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H. Sauermann Ch. Stenzel S. Keesmann B. Bonduelle 《Crystal Research and Technology》2001,36(12):1329-1343
A high‐stability temperature control system for a 1500 °C multizone furnace has been developed and experimentally verified. It relies on the utilisation of optical fibre thermometers as precise temperature sensors. The strong thermal coupling between the zones requires an exact quantitative determination of the thermal exchange process. A holistic approach integrating theoretical and practical considerations has lead to a short‐term stability of less than 0.02 K at a temperature level of 1500 °C which is about one order of magnitude better than a temperature control based on thermocouples. 相似文献