不同工艺参数及喷淋板结构下PECVD热流场分析

建立了PECVD腔室的连续流体和传热模型,通过仿真实验来分析工艺参数和喷淋板结构对PECVD腔室热流场的影响.在典型工艺的基础上,根据单变量原则设计不同的仿真实验来研究工艺参数对晶圆片上方流速、压力及温度分布的影响,结果显示在不同的工艺参数下,流速分布都能够保持线性分布;温度分布波动很小,表现良好的稳定性;压力随径向近似抛物线分布,中心压力高边缘压力低.另外本文设计了两组仿真实验,研究喷淋板不同的流阻分布对热流场的影响,结果显示喷淋板流阻的分布对流速分布有明显的影响,在不同的流阻分布下,加热盘边缘处的流速保持不变,但是流速分布存在一个拐点,拐点前和拐点后流速都近似于直线分布;结果说明能够通过改变喷淋板流阻的分布来调控晶圆上方流速的分布从而获得更高的薄膜工艺均匀性.     

Influence of container material on the heat transfer characteristics of nanofluids

The average and local thermal conductivity measurements of water-based Ag-nanofluid held in polypropylene and metallic containers using transient hot-wire method revealed a new phenomenon. The local thermal conductivity of water-based Ag nanofluid measured at different locations of containers was found to depend strongly upon the metallic container, but not on the polypropylene container. Similar observations have been found in water-based NiAl nanofluid, but not in water-based Al₂O₃ nanofluid. In contrast, this phenomenon was not observed for ethylene glycol-based Ag nanofluid, possibly due to the insignificant charge on the container wall, which partly explains the diversity in thermal conductivity by different researchers.     

Experimental and numerical study of the effect of conjugate heat transfer on film cooling

Combined convection heat transfer and thermal conduction for film cooling of a flat plate with 45° ribs on one wall was investigated experimentally and numerically. The flat plate surface temperature was measured using thermochromic liquid crystals. The results show that the film cooling is the main mechanism for the local cooling with a very low thermal conductivity while the convection heat transfer of the coolant in the coolant channel is the dominant heat transfer mechanism for the high thermal conductivity plate, with both film cooling and convection heat transfer by the coolant being important with medium thermal conductivity walls.     

Carbon nanotube-epoxy composites: The role of acid treatment in thermal and electrical conductivity

Wet acid oxidation treatment methods have been widely reported as an effective method to purify and oxidize the surface of industrial multi-walled carbon nanotubes. This work examines the use of a concentrated HNO₃/H₂SO₄ mixture in an attempt to optimize the purification procedure of industrial multi-walled carbon nanotubes with diameter distribution statistics. It is shown that acid treatments of several hours are enough to purify the nanotubes. The electrical and thermal conductivities of epoxy composites containing 0.05–0.25 wt% of an acid-treated multi-walled carbon nanotube have been studied. The electrical conductivity of the composites decreases by more than three orders, whereas the thermal conductivity of the same specimen increases very modestly as a function of the filler content.     

Experimental and numerical investigation on the exergy and entransy performance of a novel plate heat exchanger

There has been increased attention on various types of plate heat exchangers because of their high efficiency and compactness. This article presents an investigation of heat transfer and fluid flow performance of a novel plate heat exchanger based on numeric studies and experimental tests. Parameters of the novel plate heat exchanger are analyzed and discussed. The thermo-hydraulic transfer performance of different plate heat exchangers is comprehensively analyzed using the exergy and entransy principle. The results indicate that the novel plate heat exchanger has better thermo-hydraulic transfer performance than the smooth plate heat exchanger. The result of this study provides a paradigm for the optimal design of plate heat exchangers.     

Preparation,characterization, and performance study of beeswax/expanded graphite composite as thermal storage material

In this study, beeswax as a new energy storage material and its composite with expanded graphite were prepared and characterized for their surface and thermal properties. Surface characterization showed no chemical interaction between beeswax and expanded graphite. The thermal conductivity of the composite was improved with 117% enhancement. The thermal performance of beeswax and its composite as a heat storage material was studied in a rectangular shell-and-tube thermal storage unit. The melting point of the composite remained almost same as that of beeswax; however, the melting time was reduced considerably, from 540 to 360 min with inlet water at 80°C and a 2-lpm flow rate.     

