原子力显微镜加工红外微透镜阵列的研究

提出了利用原子力显微镜灰阶阳极氧化方法加工Si、Ge、GaAs等晶体材料为基础的红外微透镜阵列.加工了3×3的红外硅微透镜阵列,微透镜的高度和表面直径重复性误差分别为0.2nm和6.0 nm,微透镜的平均曲率半径为510.8 nm.分析了原子力显微镜加工红外微透镜产生面型结构误差的原因,并提出了减小面型结构误差的方法.利用此种方法加工的折射、衍射和混合红外微透镜阵列可以进一步缩小红外成像系统的尺寸.     

基于微透镜阵列的实时三维物体识别

提出一种基于微透镜阵列多视角成像特点,将三维物体的深度信息转化为二维透射像阵列的角度信息,利用光学二维图像识别技术,实现对三维物体识别的方法.对识别过程进行了理论分析和计算,用匹配滤波的方法实现了对三维物体骰子的实时识别.实验结果表明,本方法的相关识别能力较高,并且具有很强的灵活性,对于有微小旋转、微小平移的三维物体也可进行识别.     

Microlenses focal length measurement using Z-scan and parallel moiré deflectometry

In this paper, a simple and accurate method based on Z-scan and parallel moiré deflectometry for measuring the focal length of microlenses is reported. A laser beam is focused by one lens and is re-collimated by another lens, and then strikes a parallel moiré deflectometer. In the presence of a microlens near the focal point of the first lens, the radius of curvature of the beam is changed; the parallel moiré fringes are formed only due to the beam divergence or convergence. The focal length of the microlens is obtained from the moiré fringe period graph without the need to know the position of the principal planes. This method is simple, more reliable, and completely automated. The implementation of the method is straightforward. Since a focused laser beam and Z-scan in free space are used, it can be employed for determining small focal lengths of small size microlenses without serious limitation on their size.     

Monolithic integration technology between microlens arrays and infrared charge coupled devices

In this paper, we develop an integration technology between Si microlens and 256(H)×256(V) element PtSi Schottky-barrier infrared charge coupled device (IR-CCD) to improve the optical responsivity of CCD sensor. The refractive microlenses with the pixel size of approximately 28×28 μm² is directly fabricated on the backside of CCD substrate to focus the incident irradiation onto the active area. For the integration device the fill factor is improved by a factor of 2.1. As a result, the IR-CCD image sensors operating at 77 K indicate an approximate 0.06–0.4 increase in relative optical responsivity in the spectral range of from 1 to 5 μm. CCD imaging quality with microlens has been improved comparing to that without microlens to a great extent.     

Excimer laser micromachining of aspheric microlenses with precise surface profile control and optimal focusing capability

This paper demonstrates the unique and exceptional capability of excimer laser micromachining in fabricating aspheric microlenses with precise surface profile control. A newly developed laser scanning method is introduced for machining refractive types of microlenses, which have pre-designed surface profiles aiming at minimizing the optical focal spot sizes. The machining accuracy and machined surface roughness are examined experimentally, and very good results are obtained. Optical testing on the fabricated aspheric microlenses shows significant improvement in focusing capability and the focal spot sizes are approaching optical diffraction limits. The proposed excimer laser micromachining method is flexible, versatile, and accurate, hence can be very useful and powerful in machining 3D microstructures of complex profiles and demanding profile accuracy.     

Model analysis of effect of diffraction focus characteristics of microlens arrays on parallel laser direct writing quality

In order to study the effect of diffraction focusing characteristics of microlens arrays on the parallel laser direct writing quality, we use nonparaxial approximation to analyze the diffraction focus characteristic of a single microlens, take into consideration the cross-talk effect of a number of microlenses on the diffraction focusing characteristics of an array, and establish a theoretical focusing intensity model of a microlens array to describe the influence of a change in F-number and/or center distance on the diffraction focusing characteristics of a parallel laser direct writing system while incident writing laser is normal. Numerical simulation results indicate that there is a cross-talk effect among microlenses which increases as the F-number increases when the center distance is the same as the smaller aperture, and parallel writing quality can be improved by reducing or totally eliminating the cross-talk effect by reducing F-number and/or increasing center distance.     

