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991.
992.
Acoustic cavitation is used for megasonic cleaning in the semiconductor industry, especially of wafers with fragile pattern structures. Control of transient cavitation is necessary to achieve high particle removal efficiency (PRE) and low pattern damage (PD). In this study, the cleaning performance of solutions with different concentrations of dissolved gas (H2) and anionic surfactant (sodium dodecyl sulfate, SDS) in DIW (DI water) on silicon (Si) wafers was evaluated in terms of PRE and PD. When only DIW was used, PRE was low and PD was high. An increase in dissolved H2 gas concentration in DIW increased PRE; however, PD also increased accordingly. Thus, we investigated the megasonic cleaning performance of DIW and H2-DIW solutions with various concentrations of the anionic surfactant, SDS. At 20 ppm SDS in DIW, PRE reached a maximum value and then decreased with increasing concentration of SDS. PRE decreased slightly with increasing concentrations of SDS surfactant when dissolved in H2-DIW. Furthermore, PD decreased significantly with increasing concentrations of SDS surfactant in both DIW and H2-DIW cases. A high-speed camera setup was introduced to analyze bubble dynamics under a 0.96 MHz ultrasonic field. Coalescence, agglomeration, and the population of multi-bubbles affected the PRE and PD of silicon wafers differently in the presence of SDS surfactant. We developed a hypothesis to explain the change in bubble characteristics under different chemical environmental conditions. 相似文献
993.
Expression of the secondary Bjerknes force of two bubbles is obtained by considering the distrotion of two bubbles. The secondary Bjerknes forces in different acoustic fields are simulated, and the influence factors are analyzed and discussed. It is shown that the distortion of a bubble has an important influence on the interaction of two bubbles. The strength and even the directions of the secondary Bjerknes force of two bubbles with distortion differ considerably from the predictions of the sherical symmetry theory. The results show that when two bubbles oscillated stably in an acoustic field, the secondary Bjerknes force of two bubbles with distortion is several times more than that of two spherical bubbles in the same condition. The secondary Bjerknes force of two bubble with distortion has more interaction distance than that of two spherical bubbles. The secondary Bjerknes force of two bubbles with distortion depends on the distance of two bubbles, the shape mode of two bubbles, the equilibrium radii of two bubbles and the driving acoustic filed. The nonspherical distortion effects of the secondary Bjerknes has an importance on understanding the structure formation of bubbles and evolution process of bubble group in an acoustic field. 相似文献
994.
Ultrasound induced cavitation (acoustic cavitation) process is found useful in various applications. Scientists from various disciplines have been exploring the fundamental aspects of acoustic cavitation processes over several decades. It is well documented that extreme localised temperature and pressure conditions are generated when a cavitation bubble collapses. Several experimental techniques have also been developed to estimate cavitation bubble temperatures. Depending upon specific experimental conditions, light emission from cavitation bubbles is observed, referred to as sonoluminescence. Sonoluminescence studies have been used to develop a fundamental understanding of cavitation processes in single and multibubble systems. This minireview aims to provide some highlights on the development of basic understandings of acoustic cavitation processes using cavitation bubble temperature, sonoluminescence and interfacial chemistry over the past 2–3 decades. 相似文献
995.
The present paper introduces a novel semi-empirical technique for the determination of active bubbles’ number in sonicated solutions. This method links the chemistry of a single bubble to that taking place over the whole sonochemical reactor (solution). The probe compound is CCl4, where its eliminated amount within a single bubble (though pyrolysis) is determined via a cavitation model which takes into account the non-equilibrium condensation/evaporation of water vapor and heat exchange across the bubble wall, reactions heats and liquid compressibility and viscosity, all along the bubble oscillation under the temporal perturbation of the ultrasonic wave. The CCl4 degradation data in aqueous solution (available in literature) are used to determine the number density through dividing the degradation yield of CCl4 to that predicted by a single bubble model (at the same experimental condition of the aqueous data). The impact of ultrasonic frequency on the number density of bubbles is shown and compared with data from the literature, where a high level of consistency is found. 相似文献
996.
The cavitation characteristics during the spreading of a pure Sn liquid droplet subjected to ultrasonication were studied for the first time through high-speed photography to reveal the wetting mechanism. Ultrasonic vibration realized the spreading of Sn droplet on the nonwetting pure Al substrate. However, the oxide layer of the substrate at the spreading front is difficult to remove. The high-speed photography result shows that a noncavitation region consistently appears at the spreading front, because the acoustic pressure is below the cavitation threshold of 1.26 MPa. In particular, the width of the noncavitation region gradually increases as the size of the spreading area increases. Such a result accounts for the condition wherein the oxide layer at the spreading front is difficult to remove. Furthermore, the bubble density during spreading gradually decreases due to the decreased acoustic pressure of the thinned liquid. Finally, the bubble dynamics were calculated to verify the wetting mechanism. 相似文献
997.
This paper analyzes a fluid—solid interaction model which describes the interaction between an inviscid fluid and an elastic solid In the model, the linear elastodynamic equations complemented with appropriate interface and boundary conditions are used to describe the wave propagation in the fluid and solid regions, and absorbing boundary conditions are used to minimize unphysical wave reflections. It is shown that the initial boundary value problem of the mathematical model posses a unique global (in time) quasi-strong solution. Regularity of the quasi-strong solution is also obtained under some reasonable assumptions on the data and on the domain. 相似文献
998.
999.
Hilal A. Fadhil Angela Amphawan Hasrul A.B. Shamsuddin Thanaa Hussein Abd Hamza M.R. Al-Khafaji S.A. Aljunid Nasim Ahmed 《Optik》2013
Free Space Optics Systems (FSO) is one of the most effective solutions, especially for atmospheric turbulence due to the weather and environment structure. Free space optics system suffers from various limitations. A well-known disadvantage of FSO is its sensitivity on local weather conditions-primarily to haze and rain, resulting in substantial loss of optical signal power over the communication path. The main objective of this article is to evaluate the quality of data transmission using Wavelength Division Multiplexing (WDM) with highlighting several factors that will affect the quality of data transmission. The results of these analyses are to develop a system of quality-free space optics for a high data rate transmission. From the result analysis, FSO wavelength with 1550 nm produces less effect in atmospheric attenuation. Short link range between the transmitter and receiver can optimize the FSO system transmission parameters or components. Based on the analysis, it is recommended to develop an FSO system of 2.5 Gbps with 1550 nm wavelength and link range up to 150 km at the clear weather condition of bit-error-rate (BER) 10−9. 相似文献
1000.
M. M. S. Fakhrabadi A. Ghanbari A. Rostami F. Janabi Sharifi 《Fiber and Integrated Optics》2013,32(6):491-513
Abstract The purpose of this article is to study the dynamic behavior and modal analysis of a micro-optomechatronic device with primary applications to force sensing and optical attenuation/coupling. The system consists of two initially aligned micro-cantilevers with a narrow gap between them. The light beam enters to the first waveguide and, after propagation along it, couples to second waveguide through the mentioned narrow gap. The externally static or dynamic applied force on the first micro-cantilever deflects it and results in reduced optical coupling between the two waveguides. Changes in this factor are measured to give the properties of the applied force. 相似文献