Sensitivity analysis of ion implanted silicon wafers after rapid thermal annealing

In this study, we have investigated sensitivities of the ion implanted silicon wafers processed by rapid thermal annealing (RTA), which can reveal the variation of sheet resistance as a function of annealing temperature as well as implantation parameters. All the wafers were sequentially implanted by the arsenic or phosphorous implantations at 40, 80, and 100 keV with the dose level of 10¹⁴ to 2 × 10¹⁶ ions/cm². Rapid thermal annealing was carried out for 10 s by the infrared irradiation at a temperature between 850 and 1150°C in the nitrogen ambient. The activated wafer was characterized by the measurements of the sheet resistance and its uniformity mapping. The values of sensitivities are determined from the curve fitting of the experimental data to the fitting equation of correlation between the sheet resistance and process variables. From the sensitivity values and the deviation of sheet resistance, the optimum process conditions minimizing the effects of straggle in process parameters are obtained. As a result, a strong dependence of the sensitivity on the process variables, especially annealing temperatures and dose levels is also found. From the sensitivity analysis of the 10 s RTA process, the optimum values for the implant dose and annealing temperature are found to be in the range of 10¹⁶ ions/cm² and 1050-1100°C, respectively. The sensitivity analysis of sheet resistance will provide valuable data for accurate activation process, offering a guideline for dose monitoring and calibration of ion implantation process.     

Different ocular dominance map formation influenced by orientation preference columns in visual cortices

In animal experiments, the observed orientation preference and ocular dominance columns in the visual cortex of the brain show various pattern types. Here, we show that the different visual map formations in various species are due to the crossover behavior in anisotropic systems composed of orientational and scalar components such as easy-plane Heisenberg models. We predict the transition boundary between different pattern types with the anisotropy as a main bifurcation parameter, which is consistent with experimental observations.     

Single-mode plane-polarized ytterbium-doped large-core fiber laser with 633-W continuous-wave output power

We demonstrate a cladding-pumped single-mode plane-polarized ytterbium-doped fiber laser generating 633 W of continuous-wave output power at 1.1 microm with 67% slope efficiency and a polarization extinction ratio better than 16 dB. The laser is end pumped through both fiber ends and shows no evidence of roll-over, even at the highest output power, which is limited only by the available pump power.     

Significant and differential acceleration of dephosphorylation of the insecticides, paraoxon and parathion, caused by alkali metal ethoxides

In the reaction of paraoxon with alkali metal ethoxides, ion-paired EtO-M+ species are more reactive than the dissociated EtO- with the reactivity order EtO-Li+ EtO-Na+ > EtO-K+ > EtO-, while in the reaction of parathion, the reactivity follows the order EtO-K+ > EtO- > EtO-Na+ > EtO-Li+.     

Temperature dependence of low loss polymeric AWG

We investigate on the variation of loss and temperature dependence of a polymeric arrayed waveguide grating (AWG) depending on its substrate, by fabricating 16-channel polymeric AWGs with various substrate conditions. Insertion loss for a polymeric AWG on a silicon substrate is measured as low as 3.1 dB. The temperature-dependent wavelength shift for a polymeric AWG detached from the substrate is maintained within 0.1 nm from 20 to 80 °C. But we observe a degradation of insertion loss and a little instability in wavelength characteristics both for the detached polymeric AWG and for a polymeric AWG on a polymer substrate. We investigate on those optical properties of the polymeric AWGs based on measured thermal expansion properties of the polymers.     

Efficient inverse radiation analysis in a cylindrical geometry using a combined method of hybrid genetic algorithm and finite-difference Newton method

An inverse radiation problem was considered to estimate boundary conditions such as temperature distribution and emissivity in axisymmetric absorbing, emitting, and scattering medium, given the measured incident radiative heat fluxes. The finite-volume method was employed to solve a direct radiative transfer equation for a two-dimensional axisymmetric geometry. Various parameter estimators, such as conjugate-gradient method, hybrid genetic algorithm, and finite-difference Newton method, were employed to solve the inverse problems, while discussing their performances in terms of estimation accuracy and computational efficiency. Based on this, we proposed, as a best inverse analysis tool, a new combined method that adopted the hybrid genetic algorithm as an initial value selector and used the finite-difference Newton method as a parameter estimator.     

TD‐CFIE Formulation for Transient Electromagnetic Scattering from 3‐D Dielectric Objects

In this paper, we present a time domain combined field integral equation formulation (TD‐CFIE) to analyze the transient electromagnetic response from dielectric objects. The solution method is based on the method of moments which involves separate spatial and temporal testing procedures. A set of the RWG functions is used for spatial expansion of the equivalent electric and magnetic current densities, and a combination of RWG and its orthogonal component is used for spatial testing. The time domain unknowns are approximated by a set of orthonormal basis functions derived from the Laguerre polynomials. These basis functions are also used for temporal testing. Use of this temporal expansion function characterizing the time variable makes it possible to handle the time derivative terms in the integral equation and decouples the space‐time continuum in an analytic fashion. Numerical results computed by the proposed formulation are compared with the solutions of the frequency domain combined field integral equation.