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121.
Ha J.H. Kim S.W. Seol Y.S. Park H.K. Choi S.H. 《Semiconductor Manufacturing, IEEE Transactions on》1996,9(2):289-291
The plug loading effect occurring during the etchback of tungsten was investigated in a magnetically enhanced reactive ion etcher using SF 6/Ar mixtures. It was found that while the plug loading effect is independent of varying SF6/Ar flow rate ratio and magnetic field intensity, it is reduced under the condition of high selectivity of tungsten relative to TiN which was achieved at high chamber pressure and low RF power. It is proposed that when TiN is used as a glue layer, the W etch rate enhancement in the plug is mainly controlled by a local loading effect. Under the optimized etchback conditions the plug loss was successfully controlled without the tungsten residue left on severe topology 相似文献
122.
Williams K.A. White I.H. Burns D. Sibbett W. 《Quantum Electronics, IEEE Journal of》1996,32(11):1988-1994
Following a comparison of picosecond-pulse generation techniques, feedback schemes are reported for the generation of picosecond pulse trains with improved jitter for both multicontact and conventional single-contact InGaAsP-InP lasers. Subpicosecond jitter is achieved for Q-switched laser sources using a novel optoelectronic feedback scheme. The use of resonant electrical feedback is shown to improve the timing jitter of gain-switched pulses by up to six times. Pulse-to-pulse timing jitter as low as 250 fs is demonstrated for a hybrid of optical and electrical feedback schemes. Limits for timing jitter in diode lasers are established for optoelectronic, electrical, and optical feedback schemes, and the key picosecond pulse generation schemes are compared in terms of timing jitter for the first time 相似文献
123.
Kovacs G.T.A. Storment C.W. Halks-Miller M. Belczynski C.R. Jr. Santina C.C.D. Lewis E.R. Maluf N.I. 《IEEE transactions on bio-medical engineering》1994,41(6):567-577
A new process for the fabrication of regeneration microelectrode arrays for peripheral and cranial nerve applications is presented. This type of array is implanted between the severed ends of nerves, the axons of which regenerate through via holes in the silicon and are thereafter held fixed with respect to the microelectrodes. The process described is designed for compatibility with industry-standard CMOS or BiCMOS processes (it does not involve high-temperature process steps nor heavily-doped etch-stop layers), and provides a thin membrane for the via holes, surrounded by a thick silicon supporting rim. Many basic questions remain regarding the optimum via hole and microelectrode geometries in terms of both biological and electrical performance of the implants, and therefore passive versions were fabricated as tools for addressing these issues in on-going work. Versions of the devices were implanted in the rat peroneal nerve and in the frog auditory nerve. In both cases, regeneration was verified histologically and it was observed that the regenerated nerves had reorganized into microfascicles containing both myelinated and unmyelinated axons and corresponding to the grid pattern of the via holes. These microelectrode arrays were shown to allow the recording of action potential signals in both the peripheral and cranial nerve settings, from several microelectrodes in parallel 相似文献
124.
The adoption of asymmetrical digital subscriber lines (ADSL) technology in conjunction with the broadcast digital subscriber lines (BDSL) proposed in this paper could provide a cost effective solution for the introduction of digital video services in the near term. BDSL provides the same digital broadcast video programs to all subscribers through existing twisted pair telephone loops. In this paper, the basics of telephone loop-based digital subscriber lines are first discussed. Then the potential of BDSL is explored in the twisted pair loop plant near end crosstalk (NEXT), far end crosstalk (FEXT), and white noise environment. The capability of BDSL is examined with different serving areas and transmit power levels. The possibility of using orthogonal quadrature amplitude modulation (QAM) to implement a zero guard-band BDSL system is studied. Computer BDSL performance simulations are then presented. The combination of high-bit-rate digital subscriber lines (HDSL), ADSL, and BDSL can provide telephone subscribers many digital broadband services 相似文献
125.
Ferdinand P. Ferragu O. Lechien J.L. Lescop B. Magne S. Marty V. Rougeault S. Kotrotsios G. Neuman V. Depeursinge Y. Michel J.B. Van Uffelen M. Varelas D. Berthou H. Pierre G. Renouf C. Jarret B. Verbandt Y. Stevens W. Voet M.R.H. Toscano D. 《Lightwave Technology, Journal of》1995,13(7):1303-1313
Recent developments of stability control in mines, essentially based on Ge-doped fiber Bragg gratings (FBG) are reported including results about the different aspects of the system: accurate characterizations of FBG, sensor network topology and multiplexing method, user interface design and sensor packaging 相似文献
126.
Composite chiral materials are realized by embedding large numbers of handed inclusions within a host material. A computational methodology is presented whereby the effective constitutive parameters of artificial chiral materials are computed while accounting for all self and mutual interactions among the inclusions. This technique combines a full-wave, Monte-Carlo scattering solution for randomly oriented inclusions together with an analytical solution for the scattering by a canonically-shaped body having a properly chosen constitutive model. It is believed that the effective constitutive parameters shown in this paper are the first full-wave computation of these quantities to appear in the literature 相似文献
127.
The coordinate rotation digital computer (CORDIC) algorithm is used in numerous special purpose systems for real-time signal processing applications. It uses barrel shifters to complete shift operations. However, the barrel shifter occupies most of the area of the CORDIC chip. A new structure of multilevel barrel shifters is presented. With this structure the shifter size is reduced by 68%. The novel structure can also slightly reduce the latency time of shift operations 相似文献
128.
Sungwon Kim Zuo Wang Hagan D.J. Van Stryland E.W. Kobyakov A. Lederer F. Assanto G. 《Quantum Electronics, IEEE Journal of》1998,34(4):666-672
We demonstrate and compare two phase-insensitive all-optical transistors (AOT's) based on frequency-degenerate quadratic three-wave interactions. In particular, we demonstrate gain using KTP in a type II geometry. Both AOT's exploit the phase insensitivity inherent to three-wave parametric processes when only two fields are input, providing amplification of a small signal at the operating frequency via the interaction with a second-harmonic wave. The first scheme is based on successive up- and down-conversion (i.e., cascading) while the second relies on parametric down-conversion. We obtain gains of 5 and 160 in the two configurations, respectively, with a significant background and output coherent to the pump in the first case, no background and coherence between output and signal in the second 相似文献
129.
In Europe, the challenge of the design of third-generation cellular mobile radio systems has been taken numerous research and development activities in this field have been started. The authors try to give an overview of the European activities in this field. The article is organized in two parts. In the first part, the requirements for third-generation cellular mobile radio systems such as Universal Mobile Telecommunications System (UMTS) and Future Public Land Mobile Telecommunications System (FPLMTS), which has been named International Mobile Telecommunications after the year 2000 (IMT-2000) are presented concisely. Also, the importance and challenge of the multiple access design for such third-generation cellular mobile radio systems is explained. In the second part, numerous European research activities with focus on the multiple access design for third-generation cellular mobile radio systems are reviewed 相似文献
130.
The results of a numerical study on the effect of an air gap on the input impedance and resonance frequency of a cylindrical dielectric resonator (CDR) antenna operating in the TM/sub 01/ mode as a function of dielectric constant are presented. The CDR resides on a conducting ground plane and is excited by a coaxial probe through the bottom of the ground plane. Some of the numerical results are validated experimentally.<> 相似文献