芯片铜互连研究及进展

本文详细介绍芯片制造中铜互连技术,综述酸性硫酸铜电镀工艺要点及常用添加剂作用机理,并概述国内外新型添加剂研究进展. 在此基础上,展望新型铜互连工艺替代酸性硫酸电镀铜工艺的可能性.     

Acrylamide concentrations in grilled foodstuffs of Turkish kitchen by high performance liquid chromatography-mass spectrometry

For over ten years, there has been a considerable interest in determination of acrylamide in foodstuffs. It was known that both protein-rich and carbohydrates-rich foods cooked at high-temperatures can cause acrylamide formation. However, carbohydrates-rich foods such as potato chips and biscuit samples have been the common studied foods compared with protein-rich foods such as meat samples.In this study, determination of acrylamide in these two group foods was examined using HPLC-MS. For this purpose, firstly, the parameters that are thought to affect the response in the HPLC-MS analysis were optimized. The optimized conditions were found to be 0.3 ml min^{− 1} for flow rate of mobile phase, 40 µl for injection volume, 5 °C for column temperature and 70 V for fragmentor potential. The optimized method was applied for the determination of acrylamide levels in Turkish foodstuffs including grilled meat and chicken samples, potato chips, coffee and biscuit. The obtained concentrations for all studied foods were in the range of 20–250 µg kg^{− 1}. The results showed that acrylamide concentrations highly varied depending on the kind of food samples.     

基于BioMEMS技术的DNA固相萃取芯片的制备

基于BioMEMS技术,制备一种新型的Si-PDMS-玻璃结构的DNA固相萃取微流控芯片。在硅基片上制备4种固相载体,分析不同载体的性质和制备特点,优选多孔氧化硅作为萃取DNA的固相载体。对比研究芯片的封装工艺,优选压制法制备PDMS-玻璃盖片,采用粘接技术封装芯片。芯片成功提取老鼠全血中的基因组DNA,提取效率为23.5×10-9g/μL全血,并成功进行PCR反应,达到试剂盒水平。固相萃取微流控芯片具有与其他样品处理芯片、PCR芯片和电泳芯片相集成的潜力,可实现对复杂生物样品的检测和分析。     

Recent Development of Advanced Functional Polymers for Semiconductor Encapsulants of Integrated Circuit Chips and High-temperature Photoresist for Electronic Applications

A new polymer system of semiconductor devices was studied in response to the multifunctional systems evolved. A variety of functional polymers have been developed in the manufacture of semiconductor and integrated circuit (IC) packaging devices by R&D of high-temperature polymers. With the increase in integration of electronic devices and the need to reduce overall size, market needs are moving to multilevel metallization. Toray's core polymer technologies for electronic devices in the past 35 years (1961–95) are reviewed. The new technology of IC encapsulants of biphenyl type epoxy compounds is described for the new generation 16 megabits dynamic randon accessory memory (DRAM) electronic memory device, with good heat dissipation characteristics and low stress with an anti-flammability UL V-0 property of halogen-free formulation. As core functions are built into devices, packaging and mount technologies become more important. A new photosensitive high-temperature polymer stable up to 500°C with photosensitivity and high resolution has been developed. The trend toward a high degree of integration in solid-state technology requires the use of new high-temperature photosensitive insulating materials. Toray's "Photoneece" system provides such versatile polyimide pattern-generation techniques, containing a unique photosensitive polyimide precursor which can be spun or coated on the substrate. The main components of polyimide consist of poly(amic acid), a tertiary amine having methacrloyl group and a sensitizer. Through analyses of visible, fluorescence and electron spin resonance (ESR) spectroscopy, and flash photolysis and quantitative analyses, a new reaction mechanism is proposed. By photo-irradiation, the stable ion radical is formed without vinyl radical polymerization. The polymer is excited to form an excited singlet state. An anion radical of pyromellitic diamide moiety in a polymer chain is generated after intersystem crossing to an excited triplet state. The resultant relief of the photosensitive polyimide precursor, after exposure to UV light with a mask, development and cure processing, is transformed into a cyclized aromatic polyimide. The new system has higher photosensitivity and resolution and eliminates three steps in the conventional pattern-making process for integrated circuits, resulting in a significant cost reduction. The characterization of pattern generation, the conversion to polyimide patterns, and the properties of both Photoneece and the patterns are discussed. Initial photoreaction of an ionic-bonded photosensitive polyimide was studied by fluorescence, ESR and flush photolysis. A charge transfer complex between a polyamic acid (polyimide precursor) and an aromatic amine (sensitizer) was formed by UV irradiation from fluorescence measurement. Photo-induced radical was observed by ESR measurement. The photo-induced radical was an anion radical of polyamic acid from flush photolysis. From these results, a new photo-induced charge separation in an ionic bonded photosensitive polyimide film was found. Photo-induced electron transfer from an aromatic amine (sensitizer) to acid part of the polyamic acid occurs. © 1997 John Wiley & Sons, Ltd.     

表面等离子体亚波长光学原理和新颖效应

表面等离子体是沿着导体表面传播的波，当改变金属表面结构时，表面等离子体激元（surface plasmon polaritons，SPPs）的性质、色散关系、激发模式、耦合效应等都将产生重大的变化．通过SPPs与光场之间相互作用，能够实现对光传播的主动操控．表面等离子体光子学（plasmonics）已成为一门新兴的学科，它的原理、新颖效应以及机制的探究，都极大地吸引研究者们的兴趣．SPPs具有广阔的应用前景，例如，应用于制作各种SPPs元器件和回路，制作纳米波导、表面等离子体光子芯片、耦合器、调制器和开关，应用于亚波长光学数据存储、新型光源、突破衍射极限的超分辨成像、SPPs纳米光刻蚀术、以及生物光学（作为传感器和探测器）．文章介绍了表面等离子体光子学原理、新颖效应和物理机制，并简述若干应用。     

集成原子光学:原子芯片

原子光学是当前研究得比较热的学科，由于原子激光冷却技术和纳米技术的成熟，原子光学朝着微型化和集成化的方向发展．文章主要介绍了当前集成原子光学的一个焦点——原子芯片及其最新实验进展：包括不同形式的原子导引方式，当前原子芯片的实验工作，原子芯片在玻色—爱因斯坦凝聚(BEC)研究中的应用，以及原子芯片在其他方面的应用前景．     

高聚物微流控芯片镍阳模的简易加工技术

提出了一种简便快速制作高聚物微流控芯片镍阳模的新方法。采用抛光镍片作为电铸基底,涂覆SU-8光胶层后,光刻得到SU-8微结构。以镍基片作为阳极,用16～30A/dm2的电流密度电解刻蚀5min,清除SU-8微结构间隙底部镍片表面的氧化物,并刻蚀得到10～20μm深的凹坑,有效地提高了随后电沉积镍结构和基底镍片间结合力。利用SU-8微结构作为电铸模板,以镍基片作为阴极,电铸5h后制得了微结构倾角为83°深宽比较大的镍阳模。实现了在普通化学实验室中长寿命镍阳模的制作。用热压法制得500多片聚甲基丙烯酸甲酯(PMMA)聚合物芯片,并成功用于DNA片段的分离。     

基于微流控芯片的乳腺癌细胞微环境酸化检测

建立了基于微流控芯片的乳腺癌微环境酸化模型和动态检测微环境酸化情况的分析方法。设计了一种多层复合式微流控芯片,将乳腺癌细胞悬液引入含有水凝胶前体的芯片培养室后,在硝酸纤维素薄膜上固化形成3D培养支架。芯片通道连续灌流模拟血流供应,并将非电化学的pH检测器引入芯片,通过图像分析得到实时的pH变化。通过观察癌细胞的存活率、增殖率、乳酸水平及pH值,分析微环境的酸化情况,同时与正常细胞进行比较。结果表明,连续灌流培养7 d,乳腺癌细胞的存活率保持在90%以上;随着培养天数的增加,芯片上癌细胞微环境的pH值逐渐降低,且灌流速度越低,pH值下降越明显,而正常细胞微环境的pH值无明显变化。基于微流控芯片的微环境酸化检测平台可实时动态检测微环境的pH值,有望成为相关肿瘤研究的有力工具。     

微流控芯片细胞实验室

以作者所在课题组近年开展的研究工作为基础,阐述了微流控芯片细胞实验室的平台特征,并从细胞个体、群体和多细胞生命体研究等三个方面概述微流控芯片细胞实验室的应用对象特征,显示其在生物医学领域的应用前景。