超光滑表面加工方法的新进展

通过回顾超光滑表面加工技术的发展历程,对多种具有代表性的超光滑表面加工方法的原理和应用作了简单阐述,并重点提出和介绍了一种大气等离子体抛光方法。该方法实现了利用常压等离子体激发化学反应来完成超光滑表面的无损伤抛光加工,并首次引入电容耦合式炬型等离子体源,为高质量光学表面的加工提供了一条新的途径。试验结果表明,在针对单晶硅的加工过程中实现了1μm/min的加工速率和Ra 0.6nm的表面粗糙度。     

栅耦合型静电泄放保护结构设计

提出了一种新型栅耦合型静电泄放(ESD)保护器件——压焊块电容栅耦合型保护管.该结构不仅解决了原有栅耦合型结构对特定ESD冲击不能及时响应的问题，而且节省了版图面积，提高了ESD失效电压.0.5 μm标准互补型金属氧化物半导体工艺流片测试结果表明，该结构人体模型ESD失效电压超过8 kV.给出了栅耦合型ESD保护结构中ESD检测结构的设计方法，能够精确计算检测结构中电容和电阻的取值. 关键词： 静电泄放 栅耦合 金属氧化物半导体场效应管 压焊块电容     

Insight into influence of thermodynamic coefficients on transient negative capacitance in Zr-doped HfO2 ferroelectric capacitors

We study the influence of the thermodynamic coefficients on transient negative capacitance for the Zr-doped HfO₂ (HZO) ferroelectric capacitors by the theoretical simulation based on the Landau-Khalatnikov (L-K) theory and experimental measurement of electrical properties in the resistor-ferroelectric capacitor (R-FEC) circuit. Our results show that the thermodynamic coefficients α, β and γ also play a key role for the transient NC effect besides the viscosity coefficient and series resistor. Moreover, the smaller coefficients α and β, the more significant the transient NC effect. In addition, we also find that the thermodynamic process of transient NC does not obey the generally accepted viewpoint of Gibbs free energy minimization.     

Mn2O3纳米结构的简易合成与电化学性质

用简易的室温或水热方法制备出不同形貌的MnCO₃微结构。经600 ℃热处理后,室温制备MnCO₃转变成Mn₂O₃胶体片,而水热制备MnCO₃样品则形成多孔Mn₂O₃纳米结构。然而,室温制备MnCO₃经120 ℃热处理后形成Mn₂O₃晶相。制备样品经过XRD和SEM表征表明,热处理MnCO₃前驱物形成Mn₂O₃过程导致产物形貌与结构变化。其形成机理又通过TEM和FTIR进一步研究。Mn₂O₃纳米结构的电容性质通过循环伏安法表征,结果表明Mn₂O₃形貌与结构对其电容有重要影响。     

碳气凝胶及活化碳气凝胶电极材料制备与性能

 以间苯二酚(R)-甲醛(F)为原料,制备了有机气凝胶和碳气凝胶,并对其进行二氧化碳活化。X射线衍射(XRD)测试表明,二氧化碳渗入到碳气凝胶网络结构发生反应,造成(002)峰和(100)峰减弱;扫描电子显微镜(SEM)测试表明,活化没有破坏碳气凝胶的骨架结构,而是增加了大量的nm尺度微孔,从而大大提高了碳气凝胶的比表面积和微孔比例。在1 mol/L KOH电解液中进行了循环伏安和计时电位扫描测试,电极材料电化学性能稳定,具有较好的可逆性,在1 mA/s电流密度下进行充放电测试,得到活化前电极比电容为103 F/g,活化后由于比表面积的增加,比电容达到371 F/g,是一种理想的电化学电极材料。     

