一种考虑硅通孔电阻-电容效应的三维互连线模型

硅通孔(TSV)是三维集成电路的一种主流技术.基于TSV寄生参数提取模型,对不同物理尺寸的TSV电阻-电容(RC)参数进行提取,采用Q3D仿真结果验证了模型精度.分析TSVRC效应对片上系统的性能及功耗影响,推导了插入缓冲器的三维互连线延时与功耗的解析模型.在45nm互补金属氧化物半导体工艺下,对不同规模的互连电路进行了比较分析.模拟结果显示,TSVRC效应导致互连延时平均增加10%,互连功耗密度平均提高21%;电路规模越小,TSV影响愈加显著.在三维片上系统前端设计中,包含TSV寄生参数的互连模型将有助于设计者更加精确地预测片上互连性能.     

考虑非均匀温度分布效应的缓冲器插入最优尺寸研究

基于非均匀温度分布效应对互连延时的影响, 提出了一种求解互连非均匀温度分布情况下的缓冲器最优尺寸的模型. 给出了非均匀温度分布情况下的RC互连延时解析表达式, 通过引入温度效应消除因子, 得出了最优插入缓冲器尺寸以使互连总延时最优. 针对90 nm和65 nm工艺节点, 对所提模型进行了仿真验证, 结果显示, 相较于以往同类模型, 本文所提模型由于考虑了互连非均匀温度分布效应, 更加准确有效, 且在保证互连延时最优的情况下有效地提高了芯片面积的利用.     

具有部分超结的新型SiC SBD特性分析

提出了一种具有部分超结（super junction, SJ）结构的新型SiC肖特基二极管,命名为SiC Semi-SJ-SBD结构,通过将常规SBD耐压区分为常规耐压区和超结耐压区来减小导通电阻,改善正向特性.利用二维器件模拟软件MEDICI仿真分析,研究了不同超结深度和厚度时击穿电压(V_B)和比导通电阻(R_on-sp),与常规结构的SBD比较得出,半超结结构可以明显改善SiC肖特基二极管特性,并得到优化的设计方案,选择超结宽度2< 关键词： SiC肖特基二极管 super junction 导通电阻 击穿电压     

一种基于多目标约束的互连线宽和线间距优化模型

优化线宽和线间距已经成为改善系统芯片性能的关键技术.本文基于互连线线宽和线间距对互连延时、功耗、面积和带宽的影响,提出了基于多目标优化方法实现优化线宽和线间距的思路,并利用曲线拟合方法得到了多目标约束的解析模型.Hspice验证结果显示,该解析模型精度较高,平均误差不超过5%,算法简单,能有效弥补应用品质因数方法的缺陷,可以应用于纳米级互补金属氧化物半导体系统芯片的计算机辅助设计.     

Breakdown voltage analysis of Al0.25Ga0.75N/GaN high electron mobility transistors with partial silicon doping in the AlGaN layer

In this paper,two-dimensional electron gas（2DEG） regions in AlGaN/GaN high electron mobility transistors（HEMTs） are realized by doping partial silicon into the AlGaN layer for the first time.A new electric field peak is introduced along the interface between the AlGaN and GaN buffer by the electric field modulation effect due to partial silicon positive charge.The high electric field near the gate for the complete silicon doping structure is effectively decreased,which makes the surface electric field uniform.The high electric field peak near the drain results from the potential difference between the surface and the depletion regions.Simulated breakdown curves that are the same as the test results are obtained for the first time by introducing an acceptor-like trap into the N-type GaN buffer.The proposed structure with partial silicon doping is better than the structure with complete silicon doping and conventional structures with the electric field plate near the drain.The breakdown voltage is improved from 296 V for the conventional structure to 400 V for the proposed one resulting from the uniform surface electric field.     

Damage effect and mechanism of the GaAs pseudomorphic high electron mobility transistor induced by the electromagnetic pulse

The damage effect and mechanism of the electromagnetic pulse(EMP) on the GaAs pseudomorphic high electron mobility transistor(PHEMT) are investigated in this paper. By using the device simulation software, the distributions and variations of the electric field, the current density and the temperature are analyzed. The simulation results show that there are three physical effects, i.e., the forward-biased effect of the gate Schottky junction, the avalanche breakdown, and the thermal breakdown of the barrier layer, which influence the device current in the damage process. It is found that the damage position of the device changes with the amplitude of the step voltage pulse. The damage appears under the gate near the drain when the amplitude of the pulse is low, and it also occurs under the gate near the source when the amplitude is sufficiently high, which is consistent with the experimental results.     

Statistical Elmore delay of RC interconnect tree

As feature size keeps scaling down,process variations can dramatically reduce the accuracy in the estimation of interconnect performance.This paper proposes a statistical Elmore delay model for RC interconnect tree in the presence of process variations.The suggested method translates the process variations into parasitic parameter extraction and statistical Elmore delay evaluation.Analytical expressions of mean and standard deviation of interconnect delay can be obtained in a given fluctuation range of interconnect geometric parameters.Experimental results demonstrate that the approach matches well with Monte Carlo simulations.The errors of proposed mean and standard deviation are less than 1% and 7%,respectively.Simulations prove that our model is efficient and accurate.     

源、漏到栅距离对次亚微米ggNMOS ESD保护电路鲁棒性的影响

基于对静电放电(electrostatic discharge,ESD)应力下高电压、大电流特性的研究,本文通过优化晶格自加热漂移-扩散模型和热力学模型,并应用优化模型建立了全新的0.6 μm CSMC 6S06DPDM-CT02 CMOS工艺下栅接地NMOS (gate grounded NMOS,ggNMOS)ESD保护电路3D模型,对所建模型中漏接触孔到栅距离(drain contact to gate spacing,DCGS)与源接触孔到栅距离(source contact to gate sp 关键词： 栅接地NMOS 静电放电 漏接触孔到栅的距离 源接触孔到栅的距离     

高密度等离子体工艺总体模型初探

介绍了与高密度等离子体工艺相关的模型和数值模拟方法,即连续流和动力学方法。在漂流－扩散方程的连续流模型和单元粒子／蒙特卡罗碰撞动力学模型的基础上,提出了一个等离子体工艺模型。讨论了对等离子体鞘层、等离子体刻蚀和淀积过程的模拟方法,提出了一个高密度等离子体工艺总体模型的初步方案。     

Pulsed microwave damage trend of bipolar transistor as a function of pulse parameters

In the present paper we conduct a theoretical study of the thermal accumulation effect of a typical bipolar transistor caused by high power pulsed microwave (HPM), and investigate the thermal accumulation effect as a function of pulse repetition frequency (PRF) and duty cycle. A study of the damage mechanism of the device is carried out from the variation analysis of the distribution of the electric field and the current density. The result shows that the accumulation temperature increases with PRF increasing and the threshold for the transistor is about 2 kHz. The response of the peak temperature induced by the injected single pulses indicates that the falling time is much longer than the rising time. Adopting the fitting method, the relationship between the peak temperature and the time during the rising edge and that between the peak temperature and the time during the falling edge are obtained. Moreover, the accumulation temperature decreases with duty cycle increasing for a certain mean power.