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221.
Cresswell M.W. Allen R.A. Guthrie W.F. Sniegowski J.J. Ghoshtagore R.N. Linholm L.W. 《Semiconductor Manufacturing, IEEE Transactions on》1998,11(2):182-193
The physical widths of reference features incorporated into electrical linewidth test structures patterned in films of monocrystalline silicon have been determined from Kelvin voltage measurements. The films in which the test structures are patterned are electrically insulated from the bulk-silicon substrate by a layer of silicon dioxide provided by SIMOX (Separation by the IMplantation of OXygen) processing. The motivation is to facilitate the development of linewidth reference materials for critical-dimension (CD) metrology-instrument calibration. The selection of the (110) orientation of the starting silicon and the orientation of the structures' features relative to the crystal lattice enable a lattice-plane-selective etch to generate reference-feature properties of rectangular cross section and atomically planar sidewalls. These properties are highly desirable for CD applications in which feature widths are certified with nanometer-level uncertainty for use by a diverse range of CD instruments. End applications include the development and calibration of new generations of CD instruments directed at controlling processes for manufacturing devices having sub-quarter-micrometer features 相似文献
222.
Neural network impedance force control of robot manipulator 总被引:1,自引:0,他引:1
The performance of an impedance controller for robot force tracking is affected by the uncertainties in both the robot dynamic model and environment stiffness. The purpose of this paper is to improve the controller robustness by applying the neural network (NN) technique to compensate for the uncertainties in the robot model. NN control techniques are applied to two impedance control methods: torque-based and position-based impedance control, which are distinguished by the way of the impedance functions being implemented. A novel error signal is proposed for the NN training. In addition, a trajectory modification algorithm is developed to determine the reference trajectory when the environment stiffness is unknown. The robustness analysis of this algorithm to force sensor noise and inaccurate environment position measurement is also presented. The performances of the two NN impedance control schemes are compared by computer simulations. Simulation results based on a three-degrees-of-freedom robot show that highly robust position/force tracking can be achieved in the presence of large uncertainties and force sensor noise 相似文献
223.
Le C.T.C. Ishimaru A. Kuga Y. Yea J.-H. 《Geoscience and Remote Sensing, IEEE Transactions on》1998,36(1):61-71
The polarimetric angular memory effect is applied to obtain the average topographic height of a rough surface. This novel effect improves the height sensitivity while maintaining a good degree of correlation between the sensors. By using a reference flat surface, the interferometric phase is linearly related to the mean topographic height. The combination of angular memory and wideband frequency interferometry (AMFI) is realized and offers a means to design a robust interferometric system. Extension of the technique to the pulse scattering problem is studied through the two-frequency mutual coherence function, and its time-domain transform provides an equivalent way to obtain the mean topographic height by combining both spatial and temporal diversity. Millimeter-wave (MMW) experiments are conducted with rough surfaces of different statistics and scattering media of different types (gravel, sand, and rough surfaces) to prove the effectiveness of the technique 相似文献
224.
In this work, wavelet basis and source coding are jointly optimized, while specifying the source coding strategy as entropy-constrained lattice vector quantizer (ECLVQ). The presented approach differs from previous works in which the choice of wavelet basis is quasioptimal, but the quantizer set is optimally chosen 相似文献
225.
Whittum D.H. Ebihara K. Hiramatsu S. Kishiro J.-i. Monaka T. Ozaki T. Takayama K. 《IEEE transactions on plasma science. IEEE Nuclear and Plasma Sciences Society》1993,21(1):136-141
Studies of microwave amplification with an in-focused electron beam drawn from an induction injector are reported. A free-electron laser (FEL) operating at 9.4 GHz and employing ion-focusing within the interaction region has achieved power in excess of 30 MW at 9.4 GHz, with a beam energy of 0.8 MeV and current of 0.7 kA. Peak gain is 20 dB/m, with no saturation after 15 wiggler periods. Also reported are the first evolution and detuning data for an ion-channel laser/maser (ICL). Two shortcomings of the prematurely halted ICL studies are poor frequency discrimination and a large axial plasma gradient. Prospects for operation with an upgraded 1.6 MeV accelerator are discussed 相似文献
226.
227.
G. D. Krapivan N. I. Val'ter T. Ya. Kaklyugina V. G. Kul'nevich 《Chemistry of Heterocyclic Compounds》1994,30(3):289-295
Halogen in positions 3 and 5 of the furan ring in ftirfurylidenedioxanediones is readily replaced by dithiocarbonate, dithiocarbatnate, dithiophosphate, thiocyanate, and azide anions, and by thiourea, and secondary and tertiary amines. The conformation of the initial halogen derivative is retained in the substitution products.Translated from Khimiya Geterotsiklicheskikh Soedinenii, No. 3, pp. 327–334, March, 1994. 相似文献
228.
M. A. Mikhaleva B. M. Bolotin T. A. Kizner E. S. Serebrykova 《Chemistry of Heterocyclic Compounds》1994,30(1):79-81
We have synthesized 5-alkyl(alkoxy)-2-(o-lzydroxy-p-alkoxyphenyl)pyrimidines and considered the effect of the OH group on the inesomorphism. We have found that in binuclear o-hydroxyarylpyrimidines, an ortho OH group forming an intramolecular hydrogen bond increases Tmp, inhibits the appearance of nematic properties, and promotes the appearance of a smectic A.Translated from Khimiya Geterotsiklicheskikh Soedinenii, Vol. 30, No. 1, pp. 90–92, January, 1994. 相似文献
229.
Kh. T. Mirzaazimova S. D. Gusakova A. I. Glushenkova 《Chemistry of Natural Compounds》1994,30(5):555-558
The yields and fatty acid compositions of the free lipids and lipids weakly and strongly bound to proteins from seeds of cottonplant varieties resistant and susceptible to verticillium wilt have been determined and the changes in these indices in the seeds of the infected plants have been measured. It has been established that the seeds of healthy plants of the two varieties are similar in the qualitative compositions of the lipids and fatty acids but differ with respect the amounts of lipids in them bound with protein in different ways and with respect to the amounts of the individual fatty acids. The observed changes in the lipid and fatty-acid compositions depend on the degree of resistance of the variety to wilt. 相似文献
230.
A. N. Komissarenko T. P. Nadezhina N. F. Komissarenko 《Chemistry of Natural Compounds》1994,30(4):521-522
State Scientific Center for Drugs, Khar'kov. Ukrainian Pharmaceutical Academy, Khar'kov. Botanical Gardem, Russian Academy
of Sciences, St. Petersburg. Translated from Khimiya Prirodnykh Soedinenii, No. 4, pp. 564–565, July–August, 1994. 相似文献