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41.
建立一个描述低能电子在多元多层介质中散射的物理模型,运用MonteCarlo方法模拟低能电子在靶体胶衬底中的复杂散射过程,在此基础上通过大量计算研究入射束能、胶层厚度、衬底材料等不同曝光条件对抗蚀剂沉积能密度分布的影响,获得沉积能分布规律:适量的低束能、薄胶层、低原子序数衬底可以使前散射电子对胶中沉积能密度分布的贡献增大、背散射电子的贡献减小,从而提高曝光分辨率.
关键词:
电子束曝光
MonteCarlo方法
低能电子散射
能量沉积 相似文献
42.
S. P. Popov 《Computational Mathematics and Mathematical Physics》2006,46(6):983-994
Numerical solutions to three systems of integrable evolutionary equations from the Toda lattice hierarchy are analyzed. These are the classical Toda lattice, the second local dispersive flow, and the second extended dispersive flow. Special attention is given to the properties of soliton solutions. For the equations of the second local flow, two types of solitons interacting in a special manner are found. Solutions corresponding to various initial data are qualitatively outlined. 相似文献
43.
关于PFI-代数与剩余格 总被引:10,自引:0,他引:10
本文提出了一种强FI代数-PFI代数,并且深入研究了它的性质,借此进一步揭示了FI-代数和剩余格之间更加密切的联系,进而以FI-代数为基本框架建立了R0-代数、正则剩余格等逻辑系统的结构特征(包括对隅结构)及其相互关系.这种以FI-代数为基础来统一处理剩余格和R0-代数的方法,同样适合于格蕴涵代数和MV代数等代数结构,而且从中更能清楚地看出它们之间的密切联系,也将有助于对相应形式逻辑系统与模糊推理的研究. 相似文献
44.
E. Mathieu Y. Foucher P. Dellamonica J. P. Daures 《Methodology and Computing in Applied Probability》2007,9(3):389-397
In AIDS control, physicians have a growing need to use pragmatically useful and interpretable tools in their daily medical
taking care of patients. Semi-Markov process seems to be well adapted to model the evolution of HIV-1 infected patients. In
this study, we introduce and define a non homogeneous semi-Markov (NHSM) model in continuous time. Then the problem of finding
the equations that describe the biological evolution of patient is studied and the interval transition probabilities are computed.
A parametric approach is used and the maximum likelihood estimators of the process are given. A Monte Carlo algorithm is presented
for realizing non homogeneous semi-Markov trajectories. As results, interval transition probabilities are computed for distinct
times and follow-up has an impact on the evolution of patients.
相似文献
45.
Bubble pressure points of ethanol–1,1,1,2,3,3,3-heptafluoropropane (HFC-227ea refrigerant) mixtures from the third Industrial Fluid Properties Simulation Challenge are computed using publicly available molecular simulation software. Several published force fields are compared against the known answers provided in the contest guidelines and the best force fields are used to make predictions for the unknown results. 相似文献
46.
Let SB(X,Y) be the set of the bounded sublinear operators from a Banach space X into a Banach lattice Y. Consider π2(X,Y) the set of 2-summing sublinear operators. We study in this paper a variation of Grothendieck's theorem in the sublinear operators case. We prove under some conditions that every operator in SB(C(K),H) is in π2(C(K),H) for any compact K and any Hilbert H. In the noncommutative case the problem is still open. 相似文献
47.
48.
Gábor Házi 《Central European Journal of Physics》2003,1(3):453-462
A general class of analytical solutions of the lattice Boltzmann equation is derived for two-dimensional, steady-state unidirectional
flows. A subset of the solutions that verifies the corresponding Navier-Stokes equations is given. It is pointed out that
this class includes, e.g., the Couette and the Poiseuille flow but not, e.g., the basic Kolmogorov flow. For steady-state
non-unidirectional flows, first and second order solutions of the lattice Boltzmann equation are derived. Practical consequences of the analysis
are mentioned. Differences between the technique applied here and those used in some earlier works are emphasized. 相似文献
49.
Marco Pretti 《Journal of statistical physics》2003,111(3-4):993-1015
In this article we deal with the variational approach to cactus trees (Husimi trees) and the more common recursive approach, that are in principle equivalent for finite systems. We discuss in detail the conditions under which the two methods are equivalent also in the analysis of infinite (self-similar) cactus trees, usually investigated to the purpose of approximating ordinary lattice systems. Such issue is hardly ever considered in the literature. We show (on significant test models) that the phase diagram and the thermodynamic quantities computed by the variational method, when they deviates from the exact bulk properties of the cactus system, generally provide a better approximation to the behavior of a corresponding ordinary system. Generalizing a property proved by Kikuchi, we also show that the numerical algorithm usually employed to perform the free energy minimization in the variational approach is always convergent. 相似文献
50.
In this paper a new definition of a lattice valued intuitionistic fuzzy set (LIFS) is introduced, in an attempt to overcome
the disadvantages of earlier definitions. Some properties of this kind of fuzzy sets and their basic operations are given.
The theorem of synthesis is proved: For every two families of subsets of a set satisfying certain conditions, there is an
lattice valued intuitionistic fuzzy set for which these are families of level sets.
The research supported by Serbian Ministry of Science and Technology, Grant No. 1227. 相似文献