投影光刻机硅片调焦调平测量模型

成像质量是光学光刻机的最主要指标,硅片调焦调平测量是光刻机控制成像质量的基础.为此建立了硅片调焦调平测量系统单个测量点的测量模型,并根据硅片形貌标准和集成电路尺寸标准,推导了近似运算规则,简化了曝光场高度与测量光斑在光电探测器上的位置之间的数学关系.运用最小二乘法和平面拟合曝光场曲面的方法,推导了基于多个测量点的曝光场高度和倾斜测量的数学模型.该模型能满足调焦调平实时测量和控制的需要,可用于测量精度优于10 nm的高精度调焦调平测量系统,能满足线宽小于100 nm投影步进扫描光刻机的需要.     

Structure, spin reorientation and M(o)ssbauer effect studies of Tb0.3Dy0.7(Fe1-xAlx)1.95 alloys

The effect of Al substitution for Fe on crystal structure, magnetostriction and spontaneous magnetostriction, anisotropy and spin reorientation of a series of polycrystalline Tb0.3Dy0.7(Fe1-xAlx)1.95 alloys (x = 0, 0.05, 0.1, 0.15, 0.20, 0.25, 0.30, 0.35) at room temperature and 77 K was investigated systematically. It was found that the primary phase of Tb0.3Dy0.7(Fe1-xAlx)1.95 is the MgCu2-type cubic Laves phase structure when x < 0.4 and the lattice constant a of Tb0.3Dy0.7(Fe1-xAlx)1.95 increases approximately and monotonically with the increase of x. The substitution of Al leads to the fact that the magnetostriction ( inceases slightly in a low magnetic field (H ≤ 40 kA/m), but decreases sharply and is easily close to saturation in a high applied field as x increases, showing that a small amount of Al substitution is beneficial to a decrease in the magnetocrystalline anisotropy. It was also found that the spontaneous magnetostriction (ζ)111 decreases greatly with x increasing. The analysis of the M(o)ssbauer spectra indicated that the easy magnetization direction in the {110} plane deviates slightly from the main axis of symmetry with the changes of composition and temperature, namely spin reorientation. A small amount of non-magnetic phase exists for x = 0.15 in Tb0.3Dy0.7(Fe1-xAlx)1.95 alloys and the alloys become paramagnetic for x > 0.15 at room temperture, but at 77 K the alloys still remain magnetic phase even for x = 0.2. At room temperature and 77 K, the hyperfine field decreases and the isomer shifts increase with Al concentration increasing.     

不同形式非线性薛定谔方程及其分步傅里叶法求解

讨论光通信中脉冲的准单色光光场的正负频表示,正负频形式的傅里叶变换,正负频形式的非线性薛定谔方程及它们之间的关系.尤其在脉冲频谱的求解问题中,如果采用负频形式的非线性薛定谔方程则必须选取负频形式的傅里叶变换;如果采用正频形式的非线性薛定谔方程则必须选取正频形式的傅里叶变换.采用分步傅里叶法对具体实例进行数值求解,验证了讨论结果.     

Advances in theoretical study on transition-metal-catalyzed C−H activation

Transition-metal-catalyzed C–H activation represents one of most attractive research fields in modern organic chemistry while theoretical studies have become a popular and effective tool for elucidating mechanism nowadays. The recent achievements in the cross field of the two orientations are reviewed in this article. The first part introduced the advances in theoretical study on transition-metal-catalyzed C–H activation. The elegant work reported mainly in and after 2013, classified according to the mechanisms of C–H activation, were covered. The second part provided an analysis on the distribution of quantum-chemical methods, solvation models and basis sets in the collected theoretical studies.     

PEO/PVDF-based gel polymer electrolyte by incorporating nano-TiO2 for electrochromic glass

Journal of Sol-Gel Science and Technology - To develop high performance mixed matrix gel polymer electrolyte, the synergistic effect of blending PVDF (PEO/PVDF weigh ratio of 85:15) and adding...     

Complexity-reduced ICI cancellation for OFDM system over doubly-selective channels

In doubly-selective fading wireless channel,the conventional orthogonal frequency division multi-plexing(OFDM)receivers for inter-carrier interference(ICI)compensation require extensive computa-tions.To obtain an effective balance between performance and complexity,the whole channel responsematrix was decomposed into a sequence of submatrix,and then a novel equalizer based on minimum meansquare error(MMSE)criterion was presented to combat the ICI.Furthermore,a simple ordering-baseddecision-feedback equa...     

Fabrication and electrochemistry study of multi-thiol coronary molecule monolayers

Single-component monolayer of novel multi-thiol coronary molecule and two-component mixed monolayer composed of coronary molecule and n-alkanethiol on gold substrates are described. The assembly of monolayers is characterized by ellipsometry, infrared spectroscopy and X-ray photoelectron spectroscope. The electrochemical properties of the single- and two-component monolayers are evaluated by cyclic voltammetry and electrochemical impedance spectroscopy experiments. Coronary molecule with multi-thiol groups has the ability to form stable monolayer via the interaction of mercapto groups and Au surface. Electrochemical impedance measurements indicate that 89.9% of the gold surface is blocked by the coronary molecule, which is attributed to the special spatial structure of the coronary molecule. The uncovered site on gold surface in coronary molecule monolayer could be occupied by the second suitable molecule. The mixed monolayer prepared by stepwise assembly of coronary molecule and n-alkanethiol has complete compact packing and few defects.     

大鼠背根神经节分离细胞离子单通道记录技术

本文探讨了在大鼠背根神经节(DRG)细胞上记录离子单通道电流的方法,研究了膜片钳实验的各个环节,研究了提高封接电阻的方法。研究结果表明,单通道记录的背景噪声取决于电极与细胞的封接水平。文中还讨论了实验系统的组装,电极制备和细胞分离等技术。     

压电超声直线马达驱动电路的研究

本文介绍了压电超声直线马达的结构和工作原理，分析了清华大学超声研究室研制的超声振子箝位，压电驱动的直线蠕动马达的特点及其驱动电路和信号波形．