Characteristics and properties of metal aluminum thin film prepared by electron cyclotron resonance plasma-assisted atomic layer deposition technology

Metal aluminum (Al) thin films are prepared by 2450-MHz electron cyclotron resonance plasma-assisted atomic layer deposition on glass and p-Si substrates using trimethylaluminum as the precursor and hydrogen as the reductive gas. We focus our attention on the plasma source for thin-film preparation and annealing of as-deposited films related to the surface square resistivity. The square resistivity of as-deposited Al film is greatly reduced after annealing and almost reaches the value of bulk metal. Through chemical and structure analysis we conclude that the square resistivity is determined by neither contaminant concentration nor surface morphology, but by both crystallinity and crystal size in this process.     

Graphene films grown on sapphire substrates via solid source molecular beam epitaxy

A method for growing graphene on a sapphire substrate by depositing an SiC buffer layer and then annealing at high temperature in solid source molecular beam epitaxy (SSMBE) equipment was presented. The structural and electronic properties of the samples were characterized by reflection high energy diffraction (RHEED), X-ray diffraction Φ scans, Raman spectroscopy, and near edge X-ray absorption fine structure (NEXAFS) spectroscopy. The results of the RHEED and Φ scan, as well as the Raman spectra, showed that an epitaxial hexagonal α-SiC layer was grown on the sapphire substrate. The results of the Raman and NEXAFS spectra revealed that the graphene films with the AB Bernal stacking structure were formed on the sapphire substrate after annealing. The layer number of the graphene was between four and five, and the thickness of the unreacted SiC layer was about 1--1.5 nm.     

考虑中性层位置变化的微悬臂梁气体传感器静态模型的分析

微悬臂梁是一种高灵敏度的生化传感器。本文考虑吸附表面应力引起的中性层位置的变化,采用能量法建立了微悬臂梁在单层分子吸附稳定后的静态弯曲模型,并以表面吸附有水蒸汽分子的微悬臂梁为例,研究了微悬臂梁曲率半径随其厚度、杨氏模量及吸附分子间距的变化规律以及中性层位置变化对微悬臂梁传感器性能预测的影响,结果发现：1)微悬臂梁的曲率半径与其杨氏模量、厚度及吸附分子间距之间可以近似用一次、二次和八次函数关系表示;2）中性层变化导致的曲率半径计算误差,随着微悬臂梁厚度、杨氏模量的增加而减小,但影响较小,而吸附分子间距会对该相对误差产生明显影响;3）中性层位置变化会对微悬臂梁传感器灵敏度和表面应变预测产生明显的影响。     

A COORDINATE TRANSFORMATION METHOD FOR NUMERICAL SOLUTIONS OF TRAVELING-WAVE ELECTROOMTIC FLOWS IN MICROCHANNEL

采用坐标变换法数值求解了耦合的Poisson-Nernst-Planck（PNP）方程和Navier—Stokes（NS）方程,研究二维狭窄微通道行波电场电渗流数值解．数值结果表明,坐标变换法能有效降低电渗流解数值解在双电层的高梯度,有效改善数值解的收敛性和稳定性．坐标变换的电渗流数值解和原始坐标下的数值解完全一致．坐标变换后采用简单的网格也能得到和原始坐标下复杂网格相同的解．给出了滑移边界的近似解与完整的PNP—NS数值解的比较．在双电层厚度与微通道深度比值（λ／H）很小的情况下（相对深通道）,两者的解基本一致．但在λ／H较大时（相对浅通道）滑移边界的解高于电渗流速度．     

A three-layer structure model for the effect of a soft middle layer on Love waves propagating in layered piezoelectric systems

A three-layer structure model is proposed for investigating the effect of a soft elastic middle layer on the propagation behavior of Love waves in piezoelectric layered systems, with "soft" implying that the bulk-shear-wave velocity of the middle layer is smaller than that of the upper sensitive layer. Dispersion equations are obtained for unelectroded and traction-free upper surfaces which, in the limit, can be reduced to those for classical Love waves. Systematic parametric studies are subsequently carried out to quantify the effects of the soft middle layer upon Love wave propagation, including its thickness, mass density, dielectric constant and elastic coefficient. It is demonstrated that whilst the thickness and elastic coefficient of the middle layer affect significantly Love wave propagation, its mass density and dielectric constant have negligible influence. On condition that both the thickness and elastic coefficient of the middle layer are vanishingly small so that it degenerates into an imperfectly bonded interface, the three-layer model is also employed to investigate the influence of imperfect interfaces on Love waves propagating in piezoelectric layer/elastic substrate systems. Upon comparing with the predictions obtained by employing the traditional shear-lag model, the present three-layer structure model is found to be more accurate as it avoids the unrealistic displacement discontinuity across imperfectly bonded interfaces assumed by the shearlag model, especially for long waves when the piezoelectric layer is relatively thin.     

