Surface roughness investigation of semi-conductor wafers

Conventionally, surface roughness is predominantly determined through the use of stylus instruments. However, there are certain limitations involved in the method, particularly when a test specimen, such as a silicon wafer, has a smooth mirror-like surface. Hence, it is necessary to explore alternative non-contact techniques. Light scattering has recently been gaining popularity as an optical technique to provide prompt and precise inspection of surface roughness. In this paper, the total integrated scattering (TIS) model is modified to retrieve parameters on surface micro-topography through light scattering. The applicability of the proposed modified TIS model is studied and compared with an atomic force microscope. Experimental results obtained show that the proposed technique is highly accurate for measuring surface roughness in the nanometer range.     

应用无衍射贝塞尔光束的固体线膨胀系数测量系统

测量固体线膨胀系数是工程设计中的一项重要工作。这套非接触固体线膨胀系数测量系统利用激光三角法进行了设计。通过采用线阵CCD作为信号传感器来实现自动化测量。通过采用无衍射贝塞尔光束来提高测量精度和增大测量范围。     

光学系统光阑应用的实例

介绍了一种光学组合系统，通过构造光学系统虚拟的视场光阑实现人眼屈光度测量，它是光学系统光阑应用的生动实例.     

Measurement of wire diameter by optical diffraction

A combined interference and diffraction pattern, in the form of equidistant interference fringes, resulting from illuminating a vertical metallic wire by a laser beam is analyzed to measure the diameter of four standard wires. The diameters range from 170 to 450 μm. It is found that the error in the diameter measurements increases for small metallic wires and for small distances between the wire and the screen due to scattering effects. The intensity of the incident laser beam was controlled by a pair of sheet polaroids to minimize the scattered radiation. The used technique is highly sensitive, but requires controlled environmental conditions and absence of vibration effects. The expanded uncertainty for k=2 is calculated and found to decrease from U(D)=±1.45 μm for the wire of nominal diameter 170 μm to ±0.57 μm for the diameter 450 μm.     

工业污染排放中气──固两相流的光学测量

烟尘及各种工业性粉尘排放是典型的气-固两相系．迄今为止，国内外尚缺少有效的监测其排放的手段．本文基于光的散时原理，提出了一种非接触的光学方法，能对上述固体颗粒物的污染排放浓度及粒径大小进行实时、在线的监测。计算机模拟和实验研究表明，该方法具有广阔的工业应用前景。     

Structural and electrical properties of crystalline (1−x)Ta2O5−xTiO2 thin films fabricated by metalorganic decomposition

Polycrystalline (1−x)Ta₂O₅−xTiO₂ thin films were formed on Si by metalorganic decomposition (MOD) and annealed at various temperatures. As-deposited films were in the amorphous state and were completely transformed to crystalline after annealing above 600 °C. During crystallization, a thin interfacial SiO₂ layer was formed at the (1−x)Ta₂O₅−xTiO₂/Si interface. Thin films with 0.92Ta₂O₅–0.08TiO₂ composition exhibited superior insulating properties. The measured dielectric constant and dissipation factor at 1 MHz were 9 and 0.015, respectively, for films annealed at 900 °C. The interface trap density was 2.5×10¹¹ cm⁻² eV⁻¹, and flatband voltage was −0.38 V. A charge storage density of 22.8 fC/μm² was obtained at an applied electric field of 3 MV/cm. The leakage current density was lower than 4×10⁻⁹ A/cm² up to an applied electric field of 6 MV/cm.     

Assignments of methanol laser lines by frequency measurements and Fourier transform spectroscopy

We have measured the frequencies of four CH₃OH far-infrared laser lines that were previously known only by wavelength measurement. Two of these lines turned out to be doublets, bringing the total number of measured lines to six. We can now confirm the assignments of five of them and definitely disprove the assignments proposed for the sixth.In particular we confirm the assignments for the four strong laser lines at 205 and 208 µm pumped by the 9-P(34) CO₂ laser line. These lines share a common upper level in the first excited CO-stretch state, and terminate in the upper and lower levels of a hybrid state with J=5. Heterodyne frequency measurements and conventional microwave spectroscopy show that both lines are split into two components approximately 3.5 MHz apart. The origin of this further splitting is interpreted as a perturbed K-splitting.Work supported by Consiglio Nazionale delle Ricerche -Italia     

Experimental verification of drop/impact simulation for a cellular phone

Conducting drop tests to investigate impact behavior and identify failure mechanisms of small-size electronic products is generally expensive and time-consuming. Nevertheless, strict drop/impact performance criteria for hand-held electronic products such as cellular phones play a decisive role in the design because they must withstand unexpected shocks. The design of product durability on impact has heavily relied on the designer's intuition and experience. In this study, a reliable drop/impact simulation for a cellular phone is carried out using the explicit code LS-DYNA. Subsequently globallocal experimental verification is accomplished by means of high-speed photography and impact response measurement. Using this methodology, we predict potential damage locations in a cellular phone and compare them with real statistical data. It is envisaged that development of a reliable methodology of drop/impact simulation will provide us with a powerful and efficient vehicle for improvement of the design quality and reduction of the product development cycle.     

荧光光纤温度传感器激励光源的选择

本文分析计算了荧光光纤温度传感器的温敏元件——GsAlAs/GaAs双异质结半导体材料的荧光辐射效率与激励光波长的关系。讨论了温度测量范围及温敏元件GaAlAs层铝含量对激励光源的限制,在0～200℃测温范围内,若采用LED作激励光源,其峰值波长应在0.70～0.76μm之间选择。     

基于CT算法的束团横向相空间测量

精确测量束团的发射度和横向相空间, 在高亮度电子束的产生和应用中具有重要意义. 传统测量方法在测量发射度时需要对束团在相空间内分布进行初始假设, 且只能给出相椭圆的twiss参数;基于CT(computerized tomography)算法的束团横向相空间测量方法无需先验假设, 能给出粒子在相空间内的真实分布, 测量结果更为精确. 介绍了基于CT算法的束团横向相空间测量的原理和初步实验结果, 并与四极透镜扫描法测量的结果进行了比较.