Effect of heat treatment on the mechanical and microstructural characterization of Mg-AZ91E/TiC composites

Mg-AZ91E/TiC_p composite was fabricated using a spontaneous infiltration technique at 950 °C under an argon atmosphere. The composites produced have 37 vol.% of metal matrix and 63 vol.% of TiC-like reinforcement. The obtained composites were subsequently solution heat-treated at 413 °C during 24 h, cold water quenched, and subsequently artificially aged at 168 and 216 °C during 16 h in an argon atmosphere. Effect of heat treatment on the microstructure and mechanical properties was evaluated. Microstructural characterization was analyzed using different techniques such as X-ray diffraction (XRD) and scanning electron microscopy (SEM). Interface between matrix and reinforcement was examined using transmission electron microscopy (TEM), and mechanical properties were evaluated by measuring the elastic modulus and hardness. Mg, TiC, Al, and Mg₁₇Al₁₂ phases through XRD were detected. Meanwhile, using TEM analysis in heat-treated composites MgAl₂O₄, MgO, and Al₂O₃ were identified. The as-fabricated composite have elastic modulus and hardness of 162 GPa and 316 Hv, respectively. After solution heat treatment and aging at 168 °C during 12 h, the composites reaches values of 178 GPa and 362 Hv for the elastic modulus and hardness, respectively. Time of aging was correlated with measures of elastic modulus and hardness.     

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采用了TIG对核聚变用316LN奥氏体不锈钢进行焊接,并对焊接接头进行了焊后热处理,利用光学显微镜、扫描电镜分析手段研究了焊后热处理对焊接接头微观组织和力学性能的变化.试验结果表明,焊缝中为奥氏体组织,并未发现第二相析出物存在.焊后热处理对接头的拉伸性能影响不大,均断裂在母材位置,但显著提高了接头的延伸率.接头低温冲击试验也展现了良好的抗低温冲击性能.断口分析发现,接头呈韧性断裂.     

Combined effect of ultrasound,heat, and pressure on Escherichia coli O157:H7, polyphenol oxidase activity,and anthocyanins in blueberry (Vaccinium corymbosum) juice

The objective of this study was to evaluate the effect of different treatments—heat treatment (HT), sonication (SC), thermosonication (TS), manosonication (MS), manothermal (MT), and manothermosonication (MTS) on Escherichia coli O157:H7, polyphenol oxidase (PPO), and anthocyanin content in blueberry juice. First, samples were treated at different temperatures (30, 40, 50, 60, 70, and 80 °C) and power intensities (280, 420, 560, and 700 W) for 10 min. Subsequently, samples were treated using combinations of power intensity and mild temperature for 10 min. For further study, samples were treated using HT (80 °C), TS (40 °C, 560 W), MT (350 MPa, 40 °C), MS (560 W, 5 min/350 MPa), or MTS (560 W, 5 min, 40 °C/350 MPa, 40 °C) for 5, 10, 15, 20 min for each treatment, and the results compared between treatments. HT significantly reduced PPO activation (2.05% residual activity after only 5 min), and resulted in a 2.00-log reduction in E. coli O157:H7 and an 85.25% retention of anthocyanin. Escherichia coli O157:H7 was slightly inactivated by TS after 5 min (0.17-log reduction), while residual PPO activity was 23.36% and anthocyanin retention was 98.48%. However, Escherichia coli O157:H7 was rapidly inactivated by MTS (5.85-log reduction) after 5 min, while anthocyanin retention was 97.49% and residual PPO activity dropped to 10.91%. The destruction of E. coli cells as a result of these treatments were confirmed using SEM and TEM. Therefore, a combination of sonication, high pressure, and mild heat allows the safety of blueberry juice to be maintained without compromising the retention of desirable antioxidant compounds.