Effect of epitaxial realignment on the leakage behavior of arsenic-implanted,as-deposited polycrystalline Si-on-single crystal Si diodes

When dopants are indiffused from a heavily implanted polycrystalline silicon film deposited on a silicon substrate, high thermal budget annealing can cause the interfacial “native” oxide at the polycrystalline silicon-single crystal silicon interface to break up into oxide clusters, causing epitaxial realignment of the polycrystalline silicon layer with respect to the silicon substrate. Anomalous transient enhanced diffusion occurs during epitaxial realignment and this has adverse effects on the leakage characteristics of the shallow junctions formed in the silicon substrate using this technique. The degradation in the leakage current is mainly due to increased generation-recombination in the depletion region because of defect injection from the interface.     

Reduction of loading effect by tungsten etchback in a magneticallyenhanced reactive ion etcher

The plug loading effect occurring during the etchback of tungsten was investigated in a magnetically enhanced reactive ion etcher using SF ₆/Ar mixtures. It was found that while the plug loading effect is independent of varying SF₆/Ar flow rate ratio and magnetic field intensity, it is reduced under the condition of high selectivity of tungsten relative to TiN which was achieved at high chamber pressure and low RF power. It is proposed that when TiN is used as a glue layer, the W etch rate enhancement in the plug is mainly controlled by a local loading effect. Under the optimized etchback conditions the plug loss was successfully controlled without the tungsten residue left on severe topology     

Analysis of Electromagnetic Scattering from an Eccentric Multilayered Sphere

An exact analytic solution of a plane electromagnetic (EM) wave scattered by an eccentric multilayered sphere (EMS) is obtained. It is assumed that the layers are perfect dielectrics and that the innermost core is a perfectly conducting sphere. Each center of a layer is translated along the incident axis. All fields are expanded in terms of the spherical vector wave functions with unknown expansion coefficients. The addition theorem for spherical wave functions is used prior to applying the boundary conditions. The unknown coefficients are determined by solving a system of linear equations derived from the boundary conditions. Numerical results of the scattering cross sections are presented on the plane of φ=0 degrees and φ=90 degrees. The convergence of modal solutions and the characteristics of patterns are examined with various geometries and permittivity distributions     

Mode analysis of DFB SE lasers

This paper presents theoretical results on mode characteristics of surface-emitting (SE) lasers utilizing an active second-order grating section. Based on a coupled-mode approach, longitudinal modes and the associated space-harmonic transverse modes are calculated via a numerical technique. From these, the lasing-mode spectrum, near- and far-field patterns of the radiation mode, and the surface-emission power efficiency are obtained. Effects of the substrate reflector and the grating parameters are also investigated. Finally, comparisons are made with conventional, edge-emitting DFB lasers. The results indicate that with a suitable choice of structural parameter values, DFB SE lasers can be made to possess both the spectral discrimination of the conventional DFB lasers and the advantages of SE lasers at the same time and also that the second lowest longitudinal mode may be preferred over the fundamental longitudinal mode for many applications due to its symmetric field distribution     

Still image coding based on vector quantization and fractalapproximation

In this paper, we propose a coding algorithm for still images using vector quantization (VQ) and fractal approximation, in which low-frequency components of an input image are approximated by VQ, and its residual is coded by fractal mapping. The conventional fractal coding algorithms indirectly used the gray patterns of an original image with contraction mapping, whereas the proposed fractal coding method employs an approximated and then decimated image as a domain pool and uses its gray patterns. Thus, the proposed algorithm utilizes fractal approximation without the constraint of contraction mapping. For approximation of an original image, we employ the discrete cosine transform (DCT) rather than conventional polynomial-based transforms. In addition, for variable blocksize segmentation, we use the fractal dimension of a block that represents the roughness of the gray surface of a region. Computer simulations with several test images show that the proposed method shows better performance than the conventional fractal coding methods for encoding still pictures.     

On detecting the presence of fetal R-wave using the moving averagedmagnitude difference algorithm

An efficient algorithm detecting the presence of a fetal QRS complex is presented. The proposed fetal QRS detection method computes the averaged magnitude of the difference between the fetal ECG signal and the reference signal to detect the fetal QRS event. The detected fetal QRS complexes are exponentially averaged to generate the template signal which can track the slowly varying shape of the fetal ECG signal. As an effort to obtain improved detection performances, two approaches of normalizing the fetal ECG signal and the template are considered.     

Emission and sputtering characteristics of Ne-Ar mixed gas glow discharge plasmas.

The emission characteristics of several Cu lines emitted from a Ne-Ar mixed gas glow discharge plasma were investigated. The addition of small amounts of Ar to a Ne plasma increases the sputtering rate of a Cu sample because Ar ions, which work as the impinging ions for cathode sputtering, are predominantly produced through Penning ionization collisions between Ne metastables and Ar atoms. Ar addition also elevates the number density of electrons in the plasma. These changes occurring in the Ne-Ar mixed gas plasma result in enhanced emission intensities of the Cu lines. The Cu II 270.10-nm and the Cu II 224.70-nm lines yield different intensity dependence on the Ar partial pressure added. This phenomenon is because these Cu II lines are excited principally through different charge transfer processes: collisions with Ne ions for the Cu II 270.10-nm line and collisions with Ar ions for the Cu II 224.70-nm line. The shape of sputtered craters in the Ne-Ar glow discharge plasma was measured. The depth resolution was improved when Ar was added to a Ne plasma because the crater bottoms were flatter with larger Ar partial pressures.     

On <Emphasis Type="Italic">W</Emphasis>-geometry of Toda systems

We describe W-geometry of two-dimensional Toda systems associated with the Lie algebra C _n . __________ Translated from Fundamental’naya i Prikladnaya Matematika (Fundamental and Applied Mathematics), Vol. 11, No. 1, Geometry, 2005.     

Angular and NiFe thickness dependence of exchange bias in IrMn/NiFe/IrMn thin film

Exchange biased IrMn/NiFe/IrMn thin films were studied as a function of NiFe thickness. In plane angular dependence of a resonance field distribution which is measured by FMR was analyzed as a combined effect of an unidirectional anisotropy and an uniaxial anisotropy. The unidirectional anisotropic field and the uniaxial anisotropic field were linearly varied with NiFe thickness while the films with a thicker NiFe layer do not follow the linear variation. Resonance field and linewidth variations were also analysed with NiFe thickness.