轴对称磁场的束流光学及其在ECR离子源中的应用

 带电粒子在轴对称磁场中一边沿着对称轴向前运动,一边绕对称轴旋转。所以横向运动可以分解为两部分：聚焦运动和子午面的旋转。因此,4维横向传输矩阵可以表示为聚焦矩阵和旋转矩阵的乘积。用旋转矩阵和聚焦矩阵重新推导了总的传输矩阵。然后给出了相应的相椭圆系数矩阵来进一步估算从ECR离子源引出束流的发射度.详细地讨论了束流分布函数的二次矩。     

SECRAL超导磁体系统的结构分析

An advanced superconducting ECR ion source named SECRAL has been constructed at Institute of Modern Physics of Chinese Academy of Sciences,whose superconducting magnet assembly consists of three axial solenoid coils and six sextupole coils with a cold iron structure as field booster and clamp.In order to investigate the structure of sextupole coils and to increase the structural reliabilities of the magnet system, global and local structural analysis have been performed in various operation scenarios.Winding pack and support structure design of magnet system,mechanical calculation and stress analysis are given in this paper. From the analysis results,it has been found that the magnet system is safe in the referential operation scenarios and the configuration of the magnet complies with design requirements of the SECRAL.     

Argonne国家实验室ECR离子源在固体材料离子束流产生方面的研究进展

Development work with solid materials at the Argonne National Laboratory ECR ion sources has been focused on two areas-introduction of materials with low vapour pressures,and increasing the beam intensities of heavy beams(i.e.-lead and uranium).An induction oven,with a demonstrated operating temperature extending to 2000℃,has been utilized to produce a Ti-50 beam with an intensity of 5.5eμA (12 ).In addition,a refinement of the sputter technique has been employed which has resulted in a 42% improvement in lead beam intensities.Details of the induction oven as well as the refined sputter technique will be presented.     

Mechanism of dissociative excitation of BrCN in electron cyclotron resonance plasma flow of He

The dissociative excitation reaction of BrCN induced by the products of the electron cyclotron resonance (ECR) plasma flow of He was studied based on the electrostatic-probe measurements and on the optical emission spectra of the B²Σ⁺ − X²Σ⁺ transition of CN radicals. The partial pressures of He and BrCN were 3 and 1 mTorr, respectively, and the partial pressure of H₂O, P_H2O, was in the range of 0.0–0.6 mTorr. The electron density, n_e, showed a negative dependence on P_H2O as (2.63 ± 0.13) × 10¹² − (0.23 ± 0.10) × 10¹² m⁻³, and the electron temperature, T_e, a positive dependence, (2.38 ± 0.36) − (4.51 ± 0.15) eV. The CN(B²Σ⁺ − X²Σ⁺) emission intensity showed a negative dependence on P_H2O. Based on a kinetic analysis of these P_H2O dependencies, the decomposition of BrCN does not proceed via electron impact; instead, decomposition proceeds via the processes involving He⁺ and/or He metastable atoms.     

Understanding hydrogen plasma processes based on the diagnostic results of 2.45 GHz ECRIS at Peking University

Optical emission spectroscopy(OES), as a simple in situ method without disturbing the plasma, has been performed for the plasma diagnosis of a 2.45 GHz permanent magnet electron cyclotron resonance(PMECR) ion source at Peking University(PKU). A spectrum measurement platform has been set up with the quartz-chamber electron cyclotron resonance(ECR) ion source [Patent Number: ZL 201110026605.4] and experiments were carried out recently. The electron temperature and electron density inside the ECR plasma chamber have been measured with the method of line intensity ratio of noble gas. Hydrogen plasma processes inside the discharge chamber are discussed based on the diagnostic results. What is more, the superiority of the method of line intensity ratio of noble gas is indicated with a comparison to line intensity ratio of hydrogen. Details will be presented in this paper.     

离子灵敏探针及其在磁镜装置中的应用

使用离子灵敏探针(ISP)对MM-2U简单磁镜装置中等离子体的离子温度和电子温度进行了测量。描述了这种静电离子探针的工作原理及主要的设计参数。对从探针特性曲线得到的离子温度及密度也予以讨论。     

SECRAL在18GHz频率下产生强流高电荷态离子束的初步结果

A Superconducting ECR ion source with Advanced design in Lanzhou (SECRAL) was successfully built to produce intense beams of highly charged ions for Heavy Ion Research Facility in Lanzhou (HIRFL).The ion source has been optimized to be operated at 28GHz for its maximum performance.The superconducting magnet confinement configuration of the ion source consists of three axial solenoid coils and six sextupole coils with a cold iron structure as field booster and clamping.For 28GHz operation,the magnet assembly can produce peak mirror fields on axis 3.6T at injection,2.2T at extraction and a radial sextupole field of 2.0T at plasma chamber wall.A unique feature of SECRAL is that the three axial solenoid coils are located inside of the sextupole bore in order to reduce the interaction forces between the sextupole coils and the solenoid coils. During the ongoing commissioning phase at 18GHz with a stainless steel chamber,tests with various gases and some metals have been conducted with microwave power less than 3.2kW and it turned out the performance is very promising.Some record ion beam intensities have been produced,for instance,810eμA of O~(7 ),505eμA of Xe~(20 ),306eμA of Xe~(27 ),21eμA of Xe~(34 ),2.4eμA of Xe~(38 ) and so on.To reach better results for highly charged ion beams,further modifications such as an aluminium chamber with better cooling,higher microwave power and a movable extraction system will be done,and also emittance measurements are being prepared.     

电子回旋共振氩等离子体中亚稳态粒子数密度及电子温度的测量

测量了电子回旋共振（ECR）氩等离子体中Ar的1s₅亚稳态粒子数密度，在气压 为02—0 8 Pa、功率为500—700W的范围内，利用吸收光谱法测量了Ar原子8115 nm谱线的吸收强 度，得到1s₅亚稳态粒子数密度为1×10¹⁵—4×10¹⁵ m ^-3.本文综合考 虑基态和1s₅亚稳态粒子的激发对Ar发射谱线强度的贡献后，用两条发射谱线强 度之比得 到电子温度.结果表明，计入了1s₅亚稳态激发的贡献后，所得到的电子温度与 只考虑基态的贡献得到的电子温度相比存在较大的差别. 关键词： 光谱法 亚稳态粒子数密度 电子温度 ECR等离子体源     

氧等离子体刻蚀CVD金刚石膜的影响机理

采用电子回旋共振(ECR)等离子体在不同的磁场位形和工作气压下刻蚀化学气相沉积(CVD)金刚石膜,运用双探针和离子灵敏探针法对等离子体进行了诊断,研究了等离子体参数对刻蚀效果的影响。结果表明:磁场由发散场向收敛场转变时,离子温度、电子温度和等离子体密度都随之增大,刻蚀效果逐渐增强;当工作气压由低气压向高气压变化时,等离子体参数先增大后减小,CVD金刚石膜表面粗糙度降低程度也出现了相同的趋势。     

ECR离子源束流发射度的实验研究

利用最新自行研制的电扫描发射度探测系统, 在ECR离子源上进行了一系列关于ECR离子源引出束流发射度的研究. 这套电扫描发射度探测系统安装在中国科学院近代物理研究所(兰州)的LECR3试验平台的束运线上. 试验中, 通过测量相关参数, 研究了磁场、微波、掺气效应及负偏压效应等对引出束流发射度的影响. 利用实验所得的结果与关于ECR等离子体和离子源束流发射度的半经验理论, 分析推导了离子源各可调参数与ECR等离子体的直接关系, 这为分析探索ECR离子源的工作机制提供了一定的参考依据.