Temperature-dependent dry etching characteristics of III–V semiconductors in HBr- and HI-based discharges

Microwave discharges of HBr/H₂/Ar and H/H₂/Ar with additional do biasing of the sample were used to etch InP, GaAs, and AlGaAs at temperatures between 50–250°C. The etch rates increase by factors of 3–50 and 5–9, respectively, for HBr-and HI-based discharges over this temperature range, but display non-Arrhenius behavior. The etched surfaces became very rough above 100°C for InP with either discharge chemistry due to preferential loss of P, while GaAs and AlGaAs are more tolerant of the elevated temperature etching. The near-surface electrical properties of InP are severely degraded by etch temperatures above 100°C, while extensive hydrogen in-diffusion occurs in GaAs and AlGaAs under these conditions, leading to dopant passivation which can be reversed by annealing at 400°C.     

Preparation and characterization of functional group gradient surfaces

Functional group gradient surfaces where the density of functional groups changes gradually along the sample length were prepared. The functional group (? COOH, ? CONH₂, and ? OH group) gradient surfaces were produced by the treatment of low-density PE sheets using a corona with gradually increasing power, followed by the graft copolymerization of acrylic acid and subsequent substitution reaction of carboxylic acid groups to amide or hydroxyl groups. The prepared gradient surfaces were characterized by the measurement of water contact angle, FTIR-ATR, and ESCA. The gradient surfaces prepared can be used to systematically investigate the interactions of biological or other species in terms of the surface functional groups and their density of polymeric materials. © 1994 John Wiley & Sons, Inc.     

A comparative study of the silent discharge treatment of saturated and unsaturated hydrocarbon polymers

Dielectric barrier air discharge treatment of polyethylene, polypropylene, polyisobutylene, polystyrene, and polyisoprene substrates has been characterized by x-ray photoelectron spectroscopy (XPS). The relative reactivities of these polymers towards silent discharge oxidation are rationalized in terms of ozone molecules interacting with an excited surface. © 1994 John Wiley & Sons, Inc.     

Surface chemical composition and fibrinogen adsorption-retention of fluoropolymer films deposited from an RF glow discharge

Fluoropolymer films have been deposited in the glow and afterglow regions of radio frequency glow discharges fed with C₂F₆−H₂ mixtures. Structure, growth rate, composition, and wettability of the films have been investigated by means of atomic force microscopy, electron spectroscopy for chemical analysis, secondary ion mass spectrometry, and water contact angle measurements.¹²⁵I labeled baboon fibrinogen in baboon plasma has been used to study the adsorption of the protein onto the films. Protein retention, i.e., the binding affinity of the adsorbed protein, has been examined by elution with a sodium dodecyl sulfate solution. Adsorption and retention of fibrinogen were correlated using multivariate statistical methods with the wettability, the degree of film fluorination, and the CF _x (1≤x≤3) group distribution of the coatings. This correlation identified the influence of each variable on the adsorption and retention of fibrinogen onto these substrates. These variables or surface properties can be easily balanced by properly tuning the experimental conditions of the glow discharge deposition process.     

Experimental and Theoretical Studies of a Pulsed Microwave Excited Ar/CF4 Plasma

The present work deals with a pulsed microwave discharge in an Ar/CF ₄ gas mixture under a low pressure (1–10 mbar). The discharge chamber developed has a cylindrical geometry with a coupling window alternatively made of quartz or alumina. The setup allows one to investigate the plasma–wall interactions (here etching of the quartz window) and the ignition process of the pulsed microwave plasma. Microwave pulses with a duration of 50–200 s and repetition rate between 1 and 10 kHz are typical for the experiments. The space-time behavior of the fluorine number density in the discharge has been investigated experimentally by optical actinometry. The discharge kinetics is modeled using electron-transport parameters and rate coefficients derived from solutions of the Boltzmann equation. Together with the solution of the continuity and electron balance equations and the rate equations describing the production of CF _x (x=2, 3, 4) radicals and F atoms, a good agreement between experimental and theoretical data can be achieved.     

