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Characterization of nanoporous low-k thin films by small-angle neutron scattering contrast variation
Small-angle neutron scattering contrast variation is applied to characterization of nanoporous low-dielectric constant (low-k) thin films. Films are exposed to saturated solvent vapor in air, whereby the pores fill with liquid by capillary condensation. The pores are filled with mixtures of hydrogen- and deuterium-containing solvents to vary the neutron contrast with the matrix (wall). The composition of the solvent mixture is systematically varied to identify a composition that minimizes the scattered intensity (contrast match point). From the contrast match point composition, film characteristics including matrix density and homogeneity are assessed. Four spin-on low-k materials including a methylsilsesquioxane, an organic polymer, a xerogel, and a hydrogensilsesquioxane are characterized by the new technique. Calculated matrix mass densities are compared to independent density measurements obtained by an established specular X-ray reflectivity technique. We find no evidence of "closed pores", defined here as pores inaccessible to the probe solvent, in any of the materials studied. 相似文献
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几种褐煤的超临界萃取研究 总被引:1,自引:0,他引:1
用超临界萃取方法对褐煤进行萃取研究,在半连续实验装置上进行了8种中国褐 煤样萃取试验.用甲苯作溶剂非等温萃取,萃取压力为10MPa.试验结果表明,萃 取转化率和萃取物产率与煤样挥发分呈线性关系,转化率介于30%-545;萃取物 产率介于19%一32%.加入10%四氢萘于甲苯溶剂中.转化率由38%增至62%, 萃取物产率由20%增至40%,对过程进行了动力学处理,动力学参数与煤的H/C 原子比有线性关系。 相似文献
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本研究采用Ni/KD-9催化剂,对CP-SRM过程焦油进行原位催化提质研究。结果表明,在650℃热解温度下,CPSRM在5Ni/KD-9催化作用下的焦油产率为24.4%,略低于不进行催化提质的焦油产率,而轻质焦油产率(18.9%)是未提质时的1.4倍。相比未提质焦油,用5Ni/KD-9提质后焦油中的C2、C3和C4烷基取代苯含量分别增加0.5、0.6和4.0倍;酚和萘的含量也明显提高。采用同位素示踪方法结合典型组分质谱图,探究了催化提质过程的反应机理。结果表明,5Ni/KD-9可以同时催化焦油裂解和甲烷蒸汽重整(SRM),SRM过程产生的小分子自由基,如·CHx,·H和·OH可以与焦油裂解产生的自由基结合,从而避免焦油的过度裂解。 相似文献
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The density functional theory (DFT) is the most popular method for evaluating bond dis-sociation enthalpies (BDEs) of most molecules. Thus, we are committed to looking for alternative methods that can balance the computational cost and higher precision to the best for large systems. The performance of DFT, double-hybrid DFT, and high-level com-posite methods are examined. The tested sets contain monocyclic and polycyclic aromatic molecules, branched hydrocarbons, small inorganic molecules, etc. The results show that the mPW2PLYP and G4MP2 methods achieve reasonable agreement with the benchmark values for most tested molecules, and the mean absolute deviations are 2.43 and 1.96 kcal/mol after excluding the BDEs of branched hydrocarbons. We recommend the G4MP2 is the most appropriate method for small systems (atoms number ≤20); the double-hybrid DFT methods are advised for large aromatic molecules in medium size (20 ≤atoms number ≤50), and the double-hybrid DFT methods with empirical dispersion correction are recommended for long-chain and branched hydrocarbons in the same size scope; the DFT methods are advised to apply for large systems (atoms number ≥50), and the M06-2X and B3P86 methods are also favorable. Moreover, the di erences of optimized geometry of different methods are discussed and the effects of basis sets for various methods are investigated. 相似文献
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超临界甲苯萃取含重金属渣油回收有机质 总被引:3,自引:0,他引:3
在半连续萃取装置上 ,对 Veba联合裂解工艺中得到的渣油 VCC-R(含镍 393× 1 0 - 6 ,钒2 31 0× 1 0 - 6 )用甲苯进行萃取 ,以除去渣油中的重金属 .实验采用非等温技术 ,研究了温度、压力和溶剂类型等对萃取的影响 .结果表明 ,VCC-R的回收率在 64%~ 69% ( daf) ;萃取物主要在1 0 0~ 350℃得到 ,其中镍和钒的质量分数小于 6× 1 0 - 6 ,表明 98%和 99%的镍和钒已除去 .萃取残渣集中了 VCC-R中的重金属和灰分 ,有很低的氢含量、质量分数大于 1 0 0 0× 1 0 - 6 的镍和大于 60 0 0× 1 0 - 6的钒 相似文献
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本研究对酸洗赤泥催化剂进行Cu、Ce、Cu/Ce浸渍负载,并研究了金属改性赤泥对烟气中NOx的催化转化性能。研究结果表明,Cu负载催化剂中的Cu+与Cu2+,有效促进了赤泥对低温烟气(200–300℃)中的NO转化率,Cu的负载量达到6%时,赤泥的最高NO转化率达到了90.7%;而Ce负载催化剂中的Ce3+与Ce4+,有效促进了赤泥对中温烟气(200–400℃)中的NO转化率,Ce的负载量达到8%时,赤泥的最高NO转化率达到了94.0%;Cu/Ce负载催化剂表现出比单金属负载催化剂更好的低温NO转化率,最佳的负载Cu:Ce比例为1∶1,双金属负载催化剂表现出比Cu负载催化剂更好的中温(300–400℃)中的NO转化率,最高达到了95.5%。其原因是,在Cu/Ce协同作用下,Cu+以及Cu2+的还原过程分别从229、302℃降至201以及247℃,同时使发生Fe2O3→FeO的还原过程的温度降... 相似文献