Controlled surface crystallization of fused silica by Li+-Ion implantation

A new method of producing a glass-ceramic surface layer on fused silica has been demonstrated using Li⁺-ion implantation and relatively low-temperature annealing. Infrared reflection spectroscopy (IRS) was used to study the effects of ion implantation on structural changes. Isochronal annealing of samples implanted with 250 keV Li⁺/cm² brings about a dramatic change in the IRS spectra at 800°C in that it becomes identical with that of α-quartz. The dependence of the degree of crystallization on temperature, Li⁺-ion fluence, and silica type was studied.     

利用准谐频叉指换能器实现GHz高频SAW滤波器

本文利用准谐频设计方法,在常规光刻工艺水平上,成功地实现了ＧＨＺ级声表面波（ＳＡＷ）器件,准谐频叉指换能器（ＱＨＩＤＴ）的优点为：其指条宽与指间隙可以比一般的单指换能器宽,克服了单指换能器内指间的多次反射,并且又较好地解决了普通谐频叉指换能器基频抑制不好的缺点,本文给出了制作在ＳＴ石英基片上,工作频率１１２８ＭＨＺ的声表面波滤波器的实验结果。     

Increasing robustness and sensitivity of protein microarrays through microagitation and automation

Assay systems that employ protein microarrays for the analysis of complex samples are powerful tools to generate a high amount of data from a limiting amount of sample. Due to miniaturization, these systems are susceptible to fluctuations during signal generation and the use of uniform conditions for sample incubation and during the assay procedure is required to get reproducible results. Diffusion limits may prevent constant conditions on all parts of the array and can lead to the decease of the sensitivity of the array. Therefore, we set-up an automated assay system integrating a novel microagitation device using surface acoustic wave (SAW) technology. Multiplexed assays for the detection of autoantibodies from human serum and sandwich immunoassay for the detection of matrix metalloproteases (MMPs) were used to evaluate the system. Diffusion-rate limited solid phase reactions were enhanced by microagitation using the SAW technology resulting in up to three-fold higher signals.     

Development of human IgE biosensor using Sezawa-mode SAW devices

This paper reports Sezawa-mode surface acoustic wave (SAW) devices with via-isolated cavity to construct the allergy biosensor. To fabricate Sezawa-mode SAW devices, the RF magnetron sputtering method for the growth of piezoelectric ZnO thin films are adopted and influences of the sputtering parameters are investigated. The optimal substrate temperature of 300 °C, RF power of 120 W and sputtering pressure of 2 Pa were used to deposit piezoelectric ZnO films with a smooth surface, uniform grain size and strongly c-axis-orientated crystallization. A back-etched SAW resonator is used in this study. The wet etching of (100)-oriented silicon wafers is used to form a back-side cavity which is critical to the formation of a hopper cavity for holding bio-analytes. The remaining membrane structure silicon thickness was 25 μm. In this report, the chrome (Cr, 12 nm)/gold (Au, 66 nm) layer was initially deposited onto the sensing area of SAW devices as the binding layer for biochemical sensor. The resonance frequency of the Sezawa-mode SAW device is 1.497 GHz. The maximum sensitivity of the Sezawa-mode is calculated to be 4.44 × 10⁶ cm²/g for human immunoglobulin-E (IgE) detection. The stability for human IgE detection is calculated to be 80% and the variation of the stability ±3% was obtained after several tests.     

Graphene/LiNbO3 surface acoustic wave device based relative humidity sensor

This study described relative humidity (RH) sensing using a graphene/128° YX LiNbO₃ surface acoustic wave (SAW) device. The resonant frequency of the device decreased in a two-stage manner as the RH increased. For a low RH range (RH < 50%), a frequency downshift of 1.38 kHz per 1% RH change was observed. This was attributed to mass loading of the SAW propagation surface due to the adsorption of water molecules by the graphene surface. For a high RH range (RH > 50%), a frequency downshift of 2.6 kHz per 1% RH change was obtained, which was due to the change in elastic grapheme properties. The mass loading effect of the water layer was less effective at high temperature, resulting in a lower temperature coefficient of resonant frequency (TCF).     

FEM simulation of Rayleigh waves for CMOS compatible SAW devices based on AlN/SiO2/Si(1 0 0)

A simulation study of Rayleigh wave devices based on a stacked AlN/SiO₂/Si(1 0 0) device was carried out. Dispersion curves with respect to acoustic phase velocity, reflectivity and electromechanical coupling efficiency for tungsten W and aluminium Al electrodes and different layer thicknesses were quantified by 2D FEM COMSOL simulations. Simulated acoustic mode shapes are presented. The impact of these parameters on the observed Rayleigh wave modes was discussed. High coupling factors of 2% and high velocities up to 5000 m/s were obtained by optimizing the AlN/SiO₂ thickness ratio.     

基于偏振模式转换的声光陀螺研究

提出一种基于偏振模式转换的声光陀螺,分析其原理与结构并对该陀螺进行实验测试。静态测试结果表明,当声光作用长度为15mm,声表面波输入功率为100mW,频率为168.201MHz时,偏振模式转化效率为80.02%。在偏置条件下进行旋转测试,得到输出电压随陀螺转速呈线性变化的曲线,其灵敏度约为1mV/[(°)/s]。偏振型声光陀螺保留声表面波陀螺体积小、成本低等优点,而在灵敏度上有大幅提高。     

声表面波用压电晶体的新进展

报道了我们在Li2B4O7、Sr3Ga2Ge4O14、LiNbO3、LiTaO3等声表面波用压电晶体材料方面的最新研究进展.采用改进型坩埚下降法成功生长了直径3～4英寸的Li2B4O7晶体,并实现了批量生产.作为硅酸镓镧系列新型压电晶体之一,Sr3Ga2Ge4O14晶体具有最大的压电系数.报道了直径2英寸Sr3Ga2Ge4O14晶体的生长结果,测试了该晶体的压电性能.在CO2(90;)、H2(10;)混合气氛中,分别在700℃和450℃下对LN和LT晶片进行化学还原处理,成功制备了3英寸LN和LT低静电黑片,不仅减少了器件制作工序,而且使成品率提高了5～8百分点.此外,在密封坩埚中生长了低静电LiNbO3晶体,观察到一些新的现象.     

一种新的超声表面波测温方法研究

在材料科学和材料工程领域,对受热材料温度分布测量的需求一直在持续增长。这主要是因为对于材料的各种特性和行为,温度都是其重要参量。本文设计一种新的声表面波测量方法测量在加热或冷却过程中的材料表面的温度梯度。这种方法涉及到超声波回波测量和导热反问题的分析方法来得到材料中沿超声传播方向的一维温度场分布。为了证明方法的可行性,文章使用铝板进行了实验并得到了准确的材料表面温度场分布图像。超声测温技术将作为一种新型的热点技术,将有很大潜力被用在工业材料高温操作过程中的表面温度场成像。     

Review: Aptamers in microfluidic chips

This review, covering reports published from 2002 to August 2010, shows how aptamers have made significant contributions in the improvements of microfluidic chips for affinity extraction, separations and detections. Furthermore, microfluidic chip methods for studying aptamer-target interactions and performing aptamer selections have also been summarized. Accordingly, research vacancies and future development trends in these areas are discussed.