薄膜SOI上SiGe HBT集电结耗尽电荷和电容改进模型

文章研究了SOI衬底上SiGe npn异质结晶体管集电结耗尽电荷和电容.根据器件实际工作情况,基于课题组前面的工作,对耗尽电荷和电容模型进行扩展和优化.研究结果表明,耗尽电荷模型具有更好的光滑性;耗尽电容模型为纵向耗尽与横向耗尽电容的串联,考虑了不同电流流动面积,与常规器件相比,SOI器件全耗尽工作模式下表现出更小的集电结耗尽电容,因此更大的正向Early电压;在纵向工作模式到横向工作模式转变的电压偏置点,耗尽电荷和电容的变化趋势发生改变.SOI薄膜上纵向SiGe HBT集电结耗尽电荷和电容模型的建立和扩展为毫米波SOI BiCMOS工艺中双极器件核心参数如Early电压、特征频率等的设计提供了有价值的参考. 关键词： 耗尽电容 SiGe HBT SOI     

纳米结构电学性质的静电力显微镜研究方法

纳米尺度的材料具有许多不同于宏观体材料的奇特的物理和化学特性.了解纳米结构的物性随材料尺寸及形状的变化关系,对于设计和合成具有特定功能的纳米材料有重要的指导意义.静电力显微镜技术为研究微纳米尺度下材料的电学特性提供了强有力的工具.文章介绍了这种测量技术的基本原理,并列举了几种在静电力显微镜基础上发展起来的纳米材料电学性...     

Quantitative combination of volumetric MR imaging and MR spectroscopy data for the discrimination of meningiomas from metastatic brain tumors by means of pattern recognition

The analysis of information derived from magnetic resonance imaging (MRI) and spectroscopy (MRS) has been identified as an important indicator for discriminating among different brain pathologies. The purpose of this study was to investigate the efficiency of the combination of textural MRI features and MRS metabolite ratios by means of a pattern recognition system in the task of discriminating between meningiomas and metastatic brain tumors. The data set consisted of 40 brain MR image series and their corresponding spectral data obtained from patients with verified tumors. The pattern recognition system was designed employing the support vector machines classifier with radial basis function kernel; the system was evaluated using an external cross validation process to render results indicative of the generalization performance to “unknown” cases. The combination of MR textural and spectroscopic features resulted in 92.15% overall accuracy in discriminating meningiomas from metastatic brain tumors. The fusion of the information derived from MRI and MRS data might be helpful in providing clinicians a useful second opinion tool for accurate characterization of brain tumors.     

Preparation and characterization of carbon aerogel microspheres by an inverse emulsion polymerization

Carbon aerogel (CA) microspheres have been successfully synthesized by an inverse emulsion polymerization and characterized by scanning electron microscopy (SEM), N₂ sorption isotherm and X-ray diffraction (XRD). The results show that the size and pore characteristics of carbon microsphere obviously depend on stirring speed and concentration of surfactant in the emulsion polymerization process. The resultant CA microspheres are amorphous carbon structure with the size ranging from about 2 to 50 μm by changing the stirring speed. CA microspheres with S_BET of 414-603 m² g^− 1 and V_meso of 0.028-0.432 cm³ g^− 1 are synthesized using different SPAN80 concentrations. The results of cyclic voltammetry indicate that the CA microspheres prepared at a stirring speed of 480 rpm and at V_s/V_h = 0.01 have ideal supercapacitive behavior in 6 M KOH electrolyte, the maximum specific capacitance of the electrode reaches 180 F g^− 1.     

Photo‐capacitance spectroscopy investigation of deep‐level defects in AlGaN/GaN hetero‐structures with different current collapses

We have investigated electronic deep levels in two AlGaN/GaN hetero‐structures with different current collapses grown at 1150 and 1100 °C by a photo‐capacitance spectroscopy technique, using Schottky barrier diodes. Three specific deep levels located at ～2.07, ～2.80, and ～3.23 eV below the conduction band were found to be significantly enhanced for severe current collapse, being in reasonable agreement with photoluminescence and capacitance–voltage characteristics. These levels probably originate in Ga vacancies and residual C impurities and are probably responsible for the current collapse phenomena of the AlGaN/GaN hetero‐structures. (© 2010 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)