SHEAR-HORIZONTAL WAVES IN A ROTATED Y-CUT QUARTZ PLATE WITH AN ISOTROPIC ELASTIC LAYER OF FINITE THICKNESS

We study shear-horizontal (SH) waves in a rotated Y-cut quartz plate carrying an isotropic elastic layer of finite thickness.The three-dimensional theories of anisotropic elasticity and isotropic elast...     

基于超导的全张量重力梯度敏感头设计

基于超导的迈斯纳效应与超导量子干涉技术,结合柔性并联机构理论,设计一种基于超导的全张量重力梯度敏感头。敏感头采用6个完全相同的同时具有移动与转动自由度的敏感结构,对称的布置在正六面体外,对称面的两个敏感结构相对旋转90°成垂直状态。轴向间距使两个敏感结构直接测量重力梯度轴向分量,相互垂直使两个敏感结构既可以测量重力梯度交叉分量,也可以测量共模角加速度。利用超导线圈的电感变化响应质量块位移,进一步通过超导回路将其转变为磁场变化,并由超导量子干涉器进行检测。敏感结构采用8分支的柔性并联机构支承,构成空间对称的形式,可以实现对称的力学特性,保证各处的柔性铰链产生均匀变形,减少非对称的偏移,避免单一铰链的应力集中,具有沿轴移动刚度与绕轴转动刚度小、非设计的寄生误差方向刚度大的优势。在惯性系下的全张量重力梯度值可由坐标变换得到,可以预期得到1E的测量精度。     

ITER第一壁实验件的铍-铜连接界面分析

在ITER第一壁实验件的研究中,采用热等静压扩散连接技术对Be与CuCrZr合金进行连接实验,对完成扩散连接的部分连接件采用退火处理。对所有连接件进行超声波无损探伤后,检测到未退火的连接件Be/Cu连接界面存在缺陷。为分析扩散界面缺陷产生原因,从连接件的无缺陷区取样并进行界面微观分析。通过观察微观形貌和分析界面扩散层合金元素的变化,发现退火处理过的Be-Cu扩散界面的Cu-Ti扩散层和未扩散的Ti层厚度增加,中间层中Be与Cu元素形成脆性相的几率降低,整个扩散层厚度变大,扩散范围加大。实验表明退火工艺能改变Be/Cu热等静压扩散层连接结构组成,扩大扩散连接范围。     

An explicit analytical expression for bed-load layer thickness based on maximum entropy principle

The present study aims to derive an analytical model on bed-load layer thickness in an open channel turbulent flow carrying sediments. Determination of the thickness of the bed-load layer is of utmost importance in the study of bed-load transport as it is required to determine the bed-load transport rate, as well as in the study of suspended load transport as it acts as reference level for the particles in suspension. Apart from the several deterministic approaches available in the literature, the work adopts probabilistic approach based on entropy theory to determine the bed-load layer thickness. The concept of entropy theory developed by Shannon is used and the method of Lagrange multipliers is employed for the maximization of entropy function to find the least biased probability distribution. To calculate the Lagrange multipliers, present in the probabilistic model of dimensionless bed-load layer thickness, two different methodologies are presented. The model of bed-load layer thickness is a function of dimensionless shear stress and also depends on three other parameters which are found to be functions of specific gravity of sediment particle and dimensionless particle diameter from a non-linear regression analysis. The proposed model is validated with wide sets of experimental data available in literature and a good agreement is achieved. Apart from comparison with data, the model is also compared with existing deterministic model and computation of relative percentage error proves the better efficiency of the present model.     

液体薄层中的超声空化*

液体薄层中的超声空化,因其边界及所处空间的特殊性,而呈现出非常独特的空化结构和演化行为,在超声清洗、超声钎焊、表面处理、近场声悬浮、超声化学等领域都有所应用。该文梳理了近几年该课题组在液体薄层中的超声空化研究中的一些成果,力图揭示液体薄层内空泡、空化云、空化场的运动和分布规律,及其产生、发展和演化过程,以期对液体薄层中的超声空化行为有一个相对清晰和完整的认识。