硅基垂直腔面光发射器件的研制

为了实现与现有集成电路工艺兼容的全硅基发光器件,提出了一种新型硅基垂直腔面光发射器件结构。它采用等离子体增强化学气相淀积(PECVD)方法制备的非晶硅(或非晶氮化硅)/二氧化硅交替生长的多层薄膜结构为分布式Bragg反射器(DBR),以夹在上下两个Bragg反射器之间的非晶碳化硅薄膜为中间发光层。通过设计与模拟,分析了DBR中薄膜生长顺序与层数对器件性能的影响。最后研制出光致红光发射器件和电致蓝绿光发射器件,并给出了它们的光致和电致发光谱。结果显示了在光致和电致激发下非晶碳化硅的发光和DBR对光谱的限制增强作用。     

基于介质上电润湿的微流体变焦透镜的研究进展

近年来,微流体变焦透镜的研究已展示出其在光学系统中的应用前景,其中基于介质上电润湿(Electrowet-ting on dielectric,EWOD)的微流体变焦透镜只需改变外加电压便能快速调节透镜焦距,并且具有尺寸小、结构灵活、功耗低、焦距调节范围广等许多突出优点而日益受到注目。在介绍EWOD机理的基础上,综述了目前基于EWOD的微流体变焦透镜的研究进展。     

Demonstration of Four Fundamental Operations of Liquid Droplets for Digital Microfluidic Systems Based on an Electrowetting-on-Dielectric Actuator

An electrowetting-on-dielectric actuator is developed, in which the liquid is sandwiched between top and bottom plates. For the bottom plate, silicon wafer is used as the substrate, the heavily phosphorus-doped polysilicon film is deposited by low pressure chemical vapour deposition as the microelectrode array, and thermally grown SiO2 film as the dielectric layer. The top p/ate is a glass plate covered with transparent and conductive indium tin oxide as the ground electrode. In addition, a Teflon AF1600 film is spun on the surface of both the plates as the hydrophobic layer. The experimental results show that when the gap height between two plates is 133μm, a prototype of the device is capable of creating, transporting, merging and dividing droplets of deionized water in an air environment with a 70V at lOHz voltage pulse. This is also established by simulations using the computational fluidic software of CFD-ACE＋.     

硅基PZT薄膜的制备与工艺损伤

以 Pb Ti O3(PT)作为种子层 ,在 Si衬底上用改进的溶胶凝胶法制备了 PZT薄膜 ,并用 RIE法刻蚀形成 MFM(金属铁电层金属 )结构的电容 ,以用于铁电随机存取存储器 (Fe RAM)中。测得 PZT薄膜相对介电常数、矫顽场和剩余极化强度分别为 10 0 0 ,30 k V/ cm和 16 μC/ cm2 ,漏电流在 0 .1n A / cm2 量级 ,达到 Fe RAM的应用要求。铁电膜与CMOS电路集成时对铁电膜的铁电性可能造成的工艺损伤(如刻蚀损伤、氢损伤和应力损伤等 )的物理机制进行了初步研究和讨论 ,并提出了一些初步的解决途径     

Optimization of PZT-Based Radio-Frequency Filters

Analytical solutions are presented for the wave equation for the electrode-piezoelectric-electrode sandwich structure in film bulk acoustic resonators (FBAR). The impedance for lead-zirconate-titanate (PZT)-based FBAR was derived using the proper boundary conditions and material parameters. A method is presented to adjust the resonant frequency based on the process and material properties. Ferroelectric-based radio-frequency filters were designed using FBARs. An accurate result is given for the filter impedance which can be used for other piezoelectric devices.     

汽车轮胎压力监测系统的通讯传输与天线设计

汽车轮胎压力监测系统(TPMS)的主要技术难点是无线通信的可靠性和稳定性,以及如何延长发射端工作电池的使用寿命。针对这些技术难点,该文对低功耗发射器电路和接收器电路进行了研究和设计。对TPMS发射和接收天线辐射电阻、损耗电阻和电感等参数进行了分析,并根据这些参数设计出匹配网络,提高低功耗电路的发射效率。分析了因车轮高速运动引起的多径衰落和Doppler频移对接收信号和性能的影响,以及如何通过改变软件的编码格式和通讯协议来克服,从而研制出一种全新有效而且稳定可靠的TPMS通讯系统与天线。其整体性能在静态﹑动态和实际装车运行测试中达到了很好的效果,超过了TPMS相关国际标准的要求。     

Handwriting Input System Based on Ultrasonic Transducers

A handwriting input system was developed using three collinear ultrasonic transducers. These collinear polyvinylidene fluoride (PVDF) transducers were specially designed for the handwriting input system to give a large writeable area with writing in any direction. Driver and detection circuits were developed for the handwriting system. This handwriting input system based on 2-dimensional position tracing has large writeable area (A4 paper), low drive voltage (5 V), and is independent of the handwriting pad or the pen.     

热驱动薄膜式微型泵

微型泵在化学分析、环境监测和药物传送等领域有广阔应用前景。为了解热驱动薄膜式微型泵的性能 ,对泵的主要部件进行了理论分析 ,然后对泵的整体性能进行了数值模拟。得到了微型泵的频率特性 ,流量 -压头曲线及流量随功率的变化。发现泵的流量在 3 .3 3 Hz左右达到最大 ,泵的零流量压头为 64 k Pa左右 ;由于预应力的作用 ,使输入功率低时泵的流量比没有预应力时显著减小 ,而当输入功率较大时 ,泵的流量随输入功率增大而迅速增大。实验测定了微型泵流量的频率特性和随功率的变化 ,实测结果与模拟结果基本吻合     

Surface Micromachining of Bulk Acoustic Wave Filters

The most common typical bulk acoustic wave (BAW) filters are fabricated using bulk micromachining technology, but they have several disadvantages. This paper describes a new structure for front end passband BAW filters manufactured using surface micromachining. Porous silicon is used as a thick sacrificial layer. The structure reduces the influence of the support film on the filter to improve the VLSI compatibility as well as the filter quality. The cross-talk between resonators with different frequencies can be dramatically reduced by using resonators with a self-supporting structure.     

激光加热效应在硅显微Raman光谱测量中的影响

本文从理论和实验两方面研究了显微Raman光谱测量中,激光功率对单晶硅样品测量的影响。由于显微Raman光谱仪对激光的聚焦作用,使得激光对不同厚度的样品具有微区加热作用,被测样品产生不同程度的温升,从而对显微Raman光谱仪在硅材料应力和温度的测量中产生影响。实验结果证明,对无限厚硅样品,20mW的激光使Raman频移达到0.15cm-1;而对2μm厚的热薄硅样品,26mW的激光使Raman频移达到4.47cm-1。