The leveling of mask and wafer in proximity nanolithography using fringe pattern phase analysis

The fringe pattern phase analysis method is proposed for the leveling of mask and wafer in proximity lithography. The tilt between mask and wafer in the space is reflected in the tilted fringe pattern. The method combining the 2-D Fourier transform and 2-D Hanning window is proposed for processing the tilted fringe pattern. The offset and angle of tilt are extracted through phase analysis. Computer simulation and experiment are both performed to verify this method. The results indicate that the tilt of the mask and wafer in the space can be extracted with high accuracy through this method.     

Effect of annular apodization and pupil beam parameter in the focal region of high NA lens

Focusing properties of the radially polarized axisymmetric Bessel-modulated Gaussian beam with quadratic radial dependence (QBG beam) and annular aperture are investigated theoretically by vector diffraction theory. Simulation results show that the intensity distribution in the focal region of the radially polarized axisymmetric QBG beam can be adjusted considerably by small beam parameter (μ) and annular aperture (δ). When μ increases, the focal spot may change to focal hole and changes focal pattern remarkably. On introducing annular aperture, focus can split or extends along the optical axis for different μ. In this paper, we have shown the generation of the focal spot, dark focal spot, focal split and increase in focal depth in the axial direction of the incident beam propagating through the aligned optical system.     

有叶顶间隙的涡轮弯叶栅拓扑与旋涡结构(Ⅱ)——横截面流场拓扑结构与叶栅旋涡结构

根据具有叶顶间隙的直叶栅和正、反弯叶栅壁面流动的墨迹显示以及横截面内气动参数测量,应用拓扑学原理,分析了叶栅流道横截面内的拓扑结构。与直叶栅比较,叶片正弯消除了上通道涡分离线,并使二次涡由闭式分离转变为开式分离,而叶片反弯仅影响奇点位置、旋涡强度与尺度。     

鉴别玉米杂交种纯度的近红外光谱分析技术研究

以不同产地和年份的农华101(NH101)玉米杂交种和母本种子为对象,研究了鉴别玉米杂交种子纯度的近红外光谱分析方法。 光谱采集时间跨度达10个月,运用傅里叶变换(FT)近红外光谱仪器,在不同季节用23天(分五个时间段)采集了这些样品共920条玉米单子粒近红外漫反射光谱。 全部原始光谱用移动窗口平均、 一阶差分导数和矢量归一化进行预处理,使用主成分分析(PCA)方法和线性判别分析(LDA)方法降维,采用仿生模式识别(BPR)方法建立模型。 通过对光谱预处理校正光谱失真,使样品光谱集在特征空间分布的范围收缩,相对距离增大了近70倍,实现了母本和杂交种子的鉴别。 通过代表性样品的选择,提高了模型对光谱采集时间、 地点、 环境等条件变动的应变能力,也提高了模型对样品种子制种时间与地点变动的应变能力,增强了模型的稳健性,使测试集玉米单子粒杂交种和母本种子的平均正确识别率达到95%以上,而平均正确拒识率也达到85%以上。     

WALL CONDUCTION EFFECT ON THE ONSET OF THERMAL INSTABILITY IN HORIZONTAL RECTANGULAR CHANNELS

The effect of peripheral thermal conduction in the bottom wall on the onset of thermal instability in the thermal entrance region of horizontal, rectangular, bottom-uniform-heated channels was studied by experiment and theoretical simulation. The predicted results of the onset of thermal instability for the cases of uniform peripheral wall heat flux are in agreement with the published experimental data, but the predicted results for the cases of uniform peripheral wall temperature exceed the previous data by about an order of magnitude. The present experimental data reconfirm the present predictions. The effect of increasing the peripheral wall conduction is shown to stabilize the flow.     

Determination of the Coefficient of Laser Radiation Reflection from Dielectric Targets in Vacuum

We present the results of experimental determination of the coefficients of laser radiation reflection (₁ 10.6 m and ₂ 1.06 m) from dielectric targets of complex chemical composition in vacuum with allowance for a regime of developed plasma formation.     

Study on the coupled multiple nanocrystal quantum-dot system

We have studied excess electron filling rule in the coupled multiple nanocrystal quantum-dot systems, i.e. quantum chain and quantum pattern, by the unrestricted Hartree–Fock–Roothaan method. Assuming each quantum dot of quantum pattern to be confined in a three-dimensional spherical potential well of finite depth, we have studied the intradot and interdot electron Coulomb and exchange interactions. By varying the center distance d between the coupled quantum dots, the transition from the strong- to weak-coupling situation is realized. For the systems in question, our results show that, with the filling of excess electrons into the quantum pattern, the corresponding chemical potentials form quasi-band structure, which is similar to the energy-band structure of crystal material. In each chemical-potential band of quantum pattern, the number of chemical-potential curves is equal to the number of quantum dots, and the distributions of them depend strongly on the quantum-dot arrangement structure of quantum pattern.     

谈基础物理的渗透式教学

构建新型课堂教学模式是提高教学质量、推进素质教育的重要环节和有效途径．文章以万有引力定律的讲解为例，阐明在基础物理教学中，如何结合知识内容，对科学精神、学科前沿、学科交叉、方法思路及学科发展等进行全面渗透，以促进教学质量的全面提高．     

斜置平面天线阵的近场-远场方向图分析

从平面近场扫描数据处理原理和平面天线阵方向图理论出发,分析了相对于平面近场扫描平面斜置的平面天线阵方向图.基于斜置平面天线阵的空间结构关系,选择阵面旋转轴与阵面法线形成的平面为性能评估考察平面,发展了一种快速计算性能评估平面方向图的方法.得出该平面与平面近场扫描坐标系单位方向球相交曲线的轨迹参数方程.利用快速傅里叶变换技术,计算出斜置平面天线阵平面近场扫描空间方向图,在此基础上结合轨迹参数方程和二维插值方法解出对应该性能评估平面的方向图数据.数值仿真和实际应用结果表明该分析结论和方法的可靠性与实用性.     

双层耦合介质中四边形图灵斑图的数值研究

采用双层线性耦合Lengyel-Epstein模型,在二维空间对简单正四边和超点阵四边形进行了数值分析.结果表明:当两子系统波数比N1时,随耦合强度的增大,基模的波矢空间共振形式发生改变,系统由简单六边形自发演化为结构复杂的新型斑图,除已报道的超六边形外,还获得了简单正四边和多种超点阵四边形,包括大小点、点线、白眼和环状超四边等斑图.当耦合系数α和β在一定范围内同步增大时,两子系统形成相同波长的Ⅰ型简单正四边;当α和β不同步增大时,由于两图灵模在短波子系统形成共振,系统斑图经相变发生Ⅰ型正四边→Ⅱ型正四边→超点阵四边形的转变;当系统失去耦合作用时,短波子系统波长为λ的Ⅰ型正四边斑图迅速失稳并形成波长为λ/N的Ⅰ型正四边,随模拟时间的延长,两子系统中不同波长的正四边均会经相变发生Ⅰ型正四边→Ⅱ型正四边→六边形的转变.