声表面波化学传感器膜材料的研究进展

声表面波(Surface Acoustic Wave,简称SAW)化学传感器是一种可用于现场实时检测的气敏传感器,具有体积小、选择性好、信号响应快等特点,其中敏感膜材料是决定其性能的关键因素。本文主要介绍了传感器的工作原理,敏感膜与吸附气体之间的作用力,对膜材料的选择及性能影响因素进行了详细阐述。重点介绍了现有膜材料的分类及应用,主要有有机聚合物膜、无机物膜、超分子膜和复合膜,比较了它们的优缺点。对现有成果进行总结,同时提出了传感器膜材料的发展趋势。     

Numerical study on surface acoustic wave method for determining Young's modulus of low-k films involved in multi-layered structures

The surface acoustic waves (SAWs) technique is becoming an attractive tool for accurately and nondestructively characterizing the mechanical property of the brittle low dielectric constant (low-k) thin film. The theoretical equations for describing SAWs propagating on the multi-layered structure are derived in this study. The dispersion features of SAWs propagating on different structures of low-k/SiO₂/Si substrate, SiO₂/low-k/Si substrate, low-k/Si substrate, and low-k/Cu/Si substrate are investigated to instruct an accurate and facile fitting process for determining Young's modulus of low-k films. The dependence of dispersion relation on the film thickness, elastic modulus of low-k materials as well as frequency are provided and discussed in detail. The study shows an obvious influence of layered structure on the dispersion relation of SAWs. For a fixed structure, the dispersion curvature increases with the decrease of Young's modulus of low-k films.     

QCM和SAW传感器的原理及其在现场检测中的应用

压电化学传感器是一类重要的质量敏感型检测器,由于具有体积小、灵敏度高、响应时间快等优越性而具有极好的应用前景.本文介绍了体声波化学传感器(QCM)和表面声波化学传感器(SAW)的原理,概述了最近几年的应用情况及提高灵敏度的方法,并对其发展趋势进行了展望.     

Rapid Determination of Dimethoate with a Surface Acoustic Wave Impedance Sensor System

Abstract

Based on the principle of enzyme inhibition, a novel and sensitive lipase biosensor to determine organophosphorus pesticide is presented. Contact of the enzyme with pesticide samples results in specific inhibition of enzyme activity. Sensor calibration was possible by correlating the inhibition of enzyme activity with various concentrations of pesticide compound in a buffer solution. The sensor was successfully used to determine pesticide concentrations ranging from a low of 167ng/ml to 1.34μg/ml, and the detection limit is 81ng/ml. The effects of temperature, pH value, incubation time and solvent were also investigated. The sensor was also applied to the determination of dimethoate residues in the peel and flesh of tomato.     

环形定子的激光致表面波机理及可视化探测研究

开展了用于新型激光驱动马达的环形定子的激光致表面波机理及实验研究. 提出一种带有凹槽阵列结构的环形定子新设计, 建立了激光在环形定子表面激发表面波的物理模型, 揭示了影响表面波幅值的关键因素; 采用一种新颖的激光致表面波可视化探测方法, 在波长1053 nm, 脉宽30 ns, 单脉冲能量1 mJ的激光激发下, 对表面波在铜质环形定子表面的传播特性进行了可视化探测实验. 理论与实验研究表明: 当激发光斑的位置紧邻凹槽阵列时, 沿着圆环向凹槽方向传播的表面波会被齿状凹槽阵列迅速衰减和吸收, 而沿着圆环向远离凹槽方向传播的表面波能够持续传递, 从而首次实现了激光致表面波在环形定子上的单向传播; 而对没有凹槽阵列结构的圆环进行的对比实验表明, 激光致表面波在圆环表面双向传播, 最终因相互混叠和串扰等而处于混乱状态. 由激光在该种环形定子表面激发出的单向表面波, 可望在光致表面波马达及驱动机构中获得应用. 关键词： 激光致表面波 环形定子 表面波可视化 激光驱动     

分子束外延生长的ZnO压电薄膜及其声表面波器件特性

用RF-MBE在蓝宝石(0001)衬底上引入MgO和低温ZnO双缓冲层生长了ZnO薄膜,并制备了声表面波器件。在ZnO薄膜中,仅观测到(0002)面的XRD,且衍射峰增强,半高宽减小,表明ZnO薄膜c轴取向性更好,晶体结构更优。室温下自由激子吸收峰更尖锐和吸收边更陡峭以及仅观测到自由激子发光,且发光线宽变窄、发光强度变大,表明ZnO薄膜缺陷密度减小,薄膜质量提高。测得该ZnO压电薄膜的电阻率高达4×10⁷ Ω·cm,其声表面波的速度高达5 010 m/s。     

宽温度范围SAW应变传感器温度与应变解耦研究*

针对宽温度范围应变测量的温度干扰问题,提出并研究了基于双谐振器的声表面波应变传感器。理论上,结合微扰理论、有限元方法、有效介电常数法分析出双谐振器频率与应变、温度的关系公式,进而推导出应变与温度关于这两组谐振器频率变化的表达式。实验上,搭建宽温度范围的实验平台,在Y+34?切向的石英基片上制作该传感器芯片,测得传感器芯片在30?C～180?C下的频率响应,将测得的谐振器频率代入表达式计算得到温度与应变值,与实验中参考温度与应变的值基本吻合。     

Hydrothermal Liquid Phase Epitaxy of Gallium Orthophosphate on Quartz Crystal Substrates

Gallium orthophosphate (GaPO₄) layers for surface acoustic wave (SAW) and sensor applications have been grown on quartz crystal substrates with sizes of about 30 x 30 mm² by hydrothermal liquid phase epitaxy (HLPE). The growth of epitaxial GaPO₄ layers is difficult because of a strong tendency for twinning. Besides, a retrograde solubility and an intense chemical aggressiveness of the solution has to be considered. Nevertheless, we found an effective crystal growth technique to deal with these problems using large and qualitatively good substrate crystals of quartz. The most important step of the epitaxy is the formation of an interlayer between the quartz substrate and the GaPO₄ deposit. Epitaxial layers with thickness up to 500 μm were obtained and characterised by means of X‐ray techniques.     

移动通讯用声表面波器件发展近况

本文首先回顾了民用声表面波器件的最新发展概况．随着移动通讯的发展，声表面波器件的最大应用市场将是通讯，而低插损声表面波滤波器成为新的研究高潮．本文因此随后简要介绍了几种主要的低插损结构的研究情况及其在移动通讯中的应用．最后，展望了声表面波器件的发展趋势．