用于后端工艺中铜/低k材料金属去除的实验数值研究

1 Introduction The consumer electronics market demands high-er speeds and more functionality of ICs. Speed and functionality of an IC are related to the amount of cir- cuitry (such as transistors), which is packed on eachchip. Therefore, the dimensions of the transistors need to be reduced. The interconnect structure, which con- nects the transistors, must become smaller too to com- ply with the small dimensions of the transistors. In or- der to reduce undesirable effects[1], which follow fr…     

Approximation multidimension fuction with functional network

The functional network was introduced by E.Catillo, which extended the neural network. Not only can it solve the problems solved, but also it can formulate the ones that cannot be solved by traditional network. This paper applies functional network to approximate the multidimension function under the ridgelet theory. The method performs more stable and faster than the traditional neural network. The numerical examples demonstrate the performance.     

Interference suppressing for cellular MIMO system based on turbo receiver

Space-Time Coding （STC）, which combines channel coding, modulation, and multiple transmit antennas, is a powerful scheme to achieve higher data rates and combat fading in wireless systems, in this paper, we propose a soil/cancellation turbo equalization scheme to suppress Co-Channel Interference （CCI） in STC systems. The simulation results show that the proposed method significantly improves the system＇s ability of interference suppression, while preserving the space-time structure.     

Effects of internals and distributors on the distribution and growth of bubbles in the conventional gas-solid fluidized bed

The effects of internals and gas distributors on the local dynamics of the bubbles in the conventional gas-solid fluidized bed were studied.Mesh-type internals with different opening areas(50%,70%and 90%)and different arrangements(two-layer and four-layer);and a sintered plate with a smaller pore size(1μm)and a perforated plate with a larger pore size as distributors were investigated.Differential pressure drops and local solids holdups were measured under various superficial gas velocities to compare the performances of the different types of internals and distributors.The instantaneous solids holdup signals from the optical fibre probe were used to further examine the local bubble dynamics in detail.Smaller bubbles were found,with the installation of internals or using the sintered plate,resulting in lower pressure drops and a higher bed expansion.Internals with reduced opening area or distributor with smaller pore size further leads to a higher changeover rate between the bubbles and dense phase,both axially and radially,and hence a better gas-solid contacting and an earlier transition to the turbulent flow regime of the bed.     

Two-dimensional tellurium saturable absorber for ultrafast solid-state laser

Two-dimensional(2 D) Te nanosheets were successfully fabricated through the liquid-phase exfoliation(LPE) method. The nonlinear optical properties of 2 D Te nanosheets were studied by the open-aperture Z-scan technique. Furthermore, the continuous wave mode-locked Nd:YVO_4 laser was successfully realized by using 2 D Te as a saturable absorber(SA) for the first time, to the best of our knowledge. Ultrashort pulses as short as 5.8 ps were obtained at 1064.3 nm with an output power of 851 m W. This primary investigation indicates that the 2 D Te SA is a promising photonic device in the fields of ultrafast solid-state lasers.     

Effects of guanidinium cations on structural,optoelectronic and photovoltaic properties of perovskites

Guanidinium (GA) cations are intentionally introduced in MAPbl3 perovskite by considering its potential capability of stabilizing the material through plenty of...     

Unraveling the condensation reactions of heterometallic {BiNb_4} moieties into hybrid Bi_xNb_y-oxo clusters with mass spectrometry

The most effective methodologies for the construction of polynuclear complexes usually take advantage of preorganized building blocks.Herein,we successfully developed a new versatile heterometallic{BiNb₄}moiety,which can be applied for the assembly of less explored organic-inorganic hybrid polyoxoniobates.Through controlled condensation reactions,three{BiNb₄}moieties can be assembled into a pair of isomeric Bi₃Nb₁₈clusters at different temperatures;whilst four{BiNb₄}moieties can be combined into two unique Bi₄Nb₁₆and Bi₄Nb₁₈tetramers in different solvents.Interestingly,we have used mass spectrometry to probe the above condensation reactions,which clearly confirmed a stepwise bottom-up assembly process by capturing the presence of bismuth subsalicylate precursors,salicylate coordinated intermediates,Nb incorporated{BiNb₄}moieties and the final Bi_xNb_y-oxo clusters,respectively.Moreover,the packing modes of the{BiNb₄}units induce different solution behaviors,and the{BiNb₄}units in Bi4Nb16can be recombined by post-synthetic recrystallization in acetonitrile to produce a new tetramer Bi₄Nb₁₈-R.Therefore,this work provides not only a useful{BiNb₄}building unit but also the mechanism for their condensation,both of which will promote the future development of metal-oxo clusters.     

A numerical implementation of the length-scale independent phase field method

The phase field method for fracture integrates the Griffith theory and damage mechanics approach to predict crack initiation and propagation within one framewor...     

Individual Identification of Electronic Equipment Based on Electromagnetic Fingerprint Characteristics

With the rapid development of communication and computer,the individual identification technology of communication equipment has been brought to many application scenarios.The identification of the same type of electronic equipment is of considerable significance,whether it is the identification of friend or foe in military applications,identity determination,radio spectrum management in civil applications,equipment fault diagnosis,and so on.Because of the limited-expression ability of the traditional electromagnetic signal representation methods in the face of complex signals,a new method of individual identification of the same equipment of communication equipment based on deep learning is proposed.The contents of this paper include the following aspects:(1)Considering the shortcomings of deep learning in processing small sample data,this paper provides a universal and robust feature template for signal data.This paper constructs a relatively complete signal template library from multiple perspectives,such as time domain and transform domain features,combined with high-order statistical analysis.Based on the inspiration of the image texture feature,characteristics of amplitude histogram of signal and the signal amplitude co-occurrence matrix(SACM)are proposed in this paper.These signal features can be used as a signal fingerprint template for individual identification.(2)Considering the limitation of the recognition rate of a single classifier,using the integrated classifier has achieved better generalization ability.The final average accuracy of 5 NRF24LE1 modules is up to 98%and solved the problem of individual identification of the same equipment of communication equipment under the condition of the small sample,low signal-to-noise ratio.