Surface roughness investigation of semi-conductor wafers

Conventionally, surface roughness is predominantly determined through the use of stylus instruments. However, there are certain limitations involved in the method, particularly when a test specimen, such as a silicon wafer, has a smooth mirror-like surface. Hence, it is necessary to explore alternative non-contact techniques. Light scattering has recently been gaining popularity as an optical technique to provide prompt and precise inspection of surface roughness. In this paper, the total integrated scattering (TIS) model is modified to retrieve parameters on surface micro-topography through light scattering. The applicability of the proposed modified TIS model is studied and compared with an atomic force microscope. Experimental results obtained show that the proposed technique is highly accurate for measuring surface roughness in the nanometer range.     

The K–nucleus cross sections in relativistic non-linear models

The K⁺−nucleus cross sections have been calculated in relativistic non-linear models taking into account the in-medium modifications of nucleons and mesons properties. More precisely, we have taken into account both the dressing of the nucleon effective mass by the scalar nuclear field in the target and the coupling of the mesons exchanged between the K⁺ and the nucleons to the polarization of the medium. First, using the most recent relativistic non-linear models, the in-medium σ, ω and ρ meson masses have been obtained in the nuclear matter rest frame. The influence of the non-linear contributions on the K⁺−nucleus cross sections has then been studied. Finally, we have compared our results with the experimental data.     

Radiation Transfer in a Binary, Stochastic Medium with Strongly Fluctuating Parameters

The propagation of radiation in a three-dimensional, inhomogeneous, stochastic, scattering medium and in an equivalent homogeneous medium has been investigated by the small-angle iteration method. The statistical structure of the scattering parameters of a three-dimensional medium has been described within the framework of the two-dimensional Poisson process and the binary Markov process. The analytical data obtained point to the fact that the three-dimensional inhomogeneity of a stochastic medium significantly influences the radiation transfer in it.     

The solution of the neutron transport equation in a slab with anisotropic scattering

The neutron transport equation for a slab geometry with the extremely anisotropic scattering kernel is considered. The albedo and transmission factors are calculated using the variation method. The effect of the extremely anisotropic parameter on the variation of the slab albedo and transmission factor is calculated. The obtained results are compared with the published data.     

On locating low altitude moving targets using a planar acoustic sensor array

It is of engineering importance to locate low altitude moving targets with acoustic methods due to the blindness of the traditional radar detecting. In this paper, an algorithm for locating low altitude moving targets is put forward based on a five-element planar acoustic sensor array. The method is realized through estimations of the sensor-to-sensor time delays of the source signal generated by the low altitude moving target. The angle and range estimation performance of the proposed method are analyzed, respectively, both in theoretical and numerical sense.     

13N的一个可能的类晕的质子2p态

假设¹³N是单粒子的2p态的结构,用Glauber多重散射理论计算了1GeV的质子在¹³N上弹性散射的微分截面,研究了¹³N的类晕结构.与¹³C的情况不同,虽然目前还没有关于p-¹³N弹性散射微分截面的实验材料与我们的理论结果相比较,但是这个理论结果可以作为对未来的实验测量工作的一个指导,特别是对兰州近代物理研究所的晕核实验研究工作有参考和指导价值.参照先前我们对¹³C晕核结构的理论预言和进而的实验证实,本文的计算结果清楚地表明:¹³N可能存在着一个类晕的质子皮结构.因此,实验上测量p-¹³N弹性散射的微分截面就是当前需要马上进行的一个实验研究工作.     

Triple differential cross sections for ionization of hydrogen atoms by positrons in a Schwinger variational calculation

Schwinger variational principle has been used to calculate triple differential cross-sections for ionization of hydrogen atoms by positrons at intermediate and high energies for Ehrhardt type asymmetric geometry. The results agree in general with the calculations of Brauneret al [8] and with the second Born calculation.     

Collective bounce-off phenomenon in139La+Ag(Br) reaction at 1.1 A GeV energy

Out of a total statistics of 896¹³⁹La+Ag(Br) interactions, 128 interactions having multiplicity of target fragments (Z⩾1)⩾8 and projectile fragments (Z⩾2)⩾4 have been selected. They correspond to quasi-peripheral interactions. Azimuthal angle correlation between sources of target fragments (TFs) and projectile fragments (PFs) shows the existence of bounce-off effect. Using data of La+Ag(Br) and⁸⁴Kr+Ag(Br) reactions it is shown that individual helium [Z=2, PFs] and heavier fragment [Z⩾3, PFs] show different emission characteristics. Further, a two prong correlation functionT(Φ _ij ) plotted for heavier fragments and helium fragments separately, indicates the possibility of existence of different physical conditions. This observation is supported by the different momentum widths of helium fragments and heavier fragments. From the momentum width data of Kr+Ag(Br) reactions normalized density comes out to be ≈4.7. Using quasi-elastic kinematics for the bounce-off nuclei, the excitation energy has been computed from the experimental data of flow angles. The strength of bounce-off seems to decrease with the increase of excitation energy or temperature.     

Behavior of zirconium in the ZrOW(100) system at high temperature, studied by ISS, AES and work-function measurements

The behavior of zirconium atoms at the W(100) surface associated with oxygen adsorption at different sample temperatures has been studied by Auger electron spectroscopy (AES), ion scattering spectroscopy (ISS), and the relative change of the work function (Δф) measured by the onset of the secondary electron energy distribution. The results have revealed: (i) adsorption of zirconium onto the W(100) surface followed by the elevation of the sample temperature up to 1710 K in an oxygen partial pressure of 2.7 × 10⁻⁴ induces complete diffusion of zirconium atoms into the W(100) substrate; (ii) further exposure of oxygen induces co-existence of oxygen and tungsten on the surface at 1710 K, resulting in a work function of 4.37 eV; (iii) keeping the sample temperature at 1710 K, simple evacuation of the system has resulted in surface segregation of zirconium atoms to the surface to form a zirconium atomic layer on the top-most surface, reducing the work function to 2.7 eV. The results have revealed that this specific behavior of zirconium atoms at high temperature assures, with very good reproducibility, the highly stable performance and long service life of Zr---O/W(100)-emitters in practical use, even in a low vacuum of 10⁻⁶ Pa.     

Statistical approach to light scattering from deformed textured heterogeneous polymer materials

A statistical theory of light scattering from deformed isotropic and textured heterogeneous polymer materials is formulated. Two types of textured structures are analyzed: assemblies of optically isotropic and anisotropic rods and a spatially anisotropic distribution of isotropic spherical inclusion centers. The small-angle H_v light-scattering patterns are calculated. The appearance of scattering from isotropic rods and spheres in deformed materials has been demonstrated. The changes of the H_v scattering patterns as a function of elongation and strucuture parameters are discussed. © 1993 John Wiley & Sons, Inc.