Utilization of TXRF analytical technique in order to improve front-end semiconductor processing

In this paper, we summarize how the introduction of in-line TXRF monitoring provides detailed analytical information on aluminum, titanium and molybdenum contamination levels in order to improve several process steps from front-end processing, minimize product yield loss and make it possible to successfully manufacture multiple products and process geometries in the same fabrication platform.     

多层膜结构色滤光片的原理、制备及应用

多层膜结构色滤光片不仅结构简单适合大规模生产,而且所呈现的颜色纯度高、亮度大、不易褪色,因此在光学显示、彩色印刷、美学装饰以及新型光伏等领域有着潜在的应用价值.本文将总结基于多层膜结构设计的彩色滤光片在近年来的研究进展,包括产生不同颜色的两种典型结构及背后的物理机制,多层膜结构色滤光片的制备方法(包括磁控溅射、电子束蒸...     

Development of a machine integrated strain-based contact force sensor for pad foot soil compactors

An investigation was undertaken to explore the use of measurable pad strains on a non-vibratory pad foot roller to provide real time continuous evidence of compaction and contact force. Individual pads were instrumented with strain gages in a pattern chosen based on pad finite element analysis (FEA). Different pad–soil contact stress distributions were modeled to simulate a range of soil conditions. The FEA revealed that the contact stress distribution has a significant influence on the observed pad strain field, suggesting soil specific interpretation of pad strains in order to determine contact force. Results from uniaxial laboratory testing of pad loading on dry sand verified the FEA, i.e., experimental strains generally matched within 15% of FEA strains. The contact stress distribution was measured using tactile pressure sensors and found to be moderately parabolic. A soil specific empirical calibration factor relating vertical sidewall strains to contact force was determined. Field testing was performed on the dry sand with multiple instrumented pads installed on a Caterpillar CP56 roller. Pad strain magnitudes increased up to 250% during compaction from repeated passes of the roller. Using the empirical calibration factor, the estimated contact force was shown to increase with compaction, represented by the independently-measured soil unit weight.     

利用具有相位跳跃技术的阴影摩尔图测量电子组装元件的热翘曲

Phase-stepping technique is applied to the analysis of fringe patterns of shadow moiré of electronic packages.Sensitivity of the fringe pattern analysis is demonstrated to be significantly increased.Thermally induced warpage of electronic packages is successfully measured in real-time as the sample is driven through a simulated reflow process.The paper discusses the technique of phase stepping,noise filtering and its application to the shadow moiré method.Applications of the technology are presented.     

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提出了一种新的精细时程积分法来求解大型动力系统. 结合Krylov子空间法、培德级数 近似以及一般载荷的维数扩展法,进一步提高精细时程积分法的计算效率. 利用维数扩展法 避免计算微分方程特解,并可处理任意载荷. 对于大型动力系统,通过Krylov子空间的降维 分析将问题转化到一个子空间,计算效率得到极大提高. 对于迭代次数$N$ 的选择作了详细讨论,进一步提高了计算效率.     

二元齐次矩阵Pad-型逼近及误差公式

二元矩阵Pade-型逼近的计算比较复杂.本文受Benouahmane和Cuyt的启发,通过引入一种变量代换,将二元齐次矩阵形式幂级数转化为一元含参数形式的矩阵形式幂级数,并给出了二元齐次矩阵Pade-型逼近的构造性的定义和误差公式的证明.数值实例说明了此方法的有效性.     

基于广义逆矩阵的Bézier曲线近似合并

Bézier曲线近似合并算法在几何数据压缩方面有着重要的应用．研究了两条相邻Bézier曲线近似合并的问题,用矩阵的形式给出了相邻Bézier曲线可精确合并的条件,并在此基础上通过广义逆矩阵的方法求解合并逼近后的Bézier曲线．同时,对保端点插值条件的近似合并也给出了结果．最后用实例说明了算法的有效性,得到了很好的逼近效果．     

向量优化问题有效点集的稳定性

在不需要紧性假设下,利用拟C-凸函数及回收锥的性质,建立了向量优化问题有效点集的稳定性, 获得了一列目标函数和可行集均扰动情形下的向量优化问题与对应的向量优化问题有效点集的Painlevé Kuratowski内收敛性结果．所得结果推广和改进了相关文献(Attouch H, Riahi H. Stability results for Ekeland’s ε-variational principle and cone extremal solution; Huang X X. Stability in vector-valued and set-valued optimization)中的相应结果, 并给出例子说明了所得结果的正确性.     

Limit theorems of continuous-time random walks with tails

We study the functional limits of continuous-time random walks (CTRWs) with tails under certain conditions. We find that the scaled CTRWs with tails converge weakly to an α-stable Lévy process in D([0, 1]) with M ₁-topology but the corresponding scaled CTRWs converge weakly to the same limit in D([0, 1]) with J ₁-topology.     

非线性椭圆边值问题和极大单调算子的零点

本文利用非线性极大单调算子值域的扰动结论,研究一类与广义p-Laplacian算子相关的、具Neumann边值条件的非线性椭圆方程的解的存在唯一性.同时研究这个唯一解与适当定义的非线性极大单调算子的零点之间的关系.进而设计一种迭代算法强收敛到这个唯一解.本文采用新的构造算子和拆分方程的方法,推广和补充了以往的相关研究工作.