光刻机投影物镜的像差原位检测新技术

提出了一种新的光刻机投影物镜像差原位检测(AMF)技术。详细分析了该技术利用特殊测试标记检测投影物镜球差、像散、彗差的基本原理,论述了该技术利用对准位置坐标计算像差引起的成像位置偏移量的方法。实验结果表明AMF技术可实现球差、彗差、像散等像差参量的精确测量。AMF技术考虑了光刻胶等工艺因素对像差引起的成像位置偏移量的影响,有效避免了目前基于硅片曝光方式的彗差原位检测技术对离焦量、像面倾斜等像质参量限制的依赖。     

薄壁件加工系统动态响应分析

薄壁件在铣削加工中容易产生共振或变形,直接影响加工稳定性及加工精度。采用主轴-刀具-工件整体铣削系统连续梁模型,系统研究在动态铣削力作用下,刀具端部与工件端部的动态响应之间的相互影响关系以及对整体系统动态响应影响较大的薄壁件尺寸。结果表明,工件横截面高度对系统共振的影响较为明显,当高度尺寸较小时,工件的低频共振会通过动态铣削力直接反映到刀具端部的振动频响上。工件横截面底边宽度尺寸的增大虽然对共振频率的改变不太明显,但会导致激发出来的刀具共振幅度出现明显降低。研究成果可以为薄壁件铣削加工系统的稳定性控制提供理论基础。     

聚晶立方氮化硼刀具切削高锰钢的磨损机制

在半精加工试验条件(切削深度ap=0．5mm，进给量f=0．3mm／r，干切)下研究了聚晶立方氮化硼刀具切削奥氏体高锰钢时的磨损机制，用WDH-Ⅱ型光电温度计测量了切削温度，用工具显微镜测量后刀面磨损量，进而考察了切削时间和切削速度对后刀面磨损量的影响，采用S-250MK型扫描电子显微镜观察刀具前、后刀面的磨损形貌和组成变化．结果表明：当切削温度为400～750℃时，聚晶立方氮化硼刀具同高锰钢中的γ相及其析出相(Fe，Mn)3C之间产生严重的机械磨损；当切削温度超过800℃时，聚晶立方氮化硼刀具同高锰钢单一γ相之间产生扩散磨损；聚晶立方氮化硼刀具适合于高速切削.     

方位远探测声波测井仪数据采集控制软件设计*

方位远探测声波测井技术在近年来得到了快速发展,数据采集控制软件是测井仪器系统的重要功能模块,其主要功能是完成地面采集控制平台与井下仪器的实时命令控制与数据传输。方位远探测声波测井仪数据采集控制软件模块以仪器库的形式挂接到成像测井系统,软件主要由仪器初始化、数据采集、数据分析及处理、仪器参数设置、下发命令封装、文件操作、实时波形绘图显示、实时波形处理、数据回放、帮助系统等部分组成。在程序设计中采用了多线程编程技术,提高与测井主控平台进行交互的时效性以及程序的响应速度。实验室及现场测试表明,方位远探测声波测井仪数据采集控制软件的总体及各个功能模块运行稳定,能够完成现场应用过程中对仪器的控制、数据读取、数据分析及处理、文件记录以及与现场测井采集控制平台的数据接口等需求,为仪器的进一步功能优化升级和现场应用提供了基础。     

Unveiling the binding interaction of zinc (II) complexes of homologous Schiff-base ligands on the surface of BSA protein: A combined experimental and theoretical approach

Four new zinc (II) complexes [Zn (HL¹H)Br₂] (1), [Zn (HL¹H)Cl₂] (2), [Zn₂(HL²)Br₃] (3), and [Zn (HL²)Cl] (4) have been synthesized by adopting template synthetic strategy and utilizing two homologous Schiff base ligands (H₂L¹ = 4-bromo-2-{[2-(2-hydroxyethylamino)-ethylimino]-methyl}-6-methoxyphenol, H₂L² = 4-bromo-2-{[3-(2-hydroxyethylamino)propylimino]methyl}-6-methoxyphenol), differing in one -CH₂- unit in the ligating backbone, by adopting template synthetic strategy. All the complexes have been characterized by single crystal X-ray diffraction analysis as well as by other routine physicochemical techniques. Ligand mediated structural variations have been observed and rationalized by density functional theoretical (DFT) calculations. Interaction of the complexes 1–4 with Bovine Serum Albumin protein (BSA) has been studied by different spectroscopic techniques. A complete thermodynamic profile (ΔH^o, ΔS^o and ΔG^o) was evaluated initially from the change in absorption and fluorescence spectra upon addition of BSA to the complexes. Appreciable binding constant values in the range ~ 0.94–4.51 × 10⁴ M⁻¹ indicate efficient binding tendency of the complexes to BSA with the sequence 1 ≅ 2 > 3 ≅ 4. Circular dichroism (CD), isothermal calorimetric titration experiments, molecular docking and molecular dynamics have been performed to gain deep insight into the binding regions of complex 1 to BSA. Experimental evidences suggest an interaction of zinc complexes at the surface of BSA protein and this particular binding has been exploited to determine unknown concentration of BSA protein. For this purpose complex 1 was explored as a BSA protein quantification tool.     