Concentrations of Active Species in the Flowing Afterglow of a Nitrogen Microwave Plasma

Measurements of nitrogen atom density, by means of NO chemical titration, along with an evaluation of the densities of some excited species N ₂ (B, v=11), N ₂ (B, v=2), N ₂ (C, v=0), and N ₂ ⁺ (B,v=0), by means of a spectroscopic study of some bands of dinitrogen, are achieved along the flowing afterglow of a dinitrogen microwave plasma (2450 MHz) for several pressures. The concentrations obtained are in the following range: [N]10 ⁺¹⁵ , [N ₂ (B, 2)]10 ⁺⁹ –10 ⁺¹⁰ , [N ₂ (B, 11)]10 ⁺⁸ –10 ⁺⁹ , [N ₂ (C, 0)]10 ⁺⁶ –10 ⁺⁷ , [N ₂ ⁺ (B,0)]10 ⁺⁶ -10 ⁺⁸ (cm^-3). From a kinetic study of the formation and decay of excited and charged species, an estimation of N ₂ (A, v), N ₂ (X, v, and N ₂ ⁺ (X) densities can be derived: [N ₂ (A, v)]10 ⁺¹² , [N ₂ (X, v6)]10 ⁺¹⁵ –10 ⁺¹⁶ , [N ₂ (X, v12)]10 ⁺¹⁴ –10 ⁺¹⁵ , [N ₂ ⁺ (X)]10 ⁺¹⁰ (cm ^-3 ).     

Mass spectrometric diagnosis of the surface nitriding mechanism in a d.c. glow discharge

Reactive constituents have been investigated in a molecular beam generated in the cathode surface glow area and surface boundary layer. Mixtures of nitrogen and hydrogen form NH_x(x=0–4) compounds, which are of relevance in heterogeneous, plasma vs. metal nitriding reactions. Ammonia decomposition leads to NH_x(x=2–4). Strong cataphoretic enrichment of hydrogen has been observed in the cathode glow area. Heterogeneous reactions of NH_x with iron lead to the formation of iron nitrides via intermediates such as FeNH_2–3. In a pulsed d.c. glow discharge, increased sputtering and decreased hydrogen enrichment have been observed.     

双酚F分子印迹聚合物的制备及其对水相中双酚F吸附性能的研究

以双酚F(4,4′-BPF)为模板分子,α-甲基丙烯酸(MAA)为功能单体,乙二醇二甲基丙烯酸酯(EGDMA)为交联剂,偶氮二异丁腈(AIBN)为引发剂,采用沉淀聚合法合成4,4′-BPF分子印迹聚合物(MIPs)。运用傅里叶红外(FT-IR)光谱对产物的结构进行表征,并对其吸附等温线、吸附动力学、吸附热力学及选择性识别性能进行研究。结果表明:MIPs对水相中4,4′-BPF具有特异性吸附,最大吸附容量为82.8 mg/g;Freundlich模型拟合吸附等温线的相关系数R2=0.995;热力学参数ΔG、ΔS、ΔH均小于0,表明此吸附过程是自发进行的、熵减的、放热的。     

Laser-induced Fluorescence Excitation Spectrum of NiS in 15500-17200 cm^-1

The laser-induced fluorescence excitation spectrum of jet-cooled NiS molecule has been recorded in the energy range of 15500 17200 cm-1. Fifteen bands have been assigned as three transition progressions：[15.65]^3Ⅱ1（v′=0-4）-X^3∑0^-（v″=0）,[15.69]^3∑0^-（v′=0-4）-X^3∑0^-（v″=0）,and [15.81]^3Ⅱ1（v′=0-4）-X^3∑0^-（v″=0）.Spectroscopic constants for the three newly identified electronically excited states have been determined for the first time. In addition,the lifetimes for most observed vibronic bands have also been measured.     

Determination of thyreostats in urine and thyroid gland by ultra high performance liquid chromatography tandem mass spectrometry

Thyreostatic compounds could be illegally administered to animals in order to obtain a weight gain due to a higher retention of water in the edible tissue and the gastro-intestinal tract. In the European Union their use for animal production is banned since 1981. Recently a highly sensitive method exploiting the determination of thyreostats with 3-iodobenzylbromide prior to purification to determine thyreostats in urine and other matrices was reported. For the first time, the UPLC instrumentation was used to separate the 3-iodobenzyl derivatives of various thyreostats. The deuterated internal standards tapazole-d₃ and propylthiouracil-d₅ were for the first time used for the quantification of tapazole, thiouracil, methylthiouracil, propylthiouracil, phenylthiouracil and mercaptobenzimidazole. The confirmative quantitative liquid chromatographic tandem mass spectrometric (LC–MS/MS) method was validated according to Commission Decision 2002/657/EC. The decision limit (CCα) and the detection capability (CCβ) were found to be for all compounds below the recommended value of 10 μg kg⁻¹.