Intertwisted fibrillar diamond-like carbon films prepared by electron cyclotron resonance microwave plasma enhanced chemical vapour deposition

In this paper, the structures, optical and mechanical properties of diamond-like carbon films are studied, which are prepared by a self-fabricated electron cyclotron resonance microwave plasma chemical vapour deposition method at room temperature in the ambient gases of mixed acetylene and nitrogen. The morphology and microstructure of the processed film are characterized by the atomic force microscope image, Raman spectra and middle Fourier transform infrared transmittance spectra, which reveal that there is an intertwisted fibrillar diamond-like structure in the film and the film is mainly composed of sp^3 CH, sp^3 C—C, sp^2 C═C, C═N and C_{60}. The film micro-hardness and bulk modulus are measured by a nano-indenter and the refractive constant and deposition rate are also calculated.     

LBNL14GHz离子源AECR-U的最新进展

A radial sputter probe has been developed for the AECR-U as an additional method of producing metal ion beams.Negative voltage is applied to the probe to incite collisions with target atoms,thereby sputtering material into the plasma.The sputter probe is positioned through one of the 6 radial access slots between the permanent hexapole structure of the AECR-U.The probe position can be varied with respect to the inner edge of the hexapole magnet structure.Charge state distributions and peak beam intensities at bias voltages up to-5kV were obtained for gold samples at varying distances of the probe with respect to the plasma.For high charge states production the radial position with respect to the plasma was more sensitive than for the medium and lower charge states.For high charge state ion production the probe was optimized at a distance of 0.6cm inside the chamber wall(4.1cm from the center of the chamber).Stable beams with peak intensities of up to 28eμA of Au~(24 ) and 1.42eμA of Au~(41 ) have been produced using the sputter probe technique. In addition,a solid state circuit under development by Scientific Solutions,Inc which provides a bandwidth up to 100MHz was used to drive the 14GHz klystron amplifier for the LBNL AECR-U ion source.Various broadband and discrete heating modes were tested and the results for high charge state ion production were compared with single frequency heating.     

丙酮环境下ECR微波等离子体辅助化学气相沉积类金刚石薄膜研究

利用电子回旋共振（ECR）微波等离子体辅助化学气相沉积技术、工作气氛为丙酮，在光学玻璃衬底上得到了光滑、致密、均匀的类金刚石薄膜.在工艺研究中，对等离子体中氧的存在及其作用进行了分析.原子力显微镜分析表明，薄膜的表面粗糙度小于10nm，晶粒 尺寸约为100nm.拉曼光谱和中红吸收谱研究发现，薄膜具有强烈的荧光效应，含有sp1，sp2，sp3杂化C—C，sp3杂化CH3，羰基CO、含氧多元 环以及—COOH基等.利用纳米力学探针以 及近红区红外透射谱分析了薄膜的力学及光学性能，结果表明，薄膜的显微硬度接近4 关键词： 类金刚石薄膜 ECR微波等离子体 丙酮气氛 红外光谱     

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在非对称磁镜场微波ECR等离子体中引入了磁电加热系统,研究了电极环大小、轴向位置以及双环加热对离子温度的影响.结果表明,大小合适的电极环能有效提高离子的加热温度,且最优电极环尺寸主要取决于离子回旋半径.电极环轴向位置的选择主要与磁镜场位形有关,将电极环置于磁镜场中部的弱磁场位置时最有利于离子温度的提高.采用双电极环加热能进一步提高离子温度,并且其加热效果是单环加热的两倍.     

VENUS离子源的最新结果(28GHz)

The nest generation, superconducting ECR ion source VENUS (Versatile ECR ion source for Nuclear Science) has operated with 28GHz since 2004,and has produced world record ion beam intesities. The VENUS project is focused on two main objectives. First, for the 88-Inch Cyclotron,VENUS will serve as the third injector soures boosting both the energy and itensity of beams available form the facility.Seconly,VENUS also serves as the prototype injector source for a high intensity heavy ion beam driver linac for a next generation radioactive ion beam facility, where the goal is to produce intense beams of medium to low charge states ions such as 240eμA of Xe 20 or 250eμA of U28 to 34 . These high intensity ion beam requerements present a challenge for the beam transport system since the total currents extracte from the ECR ion source reach several mA. Therefore in parallel to io beam develoments,we are also enhancing our ion beam diagnostics devices and are conducting an extensive ion beam simulation effort to improve the understanding of the ion beam ransprot form the VENUS ECR ion source. The paper will give an overview of recent experiments with the VENUS ECR ion source. Since the last ECR ion source workshop in Berkeley in 2004.we have installed a new plasma chamber,which includes X-ray shielding.This enables us to operate the source reliably at high power 28GHz operation.With this new chamber several high intensity beams(such as 2.4mA ofO6 ,600eμA of Ar9 ,etc.) have been produced. In addition, we have started the developent of high intensity uranium beams. For example, 200eμA of U33 and U34 have been produced so far. In respect to high charge state ions,leμA of Ar18 ,133eμA of Ar16 ,and 4.9eμA of U47 have been measured. In addition,ion beam profile meaurements are presented with ,and without the sextupole magnetic field energized. These expeerimental results are being compared with simulations using the WARP code.     

