纳米厚度薄膜外差椭偏测量技术的研究

结合激光外差干涉法和透射式椭偏测量原理,研究了一种快速、高精度测量纳米厚度薄膜光学参数的方法。计算并分析了复灵敏度因子随薄膜参数和入射角度的变化规律、椭偏参数的选择及容许测量误差。两个声光调制器产生20kHz的拍频,采用简单的直接比相方法即可获得优于0.1°的相位分辨率,而且测量系统中没有使用任何波片和运动部件,抗干扰能力强且测量过程完全自动化,适用于工业现场在线连续测量。实验数据和理论分析表明,此方法可以达到亚纳米级测量精度。     

Determination of optical constants of sol‐gel derived Zn0.9Mg0.1O films by spectroscopic ellipsometry with various models

The Zn_0.9Mg_0.1O thin films were prepared on Si (100) substrates by the sol‐gel method. The structural and the optical properties of Zn_0.9Mg_0.1O thin films, submitted to an annealing treatment in the 400–700 °C ranges, are studied by X‐ray diffraction (XRD) and ultraviolet (UV)‐visible spectroscopic ellipsometry (SE). The thickness, refractive index, and extinction coefficient of these films have been determined by analyzing the SE spectra using parameterized dispersion model. Moreover, we made a detailed comparison among various dispersion models and found that the Sellmeier model was superior to others in fitting the ellipsometric spectra in the transparent region. In the interband transition region, point‐by‐point fit was used. The spectral dependence of the refractive index and extinction coefficient was obtained in the photon energy range of 1.5–4.71 eV. The influence of annealing temperature on the refractive index, the extinction coefficient, and the optical bandgap energy was also discussed. We found that the refractive index and the extinction coefficient increase with increasing the annealing temperature, meaning the optical quality of Zn_0.9Mg_0.1O films is improved by annealing. Copyright © 2009 John Wiley & Sons, Ltd.     

Optical and Electrochemical Combination Sensor with Poly‐Aniline Film Modified Gold Surface and Its Application for Dissolved Oxygen Detection

Poly‐aniline (PAn) film can be oxidized by contacting oxygen in an electron‐transfer reaction and its redox state, for instance the open circuit potential and the dielectric constant, is quantitatively related to oxygen concentration. This feature may contribute to an improved application of dissolved oxygen (DO) detection with the combined optical and electrochemical sensor. In this paper, PAn is used as a sensing surface to detect DO by the combination sensor composed of electrochemistry and total internal reflection imaging ellipsometry (EC‐TIRIE). Results demonstrate that both optical and electrical signals show a logarithmic correlation with DO concentration (0–20 ppm). Compared with the results obtained only with the gold surface, both the optical and electrical signals of the EC‐TIRIE sensor for DO detection are amplified with the PAn modified gold surface.     

膜层厚度对金属薄膜光学常数的影响

从麦克斯韦方程出发,可以得到超薄金属膜层光学常数n、k与其厚度有关系的理论依据。采用电阻热蒸发和电子束热蒸发的方法在K9玻璃基底上分别沉积了不同厚度的Cu膜、Cr膜、Ag膜,由椭偏法检测、Drude模型拟合,获得了不同厚度Cu膜、Cr膜、Ag膜光学常数n、k随波长λ的变化规律。超薄金属薄膜与块状金属的光学常数相差较大,随着薄膜厚度的增加,n、k值趋近于块状金属。通过对样品膜层吸收、色散特性的分析,发现连续金属薄膜在可见光波段对长波的吸收较大,而且相比于介质薄膜平均色散率高10mn～102nm量级。     

薄膜光学常数的粒子群算法

为解决椭偏法测量薄膜厚度和折射率实验数据处理较为复杂的问题,采用一种新的基于群体智能的优化算法——粒子群算法处理实验数据.以单层吸收薄膜的测量为例,利用该算法进行数据处理.实验结果表明,可以同时获得3个薄膜参数(折射率n,消光系数k和薄膜厚度d),而且在确切参数范围未知情况下,大范围内进行搜索仍然能保证快速收敛到最优解.该算法与遗传算法以及利用椭偏仪数据处理软件得出的结果相比较,计算精度高,收敛速度快.     

溅射功率对金属锰膜光学性质的影响

采用磁控溅射方法在Si（111）基片上制备金属锰膜,用椭圆偏振光谱在入射光子能量为2.0–4.0 eV范围内研究了溅射功率对薄膜光学性质的影响. 利用德鲁得-洛伦兹色散模型对椭偏数据进行拟合,结果表明在测量范围内随溅射功率增加薄膜的折射率减小;消光系数随入射光子能量增加先增加后减小,在3.0 eV附近处出现极大值,并且极大值所处的位置随溅射功率增加而向低能方向移动,这主要与溅射沉积的锰薄膜的质量有关,且随溅射功率的增加薄膜的消光系数逐渐趋近于金属锰的数值. 研究结果还表明溅射功率的增加减少了薄膜中的空隙,有利于薄膜的生长. 关键词： 磁控溅射 金属锰膜 椭圆偏振光谱 德鲁得-洛伦兹色散模型     

Optical study of Ba(Mn_xTi_(1-x)O_3) thin films by spectroscopic ellipsometry

Stoichiometric Ba(Mn_xTi_(1-x)O_3) (BMT)thin films with various values of x were deposited on Si(111)substrates by the sol-gel technique.The influence of Mn content on the optical properties was studied by spectroscopic ellipsometry(SE)in the UV–Vis–NIR region.By fitting the measured ellipsometric parameter(Ψand)with a four-phase model(air/BMT+voids/BMT/Si(111)),the key optical constants of the thin films have been obtained.It was found that the refractive index n and the extinction coefficient k increase with increasing Mn content due to the increase in the packing density.Furthermore,a strong dependence of the optical band gap Egon Mn/Ti ratios in the deposited films was observed,and it was inferred that the energy level of conduction bands decreases with increasing Mn content.     

薄膜光学常数的椭偏测量

利用光谱型椭偏仪测量了镀在熔石英玻璃基片上的氟化镁薄膜在300～850nm波长范围内的椭偏参数.并利用Levenberg-Marquardt算法.反演出了氟化镁薄膜在该波长范围内的色散曲线.通过与纯氟化镁体材料的色散曲线比较,发现所镀的氟化镁薄膜的折射率略小于体材料的折射率.     

光学薄膜参数椭偏测量中的多变量误差分析

本文采用多变量的误差分析方法给出光学薄膜参数对于椭偏角ψ,反射率R,入射角和吸收薄膜厚度的误差因子公式。由此便可确定出光学参数的测量精度。本文还利用误差因子与薄膜折射率,薄膜厚度和入射角的关系曲线,讨论了最佳测量条件和测量结构的选取。并且指出,在同时确定两个或多个未知参数时,不能只由可测量量随某一个参数变化的灵敏来讨论和确定此参数的测量精度。     

亚铁氰化钾体系的掠射椭圆偏振技术谱学分析研究

应用掠射式椭圆偏振谱学方法和循环伏安法现场分析不同浓度Ｋ４「Ｆｅ（ＣＮ）６」不同浓度电解液在镀Ｉｎ２Ｏ３玻璃电极上进行的电化学反应，结果表明：当Ｋ５「Ｆｅ（ＣＮ）６」的浓度在１×１０＾－４－１×１０＾－３范围蛤，掠射式椭圆偏振参量Δ的峰值增量与其浓度成正比，而ψ的峰值增量与其浓度近似为指数关系。