改性光刻胶制备纳米压印模版

制备纳米压印中的模版是压印技术的基本条件.目前很多压印模版是利用高硬度材料制作的，但是这些材料比较难以加工，从而限制了纳米压印技术的发展.提出一种利用光刻胶制备纳米压印模版的方法.利用聚焦离子束对光刻胶的改性作用，控制加工的条件，将柔性的光刻胶改性为硬度很高的材料，从而形成纳米压印模版.这种方法具有速度快、制备简单等特点，是一种新颖的加工方式，扩展了聚焦离子束的加工范围，可用于其他的纳米加工领域. 关键词： 纳米压印 光刻胶 聚焦离子束 纳米孔阵列     

High-pressure study of topological semimetals XCd2Sb2 (X = Eu and Yb)

Topological materials have aroused great interest in recent years, especially when magnetism is involved. Pressure can effectively tune the topological states and possibly induce superconductivity. Here we report the high-pressure study of topological semimetals $X$Cd$_{2}$Sb$_{2}$ ($X = {\rm Eu} $ and Yb), which have the same crystal structure. In antiferromagnetic (AFM) Weyl semimetal EuCd$_{2}$Sb$_{2}$, the Néel temperature (${T}_{\rm N}$) increases from 7.4 K at ambient pressure to 50.9 K at 14.9 GPa. When pressure is above 14.9 GPa, the AFM peak of resistance disappears, indicating a non-magnetic state. In paramagnetic Dirac semimetal candidate YbCd$_{2}$Sb$_{2}$, pressure-induced superconductivity appears at 1.94 GPa, then ${ T}_{\rm c}$ reaches to a maximum of 1.67 K at 5.22 GPa and drops to zero at about 30 GPa, displaying a dome-shaped temperature-pressure phase diagram. High-pressure x-ray diffraction measurement demonstrates that a crystalline-to-amorphous phase transition occurs at about 16 GPa in YbCd$_{2}$Sb$_{2}$, revealing the robustness of pressure-induced superconductivity against structural instability. Similar structural phase transition may also occur in EuCd$_{2}$Sb$_{2}$, causing the disappearance of magnetism. Our results show that $X$Cd$_{2}$Sb$_{2}$ ($X = {\rm Eu}$ and Yb) is a novel platform for exploring the interplay among magnetism, topology, and superconductivity.