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151.
M. A.?Naveed N. U.?Rehman S.?Zeb S.?Hussain M.?ZakaullahEmail author 《The European Physical Journal D - Atomic, Molecular, Optical and Plasma Physics》2008,47(3):395-402
This paper reports the effect of helium percentage variation in a capacitive RF helium-nitrogen mixture plasma on various
plasma parameters and concentration of nitrogen active species (N2(C3Π u) and N2
+(B2Σ u
+)). Langmuir probe is used for determination of electron energy distribution functions, effective electron temperature, plasma
potential and electron density. Optical emission spectroscopy is used for determination of electron temperature from Boltzmann's
plot of He–I lines and the relative changes in the concentration of active species by measuring the emission intensities of
nitrogen (0-0) bands of the second positive and the first negative systems. The results demonstrate that electron temperature,
electron density and concentration of active species increase significantly with increase in helium percentage in the mixture
and RF power. 相似文献
153.
Hong-li GuoGuo Liu Xue-dong LiHai-min Li Wan-li ZhangJian-guo Zhu Ding-quan Xiao 《Applied Surface Science》2011,257(15):6573-6576
The multiferroic (PMN-PT/CFO)n (n = 1,2) multilayered thin films have been prepared on SiO2/Si(1 0 0) substrate with LNO as buffer layer via a rf magnetron sputtering method. The structure and surface morphology of multilayered thin films were determined by X-ray diffraction (XRD) and atom force microscopy (AFM), respectively. The smooth, dense and crack-free surface shows the excellent crystal quality with root-mean-square (RMS) roughness only 2.9 nm, and average grain size of CFO thin films on the surface is about 44 nm. The influence of the thin films thickness size, periodicity n and crystallite orientation on their properties including ferroelectric, ferromagnetic properties in the (PMN-PT/CFO)n multilayered thin films were investigated. For multilayered thin films with n = 1 and n = 2, the remanent polarization Pr are 17.9 μC/cm2 and 9.9 μC/cm2; the coercivity Hc are 1044 Oe and 660 Oe, respectively. In addition, the relative mechanism are also discussed. 相似文献
154.
Structural and optical properties of RF magnetron sputtered aluminum nitride films without external substrate heating 总被引:1,自引:0,他引:1
Atul Vir Singh Sudhir ChandraA.K. Srivastava B.R. ChakrobortyG. Sehgal M.K. DalaiG. Bose 《Applied Surface Science》2011,257(22):9568-9573
We report structural and optical properties of aluminum nitride (AlN) thin films prepared by RF magnetron sputtering. A ceramic AlN target was used to sputter deposit AlN films without external substrate heating in Ar-N2 (1:1) ambient. The X-ray diffraction and high resolution transmission electron microscopy results revealed that the films were preferentially oriented along c-axis. Cross-sectional imaging revealed columnar growth perpendicular to the substrate. The secondary ion mass spectroscopy analysis confirmed that aluminum and nitrogen distribution was uniform within the thickness of the film. The optical band gap of 5.3 eV was evaluated by UV-vis spectroscopy. Photo-luminescence broad band was observed in the range of 420-600 nm with two maxima, centered at 433 nm and 466 nm wavelengths related to the energy states originated during the film growth. A structural property correlation has been carried out to explore the possible application of such important well oriented nano-structured two-dimensional semiconducting objects. 相似文献
155.
Li-Shin Chang 《Applied Surface Science》2011,258(3):1279-1281
The performance of a Li-ion cell strongly depends on the solid-electrolyte interface (SEI) on electrodes. The depth distribution of composition in SEI is normally determined by means of X-ray Photoelectron Spectroscopy (XPS) via Ar ion sputtering. Recently, a new kind of ion gun using C60 ions as sputtering source was introduced. In this report, a comparison between the effects of these two kinds of ion guns on the quantification of Li(Ni,Co,Mn)O2 electrodes was made. It was found that the C60 ion gun is more suitable for analyzing the composition and chemical state of Li(Ni,Co,Mn)O2 electrode since that it causes lower chemical damage in the superficial layer. 相似文献
156.
157.
The boundary of the zone in which sputtered atoms are thermalized in the substrate–target drift space during the ion-plasma magnetron deposition of films is determined theoretically and experimentally. A comparison of the thicknesses of films deposited on the front and back sides of substrates situated at different distances from the target makes it possible to divide the flow of atoms sputtered toward substrates into direct and diffusion flows and to determine the dimensions of the spatial zone in which sputtered atoms are thermalized. The experimental data are in quantitative agreement with the results of a statistical simulation of the thermalization process of atomic particles during the ion-plasma deposition. This simulation enables optimization of the technology of defect-free growth of films with uniform thickness on substrates with complex 3D configuration. 相似文献
158.
159.
利用微机械加工技术制造出一种新型微扫描镜,结合半导体激光器,可用于投影显示.激光器发出的光束被两个分别沿着X轴、Y轴扭转的镜面相继反射,扫描出二维图形.实验测得扫描镜在15 V电压,频率为扫描镜谐振频率2倍的方波信号驱动下,镜子的光学扫描角度达±12°.由于每个镜子都沿各自轴以简谐规律扭转,扫描所得投影为李萨如图形.通过分析图形的形成原理并用Matlab仿真,选出了适用用于任意图案显示的扫描镜谐振频率组合(X轴2 400 Hz, Y轴2 425 Hz).该组合可以形成194×192个像素点,刷新频率为25 Hz.在此基础上提出了一种通过调制激光开关来进行投影显示的方法. 相似文献
160.
We review our recent work in the implementation of optical single-sideband (OSSB) modulation and in the application of this modulation format to microwave photonics and optical testing systems. We have developed an enhanced OSSB modulator for wide-band operation, the so-called bidirectional OSSB modulator, and a simplification of this scheme for narrow-band applications. These OSSB modulators are based on the use of a standard single-electrode Mach-Zehnder electro-optic modulator (MZ-EOM) and passive fiber-optic components. In both designs, the OSSB operation is shown to be independent of the MZ-EOM bias. Therefore, the optical modulation depth at the output of the device can be enhanced using minimum transmission biasing to provide suppression of the optical carrier. Finally, we demonstrate the application of OSSB modulators to the improvement of microwave/millimeter-wave subcarrier multiplexing fiber-optic links and to narrow-band fiber radio systems. In addition, we analyzed the feasibility and the limitations of an optical vector network analysis technique based on OSSB modulation that can provide sub-picometer wavelength resolution. 相似文献