芯片制造中的化学镀技术研究进展

芯片制造中大量使用物理气相沉积、化学气相沉积、电镀、热压键合等技术来实现芯片导电互连. 与这些技术相比, 化学镀因具有均镀保形能力强、工艺条件温和、设备成本低、操作简单等优点, 被人们期望应用于芯片制造中, 从而在近年来得到大量的研究. 本综述首先简介了芯片制造中导电互连包括芯片内互连、芯片3D封装硅通孔(TSV)、重布线层、凸点、键合、封装载板孔金属化等制程中传统制造技术与化学镀技术的对比, 说明了化学镀用于芯片制造中的优势; 然后总结了芯片化学镀的原理与种类、接枝与活化前处理方法和关键材料; 并详细介绍了芯片内互连和TSV互连化学镀阻挡层、种子层、互连孔填充、化学镀凸点、再布线层、封装载板孔互连种子层以及凸点间键合的研究进展; 且讨论了化学镀液组成及作用, 超级化学镀填孔添加剂及机理等. 最后对化学镀技术未来应用于新一代芯片制造中进行了展望.     

X‐ray‐induced Cu deposition and patterning on insulators at room temperature

X‐ray irradiation is shown to trigger the deposition of Cu from solution, at room temperature, on a wide variety of insulating substrates: glass, passivated Si, TiN/Ti/SiO₂/Si and photoresists like PMMA and SU‐8. The process is suitable for patterning and the products can be used as seeds for electroplating of thicker overlayers.     

Flow Synthesis of Plasmonic Gold Nanoshells via a Microreactor

Gold nanoshells with tunable surface plasmon resonances are a promising material for optical and biomedical applications. They are produced through seed‐mediated growth, in which gold nanoparticles (AuNPs) are seeded on the core particle surface followed by growth of the gold seeds into a shell. However, synthetic gold nanoshell production is typically a multistep, time‐consuming batch‐type process, and a simple and scalable process remains a challenge. In the present study, a continuous flow process for the seed‐mediated growth of silica–gold nanoshells is established by exploiting the excellent mixing performance of a microreactor. In the AuNP‐seeding step, the reduction of gold ions in the presence of core particles in the microreactor enables the one‐step flow synthesis of gold‐decorated silica particles through heterogeneous nucleation. Flow shell growth is also realized using the microreactor by selecting an appropriate reducing agent. Because self‐nucleation in the bulk solution phase is suppressed in the microreactor system, no washing is needed after each step, thus enabling the connection of the microreactors for the seeding and shell growth steps into a sequential flow process to synthesize gold nanoshells. The established system is simple and robust, thus making it a promising technology for producing gold nanoshells in an industrial setting.     

Preparation and photoluminescence properties of RE:Na3La9O3(BO3)8 (RE=Er, Yb) crystals

Using Na₂CO₃-H₃BO₃-NaF as fluxes, transparent RE:Na₃La₉O₃(BO₃)₈ (abbr. RE:NLBO, RE=Er, Yb) crystals have been grown by the top seed solution growth (TSSG) method. The X-ray powder diffraction analysis shows that the RE:NLBO crystals have the same structure with NLBO. The element contents were determined by molar to be 0.64% Er³⁺ in Er:NLBO, 2.70% Yb³⁺ in Yb:NLBO, respectively. The polarized absorption spectra of RE:NLBO have been measured at room temperature and show that both Er:NLBO and Yb:NLBO have a strong absorption bands near 980 nm with wide FWHM (Full Wave at Half Maximum) (21 nm for Er:NLBO and 25 nm for Yb:NLBO). Fluorescence spectra have been recorded. Yb:NLBO has the emission peaks at 985 nm, 1028 nm and 1079 nm and the emission peak of Er:NLBO is at 1536 nm. Spectral parameters have been calculated by the Judd-Ofelt theory for Er:NLBO and the reciprocity method for Yb:NLBO, respectively. The calculated values show that Er:NLBO is a candidate of 1.55 μm laser crystals and Yb:NLBO is a candidate for self-frequency doubling crystal.     

