State of and prospects for XeF(C−A) optically pumped lasers

Experimental and theoretical results are presented on an XeF(C?A) blue-green laser driven by 5-kJ energy. The laser was pumped by a ferrite-induced discharge of 90 cm in length. The output energy of 0.22 J was obtained with a plane-parallel resonator. A program to simulate laser operation has been developed. Numerical results for a wide range of conditions are compared with experiments performed by us and by other authors. It is found that intracavity refractive losses limit laser operation for XeF pressures above 3 torr. The laser efficiency strongly depends on the discharge-to-cavity length ratio. Possible ways to increase the laser power and efficiency are discussed.     

Electrical linewidth test structures fabricated in monocrystallinefilms for reference-material applications

The physical widths of reference features incorporated into electrical linewidth test structures patterned in films of monocrystalline silicon have been determined from Kelvin voltage measurements. The films in which the test structures are patterned are electrically insulated from the bulk-silicon substrate by a layer of silicon dioxide provided by SIMOX (Separation by the IMplantation of OXygen) processing. The motivation is to facilitate the development of linewidth reference materials for critical-dimension (CD) metrology-instrument calibration. The selection of the (110) orientation of the starting silicon and the orientation of the structures' features relative to the crystal lattice enable a lattice-plane-selective etch to generate reference-feature properties of rectangular cross section and atomically planar sidewalls. These properties are highly desirable for CD applications in which feature widths are certified with nanometer-level uncertainty for use by a diverse range of CD instruments. End applications include the development and calibration of new generations of CD instruments directed at controlling processes for manufacturing devices having sub-quarter-micrometer features     

Why define atoms in real space?

The physics of a system is determined by a variation of the action integral, i.e., by a variation of the space–time volume integral of the Lagrange function. If one demands that the properties of an atom in a molecule be derived from physics, the atom must generate its own space–time volume, requiring that its boundaries be defined in real space. The variations in the action are related to the actions of generators of infinitesimal unitary transformations. In the general case, the action integral is altered by generators acting in both the spacelike and timelike surface bounding the space–time volume, whereas for a total isolated system, the physics is totally determined by their action in just the spacelike surfaces at the two time endpoints. It is shown and illustrated for a one-dimensional system that the definition of an atom corresponds to the possibility of choosing a subsystem in such a way that the contributions to the change in action resulting from the evolution in time of its spatial boundaries vanishes identically. The properties of these subsystems and of the total system of which they are a part are, therefore, determined by one and the same action principle. This choice of subsystem corresponds to the possibility of augmenting the Lagrange function by the divergence of the gradient of the electron density a step that, while leaving the equations of motion unchanged, modifies the generating operators in the required manner. © 1994 John Wiley & Sons, Inc.     

Three-dimensional atom probe study of the segregation behaviour of Ni91Pt9 alloy after sputtering

To investigate local ordering and segregation phenomenon in a Ni91Pt9-alloy after sputtering and annealing a 3D optical atom probe (OAP) has been used. The specimen tips have been prepared from polycrystalline samples. To sputter the samples a separate preparation chamber with a scannable Ar-sputter-gun is connected to the OAP vessel. When necessary, the sample can be electrically heated to induce segregation and cure the altered layer. After a heat treatment of a Ni91 at. %Pt 9 at.% specimen at 1100 K the surface of a (111)-oriented specimen is enriched in platinum by a factor of two in relation to the bulk. The phenomenon of short-range ordering has been investigated on the surface and in the subsurface volume. A 3D reconstruction of this annealed NiPt specimen shows regions with high concentration of platinum that gives an indication at short-range ordering. Uniform sputtering of the tip without a heat treatment induces a decisive depletion of Pt on the surface and the following subatomic layers. The atom-probe results of specimens in thermal equilibrium are in close agreement to further surface sensitive results obtained from Ion Scattering Spectroscopy (ISS) and Auger Electron Spectroscopy (AES).     

Mellin transform solution for the static line-source excitation ofa dielectric wedge

An integral transform analysis of the static scattering of the two-dimensional potential radiated by a line source in the vicinity of a penetrable wedge is presented. The Mellin transform is used to derive the exact static solution to Laplace's equation for the dielectric wedge, in the form of a modal series. The important dielectric edge condition behavior is explicitly contained in this analytic solution     

A comparison of two conformal methods for FDTD modeling

Two conformal finite-difference time-domain (FDTD) methods are considered, the contour path (CPFDTD) method of Jurgens et al. (see IEEE Trans. Antennas Propagat., vol.40, p.357, 1992) and the overlapping grid (OGFDTD) method of Yee et al. (see IEEE Trans. Antennas Propagat., vol.40, p.1068, 1992). Both TE and TM scattering from a two-dimensional (2-D), perfectly conducting circular cylinder are used to test the accuracy of the methods for curved surfaces. Also, TE and TM scattering from a 2-D, perfectly-conducting rotated square cylinder are used to test the accuracy for corners and edges. It is shown that the conformal method proposed by Yee et al. provide significant improvement in accuracy over the original FDTD algorithm for most of the geometries studied. However, implementation becomes more difficult as the geometries become more complex. The conformal method proposed by Jurgens et al. provide significant improvement in accuracy as well for most of the geometries studied. However, improvement does not occur for the TM case when the square cylinder is not aligned properly with the grid. Implementation of the CPFDTD method is relatively straightforward. For the majority of the cases studied, the OGFDTD method is more accurate than the CPFDTD method     

Tunable wavelength filters based on nonlinear optical interactionsin semiconductor amplifiers

A novel class of narrow-band tunable wavelength filters is proposed and evaluated. Wavelength selectivity of the proposed filters Is derived from the finite time response of an optical nonlinearity. The nonlinearity is gain saturation in semiconductor optical amplifier structures. The filters are shown to have very narrow passbands tunable over the entire semiconductor gain bandwidth. The key to filter implementation is a device configuration in which the wave-mixing products can be isolated from the amplified inputs. Three integrated optics compatible configurations are considered and shown to have high filter throughputs 34 to 180% and subangstrom bandwidths     

New concept for applying edge line phase-shifting masks to arbitrary mask layouts

This paper explains the principle of a method which avoids printing of phantom resist lines due to undesired intensity minima appearing on Cr-less edge line phase-shifting masks. The method combines principles of grey-tone lithography and attenuated phase-shifting masks to give, what we call, a Cr-Less Attenuated Phase-shifting mask (CLAP). Rules for generating a CLAP design and a paradigm setup of a CLAP mask are presented. The capabilities and possible limitations of the CLAP method based on simulated results for a standard wafer stepper setup using the SOLID lithography simulator are being assessed.     

The TINA initiative [intelligent networks]

The telecommunications information networking architecture (TINA), which builds on the current advances in broadband communication and distributed computing technologies, specifying a software-based architecture for future information networks that are required to transport multimedia information and manage multimedia communication, is described. An important aspect of the architecture is that service segment functions are separated from delivery segment functions. Another key aspect is the elimination of the rigid division between network applications and operations applications that exists in current-day networks. In the TINA architecture, both kinds of applications execute on a common distributed processing platform that hides from applications the effects and complexities introduced by distribution. The architecture supports application interoperability enabling flexible construction of services, composed of service components distributed across network domains, allowing network operators and service providers to cooperatively meet the needs of the user