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Hydrogen ions were implanted into separation by implantation of oxygen (SIMOX) silicon-on-insulator (SOI) wafers near the oxygen-implantation-induced damage peak under different conditions of energy and dose. It was found that the implanted hydrogen ions not only accelerate the diffusion of oxygen atoms from the annealing ambience into the wafer but also cause an outward diffusion of oxygen atoms in the buried oxide (BOX) layer. Thus, greatly broadened buried oxygen-rich (BOR) layers were formed in our experiments, which are 18%-79% broader than the BOX layer of standard SIMOX SOI wafers under the same conditions of oxygen implantation. The mechanism was discussed. A potential low cost method to fabricate SIMOX SOI wafers is proposed. 相似文献
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Total Dose Radiation Tolerance of Phase Change Memory Cell with GeSbTe Alloy 总被引:1,自引:0,他引:1
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Phase change memory (PCM) cell array is fabricated by a standard complementary metal-oxide-semiconductor process and the subsequent special fabrication technique. A chalcogenide Ge2Sb2Te5 film in thickness 50hm deposited by rf magnetron sputtering is used as storage medium for the PCM cell. Large snap-back effect is observed in current-voltage characteristics, indicating the phase transition from an amorphous state (higher resistance state) to the crystalline state (lower resistance state). The resistance of amorphous state is two orders of magnitude larger than that of the crystalline state from the resistance measurement, and the threshold current needed for phase transition of our fabricated PCM cell array is very low (only several μA). An x-ray total dose radiation test is carried out on the PCM cell array and the results show that this kind of PCM cell has excellent total dose radiation tolerance with total dose up to 2 ×10^6 rad(Si), which makes it attractive for space-based applications. 相似文献
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Equation of State of Dense Liquid Nitrogen in the Region of the Dissociative Phase Transition 总被引:1,自引:0,他引:1
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We have measured the equation of state for liquid nitrogen compressed dynamically to a pressure of 10-60 GPa by employing a two-stage light-gas gun.The data show a continuous phase transition above the shock pressure of 33GPa,as indicated previously by shock wave experiments.A theoretical model has been derived to examine the experimental data by inducing a molecular dissociative fraction.According to theoretical and experimental date the phase transition was thought to be a molecular dissociative phase transition. 相似文献
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精密垫片零件,如图1所示,零件材料为1Cr18Ni9Ti,强度大(σb=650MPa),有一定塑性。从零件尺寸精度看,φ4mm外圆为IT7级精度,φ4mm外圆与φ2mm内孔有很高的同轴度要求,冲裁断面与零件两端面有垂直度要求,普通冲压不能达到零件精度:从工序的角度看,有冲孔和落料工序,剪切面粗糙度Ra≤3.2μm,属于光洁冲裁范畴;另外,技术条件中要求零件两大面不得有任何划伤,且光滑平整。总体上看,该零件的冲压加工性不好,难度较大,对模具的设计、选材、制造要求都较高。 相似文献