排序方式: 共有103条查询结果,搜索用时 62 毫秒
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为了研究N’,N’-二乙基硫脲添加剂在微沉积工艺中对铜金属孔洞填充能力的影响, 采用线性伏安法(LSV)、循环伏安法(CV)、SEM测量法分析比较了无添加剂、含硫脲和含N’,N’-二乙基硫脲添加剂时微沉积铜工艺中的电化学行为, 并借助塔菲尔方程, 分析比较此三种情况下电镀反应过程中的电极动力学参数. 结果显示: 当铜微沉积工艺中加入N’,N’ -二乙基硫脲添加剂时, 产生活性极化, 该活性极化效应降低铜离子的放电速度, 抑制孔洞边缘部分沉积较快区域的过快生长; 同时活性极化提高, 将导致成核点的增加, 沉积膜的晶粒较小, 镀膜也较平滑细致, 实验测得铜离子的平滑能力比没有添加剂时提高约50%. 最后通过微沉积工艺成功地将金属铜填充入宽为10 μm, 深宽比为4∶1的微型凹槽中, 且镀层内没有空洞、空隙以及细缝等缺陷. 相似文献
103.
RF knock-out extraction in HITFiL 总被引:1,自引:0,他引:1
A compact facility for cancer therapy has been designed and is presently under construction. A slow beam extraction system using the RF-Knock Out method and 3rd-order resonance is adopted in the synchrotron of this facility. Eight sextupoles are used, four of them are for correcting the chromaticity and the rest for driving the 3rd-order resonance. In order to save the aperture of vacuum chamber, a 3-magnet bump is adopted during the extraction process. The extraction phase space map and the last 3 turns' particle trajectory before extraction are given. The matching betatron functions with HEBT (high energy beam transport) are also presented. 相似文献