折衍二元光学用金刚石车刀设计

栏光效应是影响折衍元件衍射效率的一个重要因素,栏光效应与加工刀具有着密切的关系。分析刀具圆弧半径与栏光效应的联系、刀具参数与元件加工后的表面粗糙度的关系以及刀具耐用度等要求,设计了加工折衍二元光学元件的金刚石刀具,给出刀具加工里程数计算公式和车削实验结果。实验结果证明:设计的金刚石刀具能够满足折衍二元光学元件的产业化加工要求,刀具耐用度较强化前提高2倍多。     

Curriculum, Classroom Practices, and Tool Design in the Learning of Functions Through Technology-Aided Experimental Approaches

The paper starts from classroom situations about the study of a functional relationship with help of technological tools as a ‘transposition’ of experimental approaches from research mathematical practices. It considers the limitation of this transposition in existing curricula and practices based on the use of non-symbolic software like dynamic geometry and spreadsheets. The paper focuses then on the potentialities of classroom use of computer algebra packages that could help to go beyond this shortcoming. It looks at a contradiction: while symbolic calculation is a basic tool for mathematicians, curricula and teachers are very cautious regarding their use by students. The rest of the paper considers the design and experiment of a computer environment Casyopée as means to contribute to an evolution of curricula and classroom practices to achieve the transposition in the domain of algebraic activities linked to functions.     

Dynamic Modeling of the Feed Drive System of a CNC Metal Cutting Machine

Studying the vibrational behavior of feed drive systems is important for enhancing the structural performance of computer numerical control (CNC) machines. The preload on the screw and nut position have a great influence on the vibration characteristics of the feed drive as two very important operational conditions. Rotational acceleration of the screw also affects the performance of the CNC feed drive when machining small parts. This paper investigates the influence of preload and nut position on the vibration characteristics of the feed drive system of a CNC metal cutting machine in order to be able to eliminate an observed resonance occurred at high rotational speeds of the screw, corresponding to high feed rates. Additionally, rational structural parameters of the feed drive system are selected in order to increase the rotational acceleration for improving the performance of the CNC machine. Experiments and analyses showed that by selecting specific parameters of feed drive system and simultaneously applying a certain value of preload, a 97% increase in rotational acceleration and 30% time reduction considering the vibration resistance at high rotational speeds can be achieved.     

中阶梯光栅刻划刀具抗磨损设计

采用DEFORM有限元分析软件模拟中阶梯光栅刻划刀具在光栅刻划过程中的应力分布,并结合金刚石晶体解理特征设计了抗磨损刀具刃口取向。当光栅刻划刀具刃尖点受最大摩擦力方向平行于金刚石晶体周期键连（PBC）方向,且刀具Z向载荷垂直于（111）晶面时,定向面与（111）晶面夹角为27°,非定向面与（111）晶面夹角为63°;光栅刻划刀具在72 g负载条件下,刻程超过17 km时,刀具刃口无崩口等缺陷。采用该方法设计的光栅刻划刀具使用寿命大大超出了传统刀具的使用寿命（刻程约0.8 km）,证明了中阶梯光栅刻划刀具抗磨损设计方法的合理性和有效性。     

亚千赫兹精度的腔增强分子饱和吸收光谱

饱和吸收光谱法常被用于原子和分子跃迁的亚多普勒测量。光学谐振腔除了可增强有效吸收光程,还能够增加腔内的激光功率来饱和非常弱的分子振转跃迁.本文利用精细度达120000的谐振腔,通过腔增强光谱、腔衰荡光谱、噪声免疫腔增强光外差分子光谱这三种不同的腔增强方法,测量1.4μm处的C_2H_2分子兰姆凹陷.采用不同的腔增强方法确定吸收谱线中心,均给出了亚千赫兹的统计不确定度.并分析比较了不同方法的灵敏度和精度,噪声免疫腔增强光外差分子光谱是最灵敏的方法,但如果期望利用它实现亚千赫兹精度的计量应用,还需要对该方法中的系统误差进行更多的研究.