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报道了利用多腔耦合微波表面波等离子体增强化学气相沉积(PECVD)的方法制备类金刚石(DLC)薄膜。通过发射光谱(OES)测量,对Ar等离子体中的各种放电参数以及全部四个腔室内放电的均匀性作出评估。采用表面轮廓仪测量了薄膜的厚度;薄膜的表面形貌、组成结构通过原子力显微镜(AFM)、激光拉曼光谱和X射线衍射光谱(XPS)进行了表征。在12.5μm厚度的有机薄膜聚酯(PET)表面沉积一定厚度DLC后,通过测量水蒸气透过率(WVTR)对DLC薄膜的阻隔性能进行了研究。结果表明,这种多腔耦合微波表面波等离子体装置,不仅能够实现四个腔室同时相对均匀的放电,也能够实现单个腔室的轴向均匀放电。制备的DLC薄膜结构致密、成分均匀,可以使PET薄膜阻隔性能提高约20倍。 相似文献
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大学女生正处在生理和心理变化的交叉时期,太极拳教学要充分利用太极拳运动特点和健身机制。培养女生练习太极拳的兴趣,首先要使其有良好的学习动机。融洽的师生关系是培养兴趣的条件,科学的课堂教学是培养兴趣的保证。 相似文献
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Diagnosis of Methane Plasma Generated in an Atmospheric Pressure DBD Micro-Jet by Optical Emission Spectroscopy
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Diagnosis of methane plasma, generated in an atmospheric pressure dielectric barrier discharge (DBD) microplasma jet with a quartz tube as dielectric material by a 25 kHz sinusoidal ac power source, is conducted by optical emission spectroscopy (OES). The reactive radicals in methane plasma such as CH, C2, and Ha are detected insitu by OES. The possible dissociation mechanism of methane in diluted Ar plasma is deduced from spectra. In addition, the density of CH radical, which is considered as one of the precursors in diamond-like (DLC) film formation, affected by the parameters of input voltage and the feed gas flow rate, is emphasized. With the Boltzmann plots, four Ar atomic spectral lines (located at 675.28nm, 687.13nm, 738.40nm and 794.82nm, respectively) are chosen to calculate the electron temperature, and the dependence of electron temperature on discharge parameters is also investigated. 相似文献