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The structural properties of polycrystalline silicon films, prepared by plasma enhanced chemical vapor deposition system, with different flow rates of SiH4/SiF4 mixtures at 300 °C were investigated. This study indicates that the low hydrogen coverage on the growing surface, under optimum fluorine radicals, will be leaded to an improvement of crystallized area as compared with case of high hydrogen coverage surface. Moreover, the studies of the role of SiH4 and SiF4 radicals show that the SiH4 radicals are important in the nucleation and growth of grains. However, SiF4 radicals are effective in the structural change of grain boundaries regions and by this way, in the present system, establish the growth of grains under the dominant 〈1 1 0〉 direction. The stress investigation indicates that addition of high flow rate of SiF4 in amorphous film, results in the nearly stress free films. Finally, we found that the changes in g-value reflect the changes in the intrinsic compressive and tensile stress in the both polycrystalline and amorphous silicon films. 相似文献
64.
Liang Y.C. Wenjiang Zeng Pick Hong Ong Zhaoxia Gao Jun Cai Balasubramanian N. 《Electron Device Letters, IEEE》2002,23(12):700-703
In this letter, a concise process technology is proposed for the first time to enable the fabrication of good quality three-dimensional (3-D) suspended radio frequency (RF) micro-inductors on bulk silicon, without utilizing the lithography process on sidewall and trench-bottom patterning. Samples were fabricated to demonstrate the applicability of the proposed process technology. 相似文献
65.
Chih-Wea Wang Chi-Feng Wu Jin-Fu Li Cheng-Wen Wu Tony Teng Kevin Chiu Hsiao-Ping Lin 《Journal of Electronic Testing》2002,18(6):637-647
In this paper we propose a novel built-in self-test (BIST) design for embedded SRAM cores. Our contribution includes a compact and efficient BIST circuit with diagnosis support and an automatic diagnostic system. The diagnosis module of our BIST circuit can capture the error syndromes as well as fault locations for the purposes of repair and fault/failure analysis. In addition, our design provides programmability for custom March algorithms with lower hardware cost. The combination of the on-line programming mode and diagnostic system dramatically reduces the effort in design debugging and yield enhancement. We have designed and implemented test chips with our BIST design. Experimental results show that the area overhead of the proposed BIST design is only 2.4% for a 128 KB SRAM, and 0.65% for a 2 MB one. 相似文献
66.
Wen-Yan Yin Le-Wei Li Tat-Soon Yeo Mook-Seng Leong Pang-Shyan Kooi 《Electromagnetic Compatibility, IEEE Transactions on》2002,44(2):329-337
The direct integral equation is formulated for describing the current on the multiple perfectly conducting strips in cylindrical geometries for an E-polarization plane wave of normal incidence. By using the Galerkin's method, the surface currents on the conducting strips are expanded in the form of a series of Chebyshev polynomials of the first kind, while the unknown expanding coefficients are solved by a set of matrix equations of finite order with a fast convergence rate and a high accuracy. Furthermore, numerical results are presented to demonstrate the variation of the penetrated near-zone field in the presence of one, two, three, four and six cylindrical apertures, and the hybrid effects of both aperture number and aperture angular widths on the penetrated fields are investigated in detail 相似文献
67.
摩托罗拉微控制器(MCU)具有编程语言简单、外围设备齐全、存储器模型用户友好、选择广及供应多、性能价格比高等优点,被设计者评为最容易使用的产品之一。在全球顶级的原始设备制造厂商(OEM)的无数嵌入式系统和用户最终产品中都可找到摩托罗拉的MCU,包括键盘、传呼机、电子游戏机、洗衣机、安全系统及汽车等。 相似文献
68.
T. Kumita Y. Kamiya M. Babzien I. Ben-Zvi K. Kusche I. V. Pavlishin I. V. Pogorelsky D. P. Siddons V. Yakimenko T. Hirose T. Omori J. Urakawa K. Yokoya D. Cline F. Zhou 《Laser Physics》2006,16(2):267-271
Thomson scattering of high-power laser and electron beams is a good test of electrodynamics in the high-field region. We demonstrated production of high-intensity X-rays in the head-on collision of a CO2 laser and 60-MeV electron beams at Brookhaven National Laboratory, Accelerator Test Facility. The energy of an X-ray photon was limited at 6.5 keV in the linear (lowest order) Thomson scattering, but the nonlinear (higher order) process produces higher energy X-rays. We measured the angular distribution of the high-energy X-rays and confirmed that it agrees with theoretical predictions. 相似文献
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