A block GMRES method with deflated restarting for solving linear systems with multiple shifts and multiple right‐hand sides

The restarted block generalized minimum residual method (BGMRES) with deflated restarting (BGMRES‐DR) was proposed by Morgan to dump the negative effect of small eigenvalues from the convergence of the BGMRES method. More recently, Wu et al. introduced the shifted BGMRES method (BGMRES‐Sh) for solving the sequence of linear systems with multiple shifts and multiple right‐hand sides. In this paper, a new shifted block Krylov subspace algorithm that combines the characteristics of both the BGMRES‐DR and the BGMRES‐Sh methods is proposed. Moreover, our method is enhanced with a seed selection strategy to handle the case of almost linear dependence of the right‐hand sides. Numerical experiments illustrate the potential of the proposed method to solve efficiently the sequence of linear systems with multiple shifts and multiple right‐hand sides, with and without preconditioner, also against other state‐of‐the‐art solvers.     

Unusual fatty acids in compositae: γ-Linolenic acid in Saussurea spp. seed oils

The plant family Compositae is known to produce a set of unusual fattly acids in their seed oil. Saussurea, a genus of the Compositae is less studied in respect to the fatty acid compsition of their seed oil. Only Saussurea candicans was reported to contain crepenynic acid (33%) as seed oil component. In continuation of our exploration of the portential of wild oil seeds, fatty acids in seed oils of seven Saussurea species (S. amara, S. salicifolia, S. lipschitzii, S. pseudoalpina, S. pricei, S. parviflora, and S. dorogostaiskii) growing in Mongolia a were investigated by means of capillary GLC on capiallary columns of different selectivity (Silar 5 CP and BPX 70). γ-Linolenic acid was found at levels up to 11% of the consitituent fatty acids of Saussurea spp. seed oils. This is the first time that γ-Linolenic acid has been found in members of the plant family Compositae. Moreover, the number, position and configuration of the double bonds in γ-linolenic acid and that of other fatty acids was additionally confirmed by silver ion thin layer chromatography and infrared spectroscopy. The occurence and distribution of γ-linolenic acid, which has found considerable interest for pharmaceutical and dietary use, may be of chemotaxonomical significance in the plant family Compositae.     

Synthesis of amphiphilic particles in the presence of inert solvents and their application to lipase immobilization

To develop monodisperse amphiphilic polymer particles on which a large amount of lipase could be immobilized, we performed seed polymerizations of glycidyl methacrylate and allyl methacrylate in the presence of nonpolar inert and polar inert solvents. The amphiphilic porous polymer particles, which had both hydrophilic guanidino groups and hydrophobic stearoyl groups, were synthesized in the presence of n‐decane and had a large amount of macropores with diameters of 50–1000 nm. The amount of lipase immobilized on the amphiphilic particles synthesized in the presence of n‐decane was 3.85 times that of the lipase immobilized on the amphiphilic particles synthesized in the absence of a solvent. The immobilized lipase prepared with the amphiphilic particles synthesized in the presence of n‐decane exhibited a high transesterification activity in n‐hexane and could be used repeatedly without a considerable activity loss. © 2002 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 40: 874–884, 2002; DOI 10.1002/pola.10178     

Fatty acids of <Emphasis Type="Italic">Stachys milanii</Emphasis> seeds

For the first time the total acid composition of the seeds of Stachys milanii Petrovic, a species endemic to the central and eastern Balkan Peninsula and growing spontaneously at two localities, was examined by GC and GC/MS. The major fatty acid was linoleic or oleic acid. Besides fatty acids that represent the usual seed oil constituents, 6-octadecynoic and 9-oxononanoic acid were identified in considerable amounts. The high content of 6-octadecynoic acid makes S. milanii seed oil a good potential source for the active substance in antifungal preparations. From the chemotaxonomical point of view, small amounts of octadecatrienoic acid detected in the seeds suggested classification of S. milanii as an archaic taxon. Published in Khimiya Prirodnykh Soedinenii, No. 4, pp. 315–317, July–August, 2007.     