LAPECR2离子源在320kV高压平台上的试运行

The high charge state all permanent Electron Cyclotron Resonance Ion Source(ECRIS)LAPECR2 (Lanzhou All Permanent magnet ECR ion source No.2)has been successfully put on the 320kV HV platform at IMP and also has been connected with the successive LEBT system.This source is the largest and heaviest all permanent magnet ECRIS in the world.The maximum mirror field is 1.28T(without iron plug)and the effective plasma chamber volume is as large as (?)67mm×255mm.It was designed to be operated at 14.5GHz and aimed to produce medium charge state and high charge state gaseous and also metallic ion beams.The source has already successfully delivered some intense gaseous ion beams to successive experimental terminals.This paper will give a brief overview of the basic features of this permanent magnet ECRIS.Then commissioning results of this source on the platform,the design of the extraction system together with the successive LEBT system will be presented.     

Kei2 ECR离子源C4+、C5+束流的最佳结果

With the prototype ECR ion source for the next carbon therapy facility in Japan a new series of measurements has been performed in order(a)to find the highest beam currents of C~(4 ) ions,and(b)to study the effect of"special"gas-mixing by using a chemical compound as a feed gas.An isotopic effect has been found in a previous experiment:with deuterated methane(CD_4 gas) the C~(5 ) beam currents are about 10% higher than with regular methane(CH_4 gas).For butane gases(C_4D_(10) and C_4H_(10) respectively)the isotopic effect for C~(5 ) production is even stronger(>15%).For production of C~(4 ) ions the isotopic effect appears to be absent.It turns out that the relative amount of carbon is much more important:acetylene gives 15% higher C~(4 ) current than butane,which in turn gives about 10% higher C~(4 ) ion currents than methane.     

NSCL/MSU ECR离子源项目进展报告

Since the last ECR Workshop,NSCL/MSU has been involved in a vigorous ECR ion source R&D program,which resulted in the construction of an off-line test ECR ion source(ARTEMIS-B)for new beam development and ion optics studies.Also the design and partial completion of a 3rd generation,fully superconducting ECR ion source,SuSI has been accomplished.This paper is an overview of the construction projects and the different R&D activities performed with the existing ion sources.These activities include development of metallic ion beam production methods using evaporation with resistive and inductive ovens and sputtering of very refractory metals.Ion optics developments include testing different focusing elements(magnetic solenoid lens,electrostatic quadrupole triplet lens,Einzel lens,electrostatic double doublet quadrupole combined with an octupole lens),and different beam forming and diagnostics devices.The detailed results will be presented at the workshop in separate talks and posters.     

近物所在产生金属离子束方面的研究

Since 1998,many experiments for metallic ion production have been done on LECR2(Lanzhou ECR ion source NO.2),LECR3(Lanzhou ECR ion source NO.3)and SECRAL(Superconductiong ECB ion source Advanced design in Lanzhou)at Institute of Modern Physics.The very heavy metallic ion beams such as those of uranium were also produced by the plasma sputtering method,and supplied for HIRFL(Heavy Ion Research Facility in Lanzhou)accelerators successfully.During the test,11.SeμAU~(28 ),9eμAU~(24 ) were obtained.Some ion beams of the metal having lower melting temperature such as Ni and Mg ion beams were produced by oven method on LECR3 too.The consumption rate was controlled to be lower for ~(26)Mg ion beams production,and the minimum consumption was about 0.3mg per hour.In this paper,the main experimental results are given.Some discussions are made for some experimental phenomena and results,and some conclusions are drawn.     

Surface enhancement of molecular ion H_2~+ yield in a 2.45-GHz electron–cyclotron resonance ion source

High current hydrogen molecular ion beam is obtained with a specially designed stainless steel liner permanent magnet2.45-GHz electron–cyclotron resonance(ECR) ion source(PMECR II) at Peking University(PKU). To further understand the physics of the hydrogen generation process inside a plasma chamber, theoretical and experimental investigations on the liner material of the plasma chamber in different running conditions are carried out. Several kinds of materials, stainless steel(SS), tantalum(Ta), quartz, and aluminum(Al) are selected in our study. Experimental results show that stainless steel and tantalum are much better than others in H~+_2 generation. During the experiment, an increasing trend in H~+_2 fraction is observed with stainless steel liner after O_2 discharge inside the ion source. Surface analyses show that the roughness change on the surface after O_2 discharge may be responsible for this phenomenon. After these studies, the pure current of H~+_2 ions can reach 42.3 mA with a fraction of 52.9%. More details are presented in this paper.