Temperature effect on deposition rate of silicon nitride films

Temperature effects on deposition rate of silicon nitride films were characterized by building a neural network prediction model. The silicon nitride films were deposited by using a plasma enhanced chemical vapor deposition system and process parameter effects were systematically characterized by 2⁶⁻¹ fractional factorial experiment. The process parameters involved include a radio frequency power, pressure, temperature, SiH₄, N₂, and NH₃ flow rates. The prediction performance of generalized regression neural network was drastically improved by optimizing multi-valued training factors using a genetic algorithm. Several 3D plots were generated to investigate parameter effects at various temperatures. Predicted variations were experimentally validated. The temperature effect on the deposition rate was a complex function of parameters but N₂ flow rate. Larger decreases in the deposition rate with the temperature were only noticed at lower SiH₄ (or higher NH₃) flow rates. Typical effects of SiH₄ or NH₃ flow rate were only observed at higher or lower temperatures. A comparison with the refractive index model facilitated a selective choice of either SiH₄ or NH₃ for process optimization.     

多元线性回归法在互联网网间结算中的应用

本文建立一个理论模型研究互联网互联结算的问题。文章利用多元线性回归法对互联网骨干网运营商(IBPs:Internet Backbone Providers)的网络价值进行评估,利用IBPs各自的网络价值对其交换速率进行加权,从而得出网络价值加权速率,依据这个速率进行结算既可以反映了每个网络对互联的贡献程度,又反映了在互联中对网络资源的被占用程度。     

确定线性偏微分方程组可积系统的对合特征集方法

基于Ritt-Wu特征集方法和Riquier-Janet理论,给出一种将线性微分方程组化成简单标准形式的有效算法．该算法通过消去冗余和添加可积条件获得线性微分方程组的完全可积系统(有形式幂级数解)或不相容判定．该算法不仅适用于常系数的线性偏微分方程组,而且对于变系数(以函数为系数)仍然有效．作者还给出了完全可积系统判定定理及其严格证明．     

Viscosity solutions of fully nonlinear parabolic systems

In this paper, we discuss the viscosity solutions of the weakly coupled systems of fully nonlinear second-order degenerate parabolic equations and their Cauchy-Dirichlet problem. We prove the existence, uniqueness and continuity of viscosity solution by combining Perron's method with the technique of coupled solutions. The results here generalize those in Proc. London Math. Soc. 63 (1991) 212-240 and Comm. Partial Differential Equations 16 (1991) 1095-1128.     

遥感器CCD驱动器热设计及其在摄像过程中的温度变化

CCD驱动器是航天成像遥感器摄像过程中的主要热源之一。防止CCD驱动器过热是保证其正常工作的重要方面。介绍了遥感器的工作模式和对CCD驱动器采取的热控制措施。通过热平衡试验,利用回归的方法,对CCD驱动器在摄像过程中的温度变化规律进行了分析,同时对热控制效果进行了评估。CCD驱动器工作时升温速率在0.85℃/min左右,整个摄像过程中最高温度约为26℃,所实施的热控制措施效果理想。     

非平稳NA序列部分和的精确渐近性

本文探讨了非平稳NA序列部分和的精确渐近性．以前的文献在讨论NA序列此类极限性质时都附加有强平稳条件的限制,这必然会给一些问题的研究带来不便．周知,非平稳NA序列在许多实际问题中是大量存在的,所以解除强平稳条件的束缚具有较大的理论和实际意义,这正是本文的目的之所在,同时本文也将已有的一些结果包含成为特殊情形．     

Local polynomial fitting under association

We consider the estimation of multivariate regression functions r(x₁,…,x_d) and their partial derivatives up to a total order p1 using high-order local polynomial fitting. The processes {Y_i,X_i} are assumed to be (jointly) associated. Joint asymptotic normality is established for the estimates of the regression function r and all its partial derivatives up to the total order p. Expressions for the bias and variance/covariance matrix (of the asymptotic distribution) are given.     

服装主观热感觉的统计分析

本文用多因子方差分析模型和多重比较分析了服装穿着时的主观热感觉与服装品种、环境条件、穿着者的活动状态与籍贯之间的关系。通过主成分回归建立了用生理指标预测主观热感觉的模型，从而得出一种定量地评价服装属性的方法。     

BAHADUR ASYMPTOTIC EFFICIENCY IN A SEMIPARAMETRIC REGRESSION MODEL

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