氧化反应的性能,因此这类光生酸剂在光蚀刻技术中将有很好的应用潜能.     

Instrument for generation of volatile organic compounds for the development of chemical sensors and evaluation of tube-type diffusive sampling

An automatic calibration apparatus for the dynamic generation of organic vapours was developed. The accurately controlled stream of nitrogen was drawn at a low flow-rate through a thermostated container filled with the standard substance, thus generating a continuous stream of saturated vapour of the compound. The compound holder vessel was thermostated at −16°C. A large stream of pure carrier gas was mixed with a low stream of substance in a mixing chamber for dilution. The fittings were manufactured from PTFE, and tubes were made of special PTFE with an inert inner surface to eliminate the wall adsorption and to decrease the cross-diffusion. Moisture interferences were reduced using a Nafion membrane filter. The vapour generator was validated by diffusive sampling and gas chromatographic methods. Standard mixtures have been prepared containing toluene at concentrations ranging from 3 to 3000 ppm. The combined uncertainty of preparative and analytical error components associated with the concentration of the analytes at the 95% confidence level typically ranges from 2 to 5% relative, depending upon the concentration. The measured and the calculated values were compared and good correlation (r²>0.99) was found.     

Stabilization of a standard gas mixture generator with diffusion tubes

Summary The generator contains diffusion tubes of known length and internal diameter. Once produced, the mixture of the carrier gas and acetone, the reference material, is sent through a chromatographic flame ionisation detector. Its signal reaches a constant level after a time corresponding to the stabilization time of the generator. The technique described is simple and gives repeatable results.     

Retrospective of work at Bell Laboratories on the effect of fluorine substitution on the properties of photoacid generators

An overview is given on the work done at Bell Laboratories in which fluorine substitution was employed to tune the structure property relationships of chemically amplified resists. In particular, this paper will detail how structural changes in 2-nitrobenzyl photoacid generator (PAG) affect molecular properties such as quantum yield, thermal stability, and in turn also influence the lithographic characteristics of photoresist formulations such as sensitivity and post-exposure bake (PEB) and post-exposure delay (PED) latitude.     

Pattern formation of polyimide by using photosensitive polybenzoxazole as a top layer

A versatile method for positive-type patterning of polyimide (PI) based on a two-layer photosensitive poly(benzoxazole) (PSPBO) and poly(amic acid) (PAA) film has been developed to provide a promising material in the field of microelectronics. This patterning system consisted of a pristine PAA thick bottom-layer and a poly(o-hydroxy amide) (PHA) thin top layer with 9,9-bis[4-(tert-butoxycarbonyl-methyloxy)phenyl]fluorene (TBMPF) as a dissolution inhibitor, and (5-propylsulfonyloxyimino-5H-thiophene-2-ylidene)-(2-methylphenyl)-acetonitrile (PTMA) as a photoacid generator (PAG). The PHA and PAA were prepared from 4,4′-(hexafluoroisopropylidene)-bis(o-aminophenol) and 4,4′-oxybis(benzoic acid) derivatives, and 3,3′,4,4′-biphenyltetracarboxylic dianhydride and 4,4′-oxydianiline, respectively, in N,N-dimethylacetamide. This two-layer system based on PHA (150-nm thickness) and PAA (1.5-μm thickness) showed high sensitivity of 35 mJ/cm² and high contrast of 10.3 when exposed to a 365 nm line (i-line), post-baked at 100 °C for 2 min, and developed in a 2.38 wt.% tetramethylammonium hydroxide aqueous solution/5 wt.% iso-propanol at 25 °C. A clear positive image of a 4-μm line-and-space pattern was printed on a film which was exposed to 100 mJ/cm² of i-line by a contact-printing mode and fully converted to the corresponding PBO/PI pattern upon heating at 350 °C, confirmed by FT-IR spectroscopy. This two-layer system could be applied to the patterning of various PAAs.     

分流法湿度发生器PLC控制系统的研制

采用可编程逻辑控制器(PLC)研制分流法湿度发生器的控制系统,提高了分流法湿度发生器在低湿度范围发生湿气的准确度。利用精密露点仪获得准确的露点值,并反馈控制分流法湿度发生器的各项控制参数,通过二次调节,湿度发生器可以输出湿度值更加准确的气体,发生湿气的露点最大允许误差为±0.5℃,重复性为0.15%(n=6),露点输出范围为–70~–10℃。该控制系统拓宽了分流法湿度发生器的应用范围,提高了湿度计量的工作效率。     

Fictitious domain methods for two‐phase flow energy balance computations in nuclear components

This paper is dedicated to the numerical simulation of nuclear components (cores and steam generators) by fictitious domain methods. The fictitious domain approach consists in immersing the physical domain under study in a Cartesian domain, called the fictitious domain, and in performing the numerical resolution on this fictitious domain. The calculation times are then efficiently reduced by the use of fast solvers. In counterpart, one has to handle with an immersed boundary, generally non‐aligned with the Cartesian mesh, which can be non‐trivial. The two fictitious domain methods compared here on industrial simulations and developed by Ramière et al. deal with an approximate immersed interface directly derived from the uniform Cartesian mesh. All the usual immersed boundary conditions (Dirichlet, Robin, Neumann), possibly mixed, are handled through a unique formulation of the fictitious problem. This kind of approximation leads to first‐order methods in space that exhibit a good ratio of the precision of the approximate solution over the CPU time, which is very important for industrial simulations. After a brief recall of the fictitious domain method with spread interface (Ramière et al., CMAME 2007) and the fictitious domain method with immersed jumps (Ramière et al., JCP 2008), we will focus on the numerical results provided by these methods applied to the energy balance equation in a steam generator. The advantages and drawbacks of each method will be pointed out. Generally speaking, the two methods confirm their very good efficiency in terms of precision, convergence, and calculation time in an industrial context. Copyright © 2011 John Wiley & Sons, Ltd.     

三嗪类化合物的合成及其产酸性能研究

合成了一系列的三嗪类光生酸剂1a—1e,确定了它们的结构,并对1e在乙腈溶剂中365和405nm光下的曝光分解产酸性能进行了初步的定量研究.结果表明,在测定浓度范围内分解量子产率和产酸量子产率基本上都不随浓度的变化而变化,在405nm光下比在365nm光下有更高的分解和产酸量子效率.有关这类化合物的光生酸性能与曝光波长的关系正在进一步研究中.