Synthesis and characterization of poly (n-butyl acrylate)-poly (methyl methacrylate) latex interpenetrating polymer networks by radiation-induced seeded emulsion polymerization

A series of latex interpenetrating polymer networks (LIPNs) were prepared via a two-stage emulsion polymerization of methyl methacrylate (MMA) or mixture of MMA and n-butyl acrylate (n-BA) on crosslinked poly(n-butyl acrylate)(PBA) seed latex using ⁶⁰Co γ-ray radiation. The particles of resultant latex were produced with diameters between 150 and 250 nm. FTIR spectra identified the formation of crosslinked copolymers of PMMA or P(MMA-co-BA). Dynamic light scattering (DLS) showed that with increasing n-BA concentration in second-stage monomers, the particle size of LIPN increased. Transmission electron microscope(TEM) photographs showed that the morphology of resultant acrylate interpenetrating polymer network (IPN) latex varied from the distinct core-shell structure to homogenous particle structure with the increase of n-BA concentration, and the morphology was mainly controlled by the miscibility between crosslinked PBA seed and second-stage copolymers and polarity of P(MMA-co-BA)copolymers. In addition, differential scanning calorimeter (DSC) measurements indicated the existence of reinforced miscibility between PBA seed and P(MMA-co-BA)copolymer in prepared LIPNs.     

Optimization of seed production for a simultaneous saccharification cofermentation biomass-to-ethanol process using recombinantZymomonas

The five-carbon sugard-xylose is a major component of hemicellulose and accounts for roughly one-third of the carbohydrate content of many lignocellulosic materials. The efficient fermentation of xylose-rich hemicellulose hydrolyzates (prehydrolyzates) represents an opportunity to improve significantly the economics of large-scale fuel ethanol production from lignocellulosic feedstocks. The National Renewable Energy Laboratory (NREL) is currently investigating a simultaneous saccharification and cofermentation (SSCF) process for ethanol production from biomass that uses a dilute-acid pretreatment and a metabolically engineered strain ofZymomonas mobilis that can coferment glucose and xylose. The objective of this study was to establish optimal conditions for cost-effective seed production that are compatible with the SSCF process design. Two-level and three-level full factorial experimental designs were employed to characterize efficiently the growth performance of recombinantZ. mobilis CP4:pZB5 as a function of nutrient level, pH, and acetic acid concentration using a synthetic hardwood hemicellulose hydrolyzate containing 4% (w/v) xylose and 0.8% (w/v) glucose. Fermentations were run batchwise and were pH-controlled at low levels of clarified corn steep liquor (cCSL, 1-2% v/v), which were used as the sole source of nutrients. For the purpose of assessing comparative fermentation performance, seed production was also carried out using a “benchmark” yeast extract-based laboratory medium. Analysis of variance (ANOVA) of experimental results was performed to determine the main effects and possible interactive effects of nutrient (cCSL) level, pH, and acetic acid concentration on the rate of xylose utilization and the extent of cell mass production. Results indicate that the concentration of acetic acid is the most significant limiting factor for the xylose utilization rate and the extent of cell mass production; nutrient level and pH exerted weaker, but statistically significant effects. At pH 6.0, in the absence of acetic acid, the final cell mass concentration was 1.4 g dry cell mass/L (g DCM/L), but decreased to 0.92 and 0.64 g DCM/L in the presence of 0.5 and 1.0% (w/v) acetic acid, respectively. At concentrations of acetic acid of 0.75 (w/v) or lower, fermentation was complete within 1.5 d. In contrast, in the presence of 1.0% (w/v) acetic acid, 25% of the xylose remained after 2 d. At a volumetric supplementation level of 1.5–2.0% (v/v), cCSL proved to be a cost-effective single-source nutritional adjunct that can support growth and fermentation performance at levels comparable to those achieved using the expensive yeast extract-based laboratory reference medium.