Photoresist reflow method of microlens production Part I: Background and experiments

We present a two part study of melted microlens arrays. This first part concentrates on the production and measurement of microlens arrays while the second part examines attempts to model the microlens profiles. In this paper we first review some of the fabrication techniques used over the past twenty years to produce lens arrays. Some applications of microlens arrays are then discussed. Particular emphasis is placed on the photoresist reflow method of microlens production that was suggested by Popovic et al., as this was the method used to produce the microlens examined in this study. Lenses produced using this method can have large deviations from the spherical case, i.e. the profile that would be expected from a simple minimisation of the surface energy. These deviations have not been explained to date in the literature, however a number of possible causes for this deviation are given in this paper.Therefore the fundamental questions we wish to explore here are: (1) Why physically do dips occur? and (2) Can the resulting surface profile be predicted? Any model developed to quantitatively estimate the optical effects of surface shape will depend on the physical assumptions made regarding the surface formation mechanism. However as we shall indicate at this point only an informed guess regarding the relative importance of a number of possible mechanisms can be made.     

用于集成成像3D显示的曲面微透镜阵列设计与仿真

针对集成成像3D显示观看视场范围小的问题和微透镜之间间隙的杂散光干扰导致的显示质量下降问题,提出了适合柔性显示及曲面显示器的曲面针孔/微透镜阵列结构.采用TracePro光学仿真软件对基于曲面针孔/微透镜阵列的集成成像3D显示的记录和重构过程进行仿真,结果显示:在记录和重构阶段,曲面针孔/微透镜阵列可以有效地减少透镜阵列之间杂散光引起的图像质量变差的问题;当记录和重构阶段均用曲面/针孔微透镜阵列时,记录三维物体的视角大,获得重构图像的视场角也相对较高.采用旋转接收屏法获取不同观看视角下的图像质量,当曲面针孔/微透镜阵列的曲面度数为30°时,重构图像质量最好.     

聚合物梯度折射率微球透镜的研制

选取高分子单体组合,用悬浮扩散共聚法研制具有球对称梯度折射率(Gradient Refractive Index,GRIN)的微型聚合物球透镜.用剪切干涉法测定微透镜试样的折射率剖面,根据分布曲线的特征调整、优化制备工艺条件,成功获得直径0.3～1.4 mm、透明、在半径的全程范围具有球对称折射率梯度,折射率差ΔN为0.006～0.014的微型聚合物球透镜.     

Light collection enhancement of the digital x-ray detector using Gd2O2S:Tb and CsI:Tl phosphors in the aspect of nano-scale light dispersions

The nano-scopic light collection is investigated for the Active Matrix Flat-Panel Imagers (AMFPIs). The simulations using two kinds of screens are shown for light collection of x-rays. Enhancement of the light collection is accomplished by the microlens system incorporated with x-ray detector. For digital radiographic and mammographic applications, indirect detection imagers use Gd₂O₂S:Tb or CsI:Tl scintillation screens to convert the x-ray into visible photons. The light collection efficiencies for Gd₂O₂S and CsI are obtained. In Gd₂O₂S, the 27 kVp and 82 μm are the highest light collection cases in both Lambertian and Isotropic geometries. In CsI, 20 keV and 150 μm case have the highest light collection efficiency. So, x-ray energy and scintillator thicknesses are considered as the optimized light collection. The optimum thickness and x-ray energy combination are used for the detector of this study. In this paper, it is concluded that the screens between 17 kVp and 25 kVp have higher light collections, which could be considered as the clinical purposes if it is necessary. This energy range is compared with other energy cases, which are examined in the study.