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61.
Real-time visualisation of deformation fields using speckle interferometry and temporal phase unwrapping 总被引:1,自引:0,他引:1
A real-time system for analysing data from speckle interferometers, and speckle shearing interferometers, has been developed. Interferograms are continuously recorded by a digital camera at a rate of 60 frames s−1 with temporal phase shifting carried out at the same rate. The images are analysed using a pipeline image processor. With a standard 4-frame phase-shifting algorithm (phase steps of π/2), wrapped phase maps are calculated and displayed at 15 frames s−1. These are unwrapped using a temporal phase unwrapping algorithm to provide a real-time colour-coded display of the relevant displacement component. Each camera pixel (or cluster of pixels) behaves in effect as an independent displacement sensor. The reference speckle interferogram is updated automatically at regular user-defined intervals, allowing arbitrarily large deformations to be measured and errors due to speckle decorrelation to be minimised. The system has been applied to the problem of detecting sub-surface delamination cracks in carbon fibre composite panels. 相似文献
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惯性约束聚变系统中光学元件的波前梯度均方根是一个关键参数,对其数值计算涉及到的空域处理、频域滤波及梯度算法等关键技术进行了理论分析。分别采用最简单差分算法、中心差分算法、最小二乘拟合算法、“五点法”对实测波前数据进行了梯度均方根值计算。结果表明波前数据的空域处理采用Quad-flip技术较为合适;频域滤波器的选用上应着重考虑滤波的有效性。对于原始波前,4种算法计算梯度均方根值的差别小于0.01 λ/cm(λ=632.8 nm);而对于截止频率为0.0303 线/mm的低通滤波后波前,其差别小于0.001 λ/cm,该差别对计算结果的影响可以忽略。 相似文献
66.
ESPI solution for non-contacting MEMS-on-wafer testing 总被引:6,自引:0,他引:6
Petra Aswendt Claus-Dieter Schmidt Dirk Zielke Steffen Schubert 《Optics and Lasers in Engineering》2003,40(5-6):501-515
Rapid progress in the field of micro-electro-mechanical systems (MEMS) makes the development of appropriate measuring and testing means timely. Characterizing the mechanical properties of MEMS structures at a very early stage of manufacturing is a challenging task for quality assurance in this field. The paper describes a new solution that is based upon the vibration analysis of the microparts. The nanometer amplitudes are detected by advanced electronic speckle pattern interferometry (ESPI). A specific signal processing technique has been applied to make the solution robust. Comprehensive numerical simulations provide the theoretical base for the HNDT concept. A laboratory system for 4″ wafer has been built, and extensive tests show that such key properties as e.g. the thickness of springs or membranes can be determined exactly. Automated frequency scanning and corresponding digital image processing open the way to reliable and fast industrial systems for MEMS testing on wafer level. 相似文献
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光纤白光干涉法与膜厚纳米测量新技术研究 总被引:3,自引:3,他引:3
运用薄膜光学干涉原理、光纤技术和干涉光谱分析技术,用光纤反射式干涉光谱仪(Reflectromic Interference Spectroscopy)直接测试宽带入射光在单晶硅表面超薄SiO2膜层前后界面反射形成的干涉光谱曲线,并用专业软件对被测光谱信号数据处理后,可直接用公式准确计算出SiO2氧化膜的厚度和光学折射率通过对单晶硅片表面超薄SiO2氧化膜的实测,并与成熟的椭圆偏振仪测试结果相比,测试误差≤2nm但该方法测试简单、快速,精度高,不需要制定仪器曲线和数表,可对薄膜任意位置的厚度在线测试经过对不同厚度聚苯乙烯薄膜的厚度测试表明,该方法适合0.5~20μm薄膜厚度的精确在线测量,测量误差小于7nm. 相似文献
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Health of ancient artworks must be routinely monitored for their adequate preservation. Faults in these artworks may develop over time and must be identified as precisely as possible. The classical acoustic testing techniques, being invasive, risk causing permanent damage during periodic inspections. Infrared thermometry offers a promising solution to map faults in artworks. It involves heating the artwork and recording its thermal response using infrared camera. A novel strategy based on pseudo-random binary excitation principle is used in this work to suppress the risks associated with prolonged heating. The objective of this work is to develop an automatic scheme for detecting faults in the captured images. An efficient scheme based on wavelet based subspace decomposition is developed which favors identification of, the otherwise invisible, weaker faults. Two major problems addressed in this work are the selection of the optimal wavelet basis and the subspace level selection. A novel criterion based on regional mutual information is proposed for the latter. The approach is successfully tested on a laboratory based sample as well as real artworks. A new contrast enhancement metric is developed to demonstrate the quantitative efficiency of the algorithm. The algorithm is successfully deployed for both laboratory based and real artworks